High Throughput Diffusion Pumps HS-16 HS-20 HS-32 NHS-35 Part No. 699901140 Rev.
DRAFT 12/23/04 High Throughput Diffusion Pumps Santovac® 5 Diffusion Pump Fluid of SANTOVAC FLUIDS, INC. Viton® is a registered trademark of E. I du Pont de Nemours and Company.
High Throughput Diffusion Pumps Contents Diffusion Pump Hazards . . . . . . . . . . . . . . . . . . . . . . . 1 Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 Pressurization Hazards . . . . . . . . . . . . . . . . . . . . 3 Dangerous Substances . . . . . . . . . . . . . . . . . . . . . 3 High Temperatures . . . . . . . . . . . . . . . . . . . . . . . 4 High Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Large Equipment and Heavy Weights . . . . . . . . .
High Throughput Diffusion Pumps List of Figures Figure Caption DRAFT 12/23/04 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 iv List of Tables Page Table HS-20 Diffusion Pump . . . . . . . . . . . . . . . . . . 5 HS-16 Speed and Throughput Curves, 8.1 kW 8 HS-20 Speed and Throughput Curves . . . . . . 8 HS-32 Speed and Throughput Curves . . . . . . 8 NHS-35 Speed and Throughput Curves . . . . . 8 HS-16 Outline with ASA Flanges . . . . . . . . .
High Throughput Diffusion Pumps Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the purchase price of the Product. Items expendable in normal use are not covered by this warranty.
High Throughput Diffusion Pumps Instructions for Use This equipment is designed for use by professionals. The user should read this instruction manual and any other additional information supplied by Vacuum Technologies before operating the equipment.
Declaration of Conformity Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità We Wir Nous Nosotros Wij Noi Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA, 02421-3133 USA declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß dieses Produkt, déclarons sous notre seule responsabilité que le produit, declaramos, bajo nuestra sola responsabilidad
DRAFT 12/23/04 High Throughput Diffusion Pumps This page intentionally left blank.
High Throughput Diffusion Pumps Diffusion Pump Hazards Designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use guards, safety features, and interlocks as recommended.
High Throughput Diffusion Pumps Explosion ❑ DRAFT 12/23/04 ❑ ❑ Operation of the diffusion pump without continuous evacuation below 0.5 Torr (0.67 mbar), or without coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion.
Pressurization Hazards Dangerous Substances ❑ ❑ Chemical Dangers of Acetone and Alcohol: Diffusion pumps are typically cleaned with acetone or alcohol. Acetone, alcohol, and most other solvents are irritants, narcotics, and depressants, and/or carcinogenic. Their inhalation and ingestion may produce serious effects. Even absorption through the skin can result in moderate toxicity. Always ensure that cleaning operations are performed in large, well-ventilated rooms.
High Throughput Diffusion Pumps High Voltages ❑ Hot Surfaces: Boiler temperatures reach 530 °F (275 °C) which can cause serious burns. Always ensure that surfaces have cooled to near room temperature before touching them. ❑ ❑ Hot Cooling Water and Steam: The water used to cool the pump can reach scalding temperatures. Touching or rupture of the cooling surface can cause serious burns. Water left inside Quick Cool coils from previous use turns to steam when the pump is reheated.
High Throughput Diffusion Pumps Diffusion Pump Basics Pump Operation The diffusion pump works by heating the pump fluid to its boiling point. The vapors travel upward inside the jet assembly and are accelerated out and downward through the jet nozzles toward the cool outer walls of the pump, where the vapor condenses back into a fluid. As the vapor passes the inlet, it picks up elements of the gas to be exhausted and carries them to the ejector and out of the pump via the foreline.
