SSOHT-300 System Vehicle Operation Manual S-NEW02-0029 Revision 0 Apr. 26, 2002 The information furnished herein by SHINKO ELECTRIC CO.,LTD. is proprietary and confidential to SHINKO ELECTRIC CO.,LTD. personnel and is not to be duplicated, published, or disclosed to any third party in whole or in part without permission from SHINKO ELECTRIC CO.,LTD. Copyright© 1999 SHINKO ELECTRIC CO., LTD. ALL RIGHTS RESERVED. Unpublished rights reserved under the copyright laws of the United States.
The information contained herein is provided pursuant to the terms of a License, Nondisclosure and/or Confidentiality Agreement and constitutes and contains valuable proprietary information and trade secrets of SHINKO ELECTRIC CO., LTD. embodying substantial creative efforts and confidential information, ideas, and expressions.
Contents Contents 1. SSOHT-300 System and Vehicle Overview................ 5 1.1. Purpose of the SSOHT-300 ............................................... 5 1.2. SSOHT-300 System ........................................................... 5 1.3. Non-Contact Power Supply............................................... 8 1.4. FCC (Federal Communications Commission) Regulation (provisional) .............................................................. 8 1.5. Notice and Warning of FCC (provisional)..........
Contents 6. Teaching..................................................................... 21 6.1. 6.2. 6.3. 7. References ....................................................................... 21 Two Types of Teaching .................................................... 21 Remote Control Box ........................................................ 22 Preparation ................................................................ 23 7.1. 7.2. 7.3. Preparation of the OHT Vehicle ........................
Overview 1. SSOHT-300 System and Vehicle Overview 1.1. Purpose of the SSOHT-300 SSOHT-300 is an automatic transport system used in semiconductor fabrication plant clean rooms. 1.2. SSOHT-300 System A floor plan of the typical SSOHT-300 system is shown in Figure 1.2.1. Figure 1.2.2 shows the example of the Shinko demo system. The main system equipment is the OHT vehicle (hereinafter OHV ). It is suspended from the OHT track and runs along the track.
Overview OHT Track Maintenance Lifter OHT Vehicle OHVC FOUP Process tool Figure 1.2.2 Shinko Demo System Example Ground Power Supply Panel 6 SHINKO ELECTRIC CO., LTD S-NEW02-0029 Rev.
Overview Cable Pickup Coil Figure 1.2.3 Sectional View SHINKO ELECTRIC CO., LTD S-NEW02-0029 Rev.
Overview 1.3. Non-Contact Power Supply The non-contact power supply is an electromagnetic coupling and can be understood as a special type of transformer. It supplies power to the OHV. The track is equipped with power cables, and is constantly supplied with an alternating current from the power supply panel on the ground. Shinko uses an 8.66 kHz alternating current as a main power source.
Overview 1.5. FCC Notice and Warning (provisional) Notice Based on test results, this system was determined to conform to the class A limit for digital devices in accordance with FCC regulation Section 15. Such a limit has the purpose of sufficiently preventing harmful interference when the equipment is used in a business-operating environment. This equipment generates, uses, and may radiate high frequency energy.
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Vehicle 2. OHT Vehicle 2.1. External Appearance of the OHT Vehicle Front Sensor Operation Panel Bumper Display Panel Optical I/O Vehicle Stop Button Obstacle Sensors Figure 2.1.1. External View of the OHT Vehicle The external view of the OHT vehicle is shown in Figure 2.1.1. SHINKO ELECTRIC CO., LTD S-NEW02-0029 Rev.
Vehicle 2.2. Part Names and Function 2.2.1. Vehicle Body The vehicle is comprised of X, Y, , and Z axis. The X axis is for moving the vehicle, and the Y- mechanism is comprised of the M1 and M2 axes. Operating the M1 and M2 axes enables movements in the Y direction (horizontal movement of the vehicle body) and the direction (rotation of the vehicle body). The Z axis moves the gripper up and down.
