User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Diagnostics
108 KLA - Confidential - Restricted Distribution KLA Automation User Guide
4. User must know the communication of between
•Server to Station
• Station to Server
•Server to Foup
5. The UI Page of communication will look like as shown below.
6. From the above figure, User can see the status as “Success” of the
station.
7. User must see the table with a nested grid with the below mentioned
columns from the above figure.
•Source:
An image with IP address of the source machine. It could be server,
station or Foup.
•Destination:
An image with IP address of the destination machine. It could be server,
station or Foup.
•Manual:
Test buttons, on click, between the source and destination a arrow line
will appear. If source and destination is communicating, then an arrow
will become green with communicating status otherwise as red with
Non-communicating status.