6 Cooling Water Flowrate @ Inlet Temperature of 60 to 80 oF gpm (US) kW Electrical Power AC, 50/60 Hz, 3 phase mg/cm2/min Torr mbar Full Load Backstreaming Rate at Pump Inlet (within Optimum Operating Range) Torr mbar No Load Forepressure, Max. Torr-l/s mbar-l/s Overload Range (@ 1x10−2 Torr) CAUTION Torr-l/s mbar-l/s l/s, Air l/s, Helium 13.5 18.0 10.0 13.3 18 23 14 19 17,500 22,000 35 45 23 31 32,000 40,000 35 45 25 33 50,000 62,500 8.1 1.5 <0.0015 0.55 0.73 0.65 0.86 9.
qt (US) liters cfm lbs (kg) Fluid Charge Recommended backing pump capacity* Weight HS-16, 9.6 kW 100 5 4.7 85 45 45 HS-20 300 12 11.4 180 60 60 HS-32 600 (272) DRAFT 12/23/04 500 (227) 1500 (682) *Recommended sizes when operating at maximum throughput. 80 3 2.8 48 30 Cooldown Time minutes Without Quick Cool With Quick Cool HS-16, 8.1 kW 30 Units Operating Specifications (Continued) minutes Warmup Time Specification Table 4 1500 (682) 300 12 11.
High Throughput Diffusion Pumps Pump Air Speed and Throughput DRAFT 12/23/04 The pumping function is graphically described by relating inlet pressure to both air speed and throughput. This relationship is shown for the large vacuum pumps in the set of graphs shown in Figure 2 through Figure 5. Figure 2 HS-16 Speed and Throughput Curves, 8.
High Throughput Diffusion Pumps Physical Specifications Table 5: HS-16: Dimensions and Weights 16xφ1.12 holes Electrical Units 4xφ.75 holes φ23.50 O.D. φ7.50 45° 24.00 (610) 1/4 F.P.T. Water Connections (Typ.) NW-25 Gauge Port HS-16 Height, minimum in (mm) including clearance for heater access 51 (1295.4) Weight lbs (kg) 500 (227) Connections: Body and Foreline Quick Cool coils in in 1/4 FPT 1/4 FPT 3/2 F.P.T. Cold Cap Connections 43.00 (1092) DRAFT 12/23/04 24.
High Throughput Diffusion Pumps Table 7 HS-20: Dimensions and Weights DRAFT 12/23/04 Units Figure 7 Height, minimum including clearance for heater access in (mm) 56 (1422) Weight lbs (kg) 600 (272.2) Connections: Body and Foreline Quick Cool coils in in 1/4 FPT 3/8 FPT HS-20 Outline with ASA Flanges Table 8 HS-20 Flange Dimensions ASA Units HS-20 Inlet ISO Foreline Inlet, 630 K Foreline, 160 K OD in (mm) 27.50 (698.5) 9.00 (228.6) 27.17 (690.1) 7.09 (180.1) ID in (mm) 21.
High Throughput Diffusion Pumps Table 9 HS-32: Dimensions and Weights Units Height, minimum including clearance for heater access in (mm) 74 (1879.6) Weight lbs (kg) 1500 (680.4) Connections: Body and Foreline Quick Cool coils in in 3/8 FPT 3/8 FPT HS-32 Outline with ASA Flanges Table 10 HS-32 Flange Dimensions ASA Units DRAFT 12/23/04 Figure 8 HS-32 Inlet ISO Foreline Inlet, 800 F Forline, 200 K OD in (mm) 38.12 (968.3) 11.00 (279.4) 36.22 (920.0) 9.45 (240.0) ID in (mm) 32.
High Throughput Diffusion Pumps Table 11 NHS-35: Dimensions and Weights DRAFT 12/23/04 Units NHS-35 Height, minimum including clearance for heater access in (mm) 80 (2032) Weight lbs (kg) 1500 (680.4) Connections: Body and Foreline Quick Cool coils in in 3/8 FPT 3/8 FPT Foreline Cooling Coil Figure 9 NHS-35 Outline with ASA Flanges Table 12 NHS-35 Flange Dimensions ASA Units Inlet ISO Foreline Inlet, 1000 F Foreline, 200 K OD in (mm) 41.75 (1060.5) 11.00 (279.4) 44.09 (1119.
