Data Sheet

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MPX5100

Rev 13, 05/2010

Freescale Semiconductor

Pressure

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated and

Calibrated

The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic

silicon pressure sensor designed for a wide range of applications, but particularly

those employing a microcontroller or microprocessor with A/D inputs. This patented,

single element transducer combines advanced micromachining techniques, thin-film

metallization, and bipolar processing to provide an accurate, high level analog

output signal that is proportional to the applied pressure.

Features

• 2.5% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller-Based Systems

• Patented Silicon Shear Stress Strain Gauge

• Available in Absolute, Differential and Gauge Configuration

• Durable Epoxy Unibody Element

• Easy-to-Use Chip Carrier Option

ORDERING INFORMATION

Device Name

Case

No.

# of Ports Pressure Type

Device

Marking

None Single Dual Gauge Differential Absolute

Unibody Package (MPX5100 Series)

MPX5100A 867

• • MPX5100A

MPX5100AP 867B

• • MPX5100AP

MPX5100D 867

• • MPX5100D

MPX5100DP 867C

• • MPX5100DP

MPX5100GP 867B

• • MPX5100GP

Small Outline Package (MPXV5100 Series)

MPXV5100GC6U

482A • • MPXV5100G

MPXV5100GC7U

482C • • MPXV5100G

MPXV5100DP

1351 • • MPXV5100DP

MPXV5100GP

1369 • • MPXV5100GP

MPX5100

0 to 100 kPa (0 to 14.5 psi)

15 to 115 kPa (2.2 to 16.7 psi)

0.2 to 4.7 V Output

MPXV5100

Series

Typical Applications

• Patient Monitoring

• Process Control

• Pump/Motor Control

• Pressure Switching

Summary of content (17 pages)

PAGE 1
Pressure Freescale Semiconductor MPX5100 Rev 13, 05/2010 Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated MPX5100 MPXV5100 Series The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs.
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Pressure UNIBODY PACKAGES MPX5100A/D CASE 867-08 MPX5100AP/GP CASE 867B-04 MPX5100DP CASE 857C-05 SMALL OUTLINE PACKAGES MPXV5100GC6U CASE 482A-01 MPXV5100GC7U CASE 482C-03 MPXV5100DP CASE 1351-01 MPXV5100GP CASE 1369-01 MPX5100 2 Sensors Freescale Semiconductor
PAGE 3
Pressure Operating Characteristics Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 5 required to meet electrical specifications.) Characteristic Symbol Min Typ Max 0 15 — — 100 115 kPa POP Pressure Range(1) Gauge, Differential: MPX5100D/MPX5100G/MPXV5100G Absolute: MPX5100A Unit Supply Voltage(2) VS 4.75 5.0 5.25 VDC Supply Current IO — 7.0 10 mAdc (0 to 85°C) VOFF 0.088 0.20 0.
PAGE 4
Pressure Maximum Ratings Table 2. Maximum Ratings(1) Rating Symbol Value Unit Maximum Pressure (P1 > P2) Pmax 400 kPa Storage Temperature Tstg -40° to +125° °C Operating Temperature TA -40° to +125° °C 1.Exposure beyond the specified limits may cause permanent damage or degradation to the device. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip in a Unibody Package.
PAGE 5
Pressure On-chip Temperature Compensation and Calibration Figure 3 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit shown in Figure 5. The output will saturate outside of the specified pressure range. Figure 4 illustrates both the Differential/Gauge and the Absolute Sensing Chip in the basic chip carrier (Case 867).
PAGE 6
Pressure Transfer Function (MPX5100D, MPX5100G, MPXV5100G Nominal Transfer Value: VOUT = VS (P x 0.009 + 0.04) ± (Pressure Error x Temp. Mult. x 0.009 x VS) VS = 5.0 V ± 0.25 V Temperature Error Multiplier MPX5100D/MPX5100G/MPXV5100G Series Break Points Temp 4.0 Multiplier - 40 0 to 85°C +125° 3.0 3 1 3 2.0 1.0 0.0 -40 -20 0 20 40 60 Temperature in °C 80 100 120 140 Note: The Temperature Multiplier is a linear response from 0° to -40°C and from 85° to 125°C.
PAGE 7
Pressure Transfer Function (MPX5100A) Nominal Transfer Value: VOUT = VS (P x 0.009 - 0.095) ± (Pressure Error x Temp. Mult. x 0.009 x VS) VS = 5.0 V ± 0.25 V Temperature Error Multiplier MPX5100A Series Break Points Temp Multiplier 4.0 - 40 0 to 85°C +125° 3.0 3 1 3 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 130 140 Temperature in °C Note: The Temperature Multiplier is a linear response from 0° to -40°C and from 85° to 125°C. Pressure Error Band MPX5100A Series Error Limits for Pressure 3.
PAGE 8
Pressure PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The MPX pressure Part Number MPX5100A, MPX5100D sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below.
PAGE 9
Pressure PACKAGE DIMENSIONS –A– D 8 PL 0.25 (0.010) 4 5 M T B A S NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT. S N –B– G 8 1 S DIM A B C D G H J K M N S V W W V C H J INCHES MIN MAX 0.415 0.425 0.415 0.425 0.500 0.520 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0 7 0.444 0.448 0.709 0.725 0.
PAGE 10
Pressure P 0.25 (0.010) M T Q –A– M U W X R PORT #1 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. L V PORT #2 VACUUM (P2) PORT #1 POSITIVE PRESSURE (P1) N –Q– PORT #2 VACUUM (P2) B PIN 1 1 2 3 4 5 K 6 C SEATING PLANE –T– –T– J S SEATING PLANE D 6 PL G F 0.13 (0.005) M A M DIM A B C D F G J K L N P Q R S U V W X INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.
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Pressure PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 867B-04 ISSUE G UNIBODY PACKAGE MPX5100 Sensors Freescale Semiconductor 11
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Pressure PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 867B-04 ISSUE G UNIBODY PACKAGE MPX5100 12 Sensors Freescale Semiconductor
PAGE 13
Pressure PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1351-01 ISSUE A SMALL OUTLINE PACKAGE MPX5100 Sensors Freescale Semiconductor 13
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Pressure PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1351-01 ISSUE A SMALL OUTLINE PACKAGE MPX5100 14 Sensors Freescale Semiconductor
PAGE 15
Pressure PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1369-01 ISSUE B SMALL OUTLINE PACKAGE MPX5100 Sensors Freescale Semiconductor 15
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Pressure PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1369-01 ISSUE B SMALL OUTLINE PACKAGE MPX5100 16 Sensors Freescale Semiconductor
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How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. Technical Information Center, EL516 2100 East Elliot Road Tempe, Arizona 85284 1-800-521-6274 or +1-480-768-2130 www.freescale.