user manual

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Measurement㩷
This chapter describes the preparations for measurement and the
measuring procedures.
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3.1 Preparations for Measurement
3.1.1Precautions for measurement
z Installation site
When selecting an installation site, take vibration, dust and humidity into due consideration.
Vibration can affect measuring accuracy. Dust and humidity can impair optical parts, such as the
objective and prism, and the XY stage and moving parts.
z Precaution for operation
If focusing, making measurements, or mounting work pieces, take surrounding conditions into
account. Be careful not to bump the objective, stage glass, etc.
z Objective and Eyepiece
The supplied objective and eyepiece were finely adjusted before shipment.
To maintain performance and accuracy, handle them with care and do not disassemble. Do not
allow the surface of the lens to be scratched or to be exposed to machine oil. If the lens is soiled,
clean it as described in “4.1 Dusting and Applying Oil”.
z Stage glass
Since workpieces are mounted on it, the stage glass is likely to be scratched or even severely
damaged. Dust the workpiece before placing it on the stage glass. Exercise care so as not to
bump the stage glass with the workpiece. Do not slide the workpiece on the stage.
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3. Measurement 17