High Throughput Diffusion Pumps WARNINGS Setup ❑ Before lifting a pump, check the weight of the equipment in Table 4 on page 6. ❑ Use power-assisted equipment, and trained moving and installation personnel to avoid dropping, slipping, and overturning the pump and severely injuring personnel. ❑ Do not stand under equipment being moved.
High Throughput Diffusion Pumps Cleaning a New Pump NOTE A new pump requires cleaning only if the desired vacuum is below 1x10−7 Torr. Cleaning Safety Cleaning a diffusion pump involves the use of acetone and alcohol, both of which are toxic and explosive. Take careful note of the following information and warnings before starting a cleaning process.
High Throughput Diffusion Pumps System and Utility Connections Utility failure can cause overheating, damage to the equipment and explosion. Design your system to protect personnel and property from these hazards. Vacuum Connections Cooling Water The pump body must be installed vertical and plumb. Check that the mating flange on the system is horizontal ±1o. If this condition is not met, correct the system mount before installing the pump.
High Throughput Diffusion Pumps Quick Cool Coil Connection Obtaining High Vacuum on the NHS-35 The Quick Cool coil at the boiler plate must be connected to an open drain and the feed line must be controlled by a separate water 3-way valve: open, closed, and vented to the atmosphere. The drain must be below the boiler level so that it is drained completely when the Quick Cool coil water supply is shut off and the pump is operating.
High Throughput Diffusion Pumps Electrical Connections Terminal connections for each pump are different depending on the source voltage available, the principle difference being a Y or ∆ connection of the heaters. Table 13 provides the figure number and page of the wiring diagrams in this manual. The specific wiring diagrams for each pump shows both Y and ∆ connections and the source voltages for each connection.
High Throughput Diffusion Pumps Overheating: Detection by Thermal Switches An overheat condition is detected by two normally closed thermal cutout switches, one of which monitors the boiler temperature while the other monitors the water temperature. These switches are set at the factory and do not require adjustment. The cutout temperatures for the water and boiler switches are given in Table 14.
RTOTL1-L2/L2-L3/L3-L1 RTOT, 8100 W RTOT 9600 W Element Resistance (+10%, -5%) 2700 W 3200 W 200 V ≈ 9 Ω 200 V ≈ 9 Ω 200 V ≈ 15 Ω 200 V ≈ 13 Ω 240 V ≈ 14 Ω 240 V ≈ 12 Ω 240 V ≈ 21 Ω 240 V ≈ 18 Ω 400 V ≈ 40 Ω 400 V ≈ 33 Ω 400 V ≈ 59 Ω 400 V ≈ 50 Ω 430 V ≈ 46 Ω 430 V ≈ 39 Ω 430 V ≈ 69 Ω 430 V ≈ 58 Ω 440 V ≈ 48 Ω 440 V ≈ 41 Ω 440 V ≈ 72 Ω 440 V ≈ 61 Ω 480 V ≈ 55 Ω 480 V ≈ 46 Ω 480 V ≈ 85 Ω 480 V ≈ 72 Ω Figure 11 DRAFT 12/23/04 High Throughput Diffusion Pumps HS-16 200/240/400/430
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 12 20 HS-16 415 V Wiring
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 13 HS-20 200/240/400/430/480 V Wiring 21
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 14 22 HS-20 415 V Wiring
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 15 HS-32 200 V Wiring 23
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 16 24 HS-32 240 V Wiring
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 17 HS-32 460 V Wiring 25
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 18 26 HS-32 415 V Wiring
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 19 HS-32 480 V Wiring 27
IL = 67.8A @ 240V IL = 34.6A @ 400V IL = 31.5A @ 410V Figure 20 28 NHS-35 240/400/440 V Wiring 0V 40 0V V 44 240 A@ 20 A @ @ I p = 18.
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 21 NHS-35 415 V Wiring 29
DRAFT 12/23/04 High Throughput Diffusion Pumps Figure 22 30 NHS-35 480 V Wiring
High Throughput Diffusion Pumps Initial Vacuum Test Pumps and their components are designed for vacuum service; they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities. Serious accidents have been caused by intentional pressurization of vacuum systems and their components. WARNINGS ❑ Never pressurize any part of a vacuum system for test or any other purpose.
