Instruction manual

EXT Split Flow Compound Turbomolecular Pumps
INTRODUCTION
PAGE
1
Mar 07 1 Issue F
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the BOC Edwards
EXT70/200H and EXT200/200H Split Flow Compound Molecular Pumps, abbreviated to EXT Split Flow
Pump in the remainder of this manual. Covering both the 24 V and 80 V variants. Please read and follow
all instructions in this manual.
The EXT Split Flow Pumps are designed for use with a BOC Edwards EXDC or EXC Controller. Read
this manual and the instruction manual supplied with your controller before you attempt to install or
operate the equipment. The controller manual contains details of electrical installation.
Important safety information in this manual is highlighted as WARNING and CAUTION instructions;
please obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
In accordance with the recommendations of EN61010, the following warning symbols may
appear on
the pump or its accessories:
Warning – refer to accompanying documentation.
Warning – risk of electric shock.
Warning – hot surfaces.
The units used throughout this manual conform to the SI international system of units of measurement.
Also throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean
standard cm
3
min
-1
: this is a flow of 1cm
3
min
-1
at an ambient temperature of 0
o
C and a pressure of
1013 mbar (1.013 x 10
5
Pa).
WARNING
Warnings are given where failure to observe the instruction could result in injury or death
to people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment,
associated equipment and process.