User Manual

General Information 15
iina70e 01.fm technical handbook(1408)
1.3.2 Technical Data
1.3.2.1 Physical Data
Hinweis To get down to the minimum detected leak rate range some conditions
must be fulfilled:
• UL1000 and UL1000 Fab has fully warmed up
• Ambient conditions must be stable (temperature, no vibration/accelerations.)
• The part under test has been evacuated long enough (background is no longer
decreasing)
• ZERO must be active
1.3.2.2 Electrical Data
Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates
• in vacuum mode (ULTRA) <5×10
-12
mbar l/s
limit of detection in sniffer mode <5×10
-8
mbar l/s
Maximum displayable helium leak rate in ULTRA 0.1 mbar l/s
Measurement range 12 decades
Time constant of the leak rate signal (blanked off,
63% of the final value)
<1 s
Pumping speed (Helium) at the inlet
Max. roughing capability 25 m
3
/h (50 Hz)
17.6 cfm (50 Hz)
30 m
3
/h (60 Hz)
21.1 cfm (60 Hz)
• in vacuum mode
– GROSS mode 8 l/s
– FINE mode 7 l/s
– ULTRA mode 2.5 l/s
Detectable masses 2, 3 and 4
Mass spectrometer 180° magnetic sector field
Ion source 2 filaments;
Iridium/Yttria-oxide
Inlet port DN 25 KF
Run-up time (after starting) 3 min
Part no. 550 - 000A, 550 - 100A 230 V 50 Hz
Part no. 550 - 001A, 550 - 101A 115 V 60 Hz
Part no. 550 - 002A 100 V 50/60 Hz
Power consumption 1100 VA
Type of protection IP20
Power cords (EU, USA, UK) 3 m