High Throughput Diffusion Pumps Adding or Changing Pump Fluid WARNINGS The risk of explosion on large vacuum diffusion pumps is increased by these factors: ❑ Use of a hydrocarbon fluid as the pumping fluid. Hydrocarbon fluid is more prone to explosion than synthetic silicone-based fluid. If a hydrocarbon fluid is being used, check the entire system under vacuum before operating the pump. ❑ Low fluid levels in the pump which DRAFT 12/23/04 can lead to overheating.
High Throughput Diffusion Pumps To add or change pump fluid: 1. Locate the fill and drain fittings in the appropriate outline drawing. Refer to Figure 6 on page 9 through Figure 9 on page 12. The fittings have special Viton® elastomer sealed plugs. 4. Remove the plug from the filling port of the pump and pour the fluid in up to the FULL COLD level on the sight glass as shown in Figure 23. The fluid can also be poured in from the pump inlet or foreline. 2. Assure that the power to the heaters is off.
High Throughput Diffusion Pumps Operation During initial installation, the newly installed pump fluid may be subjected to degassing. This may result in foreline pressure fluctuations that are considered normal.
High Throughput Diffusion Pumps Startup Procedure Shutdown Procedure To start the pump: 1. Evacuate the diffusion pump using a mechanical roughing pump to below 0.5 Torr (0.67 mbar). The diffusion pump will not function unless the discharge pressure is less than the tolerable forepressure. 2. Turn on the cooling water supply to the pump body and check that adequate flow is provided by examining the amount of water discharged at the visual drain points.
High Throughput Diffusion Pumps Maintenance Perform these periodic checks to assure trouble-free operation. This maintenance prevents costly down-time and cleaning procedures. Maintain a day-to-day log of pump and system performance to identify marked variations that require corrective action. Periodic Inspections The maximum interval between inspection of the pump is established on the basis of experience. WARNINGS ❑ High voltages (up to 480 V) can kill.
High Throughput Diffusion Pumps Cleaning Cleaning Safety Cleaning a diffusion pump involves the use of acetone and alcohol, both of which are toxic and explosive. Take careful note of the following warnings before starting a cleaning process. Complete cleaning of the pump may be required due to gradual deterioration of pump fluids. Removal of the pump from the system is then necessary.
High Throughput Diffusion Pumps Disassembly and Reassembly Procedures Cold Cap To disassemble the cold cap, refer to Figure 24 and take the following steps. NOTE The halo baffle is disassembled in the same manner. To reassemble the cold cap: 1. Insert the end of the cold cap water line into the cold cap port opening at the side of the pump before setting the cold cap on top of the jet assembly. Be careful not to damage the sealing surfaces. 2.
High Throughput Diffusion Pumps Jet Assemblies The jet assemblies of each of the pumps are discussed and shown in the following subsections. Procedures and drawings are specific to each pump model. To disassemble the jet assembly: HS-16 Jet Assembly 2. Unscrew the top cap from its coupling and remove it. 1. Remove the cold cap or halo baffle as described in “Cold Cap” on page 38. 3. Remove the top plug. 4. Remove the drip shield that sits loosely on the 2nd stage. 5.
High Throughput Diffusion Pumps To disassemble the jet assembly: HS-20 Jet Assembly 1. Remove the cold cap or halo baffle as described in “Cold Cap” on page 38. 2. Unscrew the jet cap from the coupling assembly. 3. Remove the orifice plug. 4. Withdraw the central tube complete with the second stage jet and jet shield. 5. Remove the lower jet assembly from the pump, which consists of the third stage jet, the jet shield, the fourth stage jet, and the jet base. 6.
High Throughput Diffusion Pumps To reassemble the jet assembly: 5. Replace the third stage jet shield. 1. Replace the fourth stage jet on the jet base. 6. Install the lower jet assembly in the pump. 2. Replace and tighten the securing screws between the fourth stage and the jet base uniformly and in a cyclical pattern. 7. Check that the lower jet assembly is firmly seated on the pump with the ejector correctly positioned.
High Throughput Diffusion Pumps To disassemble the jet: HS-32 Jet Assembly 1. Unscrew and remove the hex nut holding the cold cap in place. Note its orientation prior to removal Cold Cap Cross Member Jet Rod Tie Rods 2. Remove the cold cap (or halo baffle) as described in “Cold Cap” on page 38. 3. Remove the nut, washer, and the top jet cap from the center jet rod. 4.
High Throughput Diffusion Pumps 1. If the center jet rod was removed or loosened during disassembly, thread the rod back into the boilerplate. The top of the rod should be roughly 1/16" to 1/8" below the top surface of the inlet flange (inlet plane of the pump). Once properly located, use the nut near the boilerplate to lock the rod in place. 7. Using the cross member and the appropriate lifting equipment, lower the entire jet assembly into the pump body, over the center jet rod. CAUTION 2.
High Throughput Diffusion Pumps To reassemble the jet: NHS-35 Jet Assembly Water-Cooled Cold Cap 1. If the center jet rod was removed or loosened during disassembly, thread the rod back into the boilerplate. The top of the rod should be roughly 1/16" to 1/8" below the top surface of the inlet flange (inlet plane of the pump). Once properly located, use the nut near the boilerplate to lock the rod in place. 2. Reverse steps 7 through 10 above to reassemble the lower jet assembly.
High Throughput Diffusion Pumps Heater Replacement Procedure To replace a heater: Figure 30 shows the components of the heater element assembly. The heater replacement procedure is the same for all large diffusion pumps*. 1. Use an ohmmeter at the electrical box to determine which heater element has failed. NOTE During heater replacement, the crush plate* must be replaced if the heaters are removed for inspection or maintenance. * The NHS-35 does not use a crush plate.
High Throughput Diffusion Pumps Troubleshooting Leakage Outgassing If leakage is the suspected cause of poor system performance, first check the following items: High-vacuum systems, even without external leakage, can have high gas loads due to outgassing from internal surfaces or processes. The pressure in the system is a result of gas load divided by pumping speed (p = Q/S).
High Throughput Diffusion Pumps Poor Pump or System Performance Table 15 lists the faults, the probable causes and corrective actions to take if you have a problem with a large diffusion pump.
High Throughput Diffusion Pumps Replacement Parts Table 16 HS-16 Replacement Parts DRAFT 12/23/04 Part Number Description 79299301 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No.
High Throughput Diffusion Pumps Table 17 HS-20 Replacement Parts Description 84358301 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut SST 660811494 Cold cap gasket F2622001 Cold cap follower, brass 75786001 Cold cap nut 622445026 Cold cap female coupling, 1/2" OD tube x 3/8" FPT, Imperial Flexfitting No.
High Throughput Diffusion Pumps Table 18 HS-32 Replacement Parts DRAFT 12/23/04 Part Number Description 77252801 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut SST 660811494 Cold cap grommet F2622001 Cold cap follower (brass) 75786001 Cold cap nut 622445026 Cold cap female coupling, 1/2" OD tube x 3/8" FPT, Imperial Flexfitting No.
High Throughput Diffusion Pumps Table 19 NHS-35 Replacement Parts Description 81437301 Cold cap assembly (includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut) SST 660811494 Cold cap gasket F2622001 Cold cap follower (brass) 75786001 Cold cap nut 622445026 Cold cap female coupling, 1/2" OD tube x 3/8" FPT, Imperial Flexfitting No.
DRAFT 12/23/04 High Throughput Diffusion Pumps This page intentionally left blank.
Sales and Service Offices Sales and Service Offices Canada Central coordination through: Japan Varian, Inc. Other Countries Varian, Inc. Varian, Inc. 121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437 Toll Free: (800) 882 7426 Sumitomo Shibaura Building, 8th Floor 4-16-36 Shibaura Minato-ku, Tokyo 108 Japan Tel: (81) 3 5232 1253 Fax: (81) 3 5232 1263 Via F.