Vehicle 2.2.6. Display Panel and Operation Panel The display panel and the operation panel are shown in Figures 2.2.6.1 and 2.2.6.2, respectively. The meaning of the display panel LED and the operation panel parts are described in Tables 2.2.6.1 and 2.2.6.2. LED5 LED6 SW1 LED7 LED2 LED11LED12 LED9 LED13 LED1 LED10 LED8 LED3 LED4 LED19 LED17 7SEG 1 LED18 LED22 7SEG 2 7SEG 3 LED24 7SEG 4 LED26 7SEG 5 LED23 LED25 CNP 108 SW 104 LED20 LED28 Figure 2.2.6.
Vehicle Figure 2.2.6.1. Meaning of the Indicator LED LED No Color Meaning LED No 1 Gree n Gree n Illumination controlled by the CPU. For monitoring control status (Ex: remote control status). 16 Red Illuminates when error occurs. 17 Green 18 Green 19 Green a 20 Green Illuminates at the front M/D roller right (facing the direction of travel) position. Illuminates at the back M/D roller right position. Illuminates at the front M/D roller left position.
Specifications 3. Specifications 3.1. General Specifications 3.1.1. Wafer Carrier Name Type Manufacturer Material Color Weight Dimensions 300mm wafer FOUP SEMI E47.1-0299(1999) compliant SEMI E47.1-0299(1999) compliant 8.7kg-f (Max. including 25 wafers) 430mm(width) × 356mm (depth) 338mm (height) SEMI E47.1-0299(1999) compliant External Shape × 3.1.2. Transport Unit One FOUP per one vehicle. 3.1.3.
Specifications 3.2. Basic Technology Specifications Item External Dimensions Weight Receiving System Power Consumption Control System Merge/Diverge Method Communication Method Main Driving Axis Table 3.2.1 Basic Specifications Specifications 440 (W) x 675 (L) x 936 (H: including the track) 97Kg (no load) Non-contact power supply system (8.6kHz) Max. 500w Transpor Ground command by the OHVC t Control Running Self-control by barcodes and the front monitor sensor.
Emergency Stop Procedures 4. Emergency Stop Procedures 4.1. EMO (Emergency Off) 4.1.1. Location of EMO The SSOHT-300 system EMO button is located on the front of the power supply panel, which is usually installed on the wall under the track in a clean room. Note: There is not an EMO button on the vehicle. 4.1.2. EMO Operation Power to the entire SSOHT-300 system will be shut off when the button is pressed. Power to the power supply panel, maintenance lifter and the OHVC will be shut off.
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Operation 5. Operation 5.1. Vehicle Operation Mode The vehicle has three operation modes. The vehicle operation modes are shown in Figure 5.1.1. The key switch on the operation panel is at the Manual position. Manual mode * Used for maintenance operations. Turn on the power The key switch on the operation panel is at the Auto position. The key switch on the operation panel is at the Local position Local mode Auto mode * Used for remote * Used for control operations.
Operation 5.3. Local mode In this mode, the vehicle is controlled by the remote control box. There are two ways to switch into this mode. (1) Turn the key switch on the control panel to "Local." (2) Send a signal from the OHVC to change to "Local." For operating the remote control box, please refer to the "Remote Box Control Instruction Manual." 20 SHINKO ELECTRIC CO., LTD S-NEW02-0029 Rev.
Teaching 6. Teaching 6.1. References 1 2 3 Teaching Instruction Manual Remote Control Box Specifications Remote Control Box Instruction Manual 6.2. Two Types of Teaching There are two types of teaching method. (1) Manual teaching (Standard) In manual teaching, the operator uses the remote control to teach the equipment. (2) Semi-automatic teaching (option) Set the LED for target at the bottom of the gripper, and set the PSD (position sensing device) at the load port.
Teaching 6.3. Remote Control Box The external appearance and part names of the remote control box is shown in Figure 6.3.1. Figure 6.3.1. External Appearance of the Remote Control Box Vehicle Stop Button Signal Output Part Reset Button Return Button Signal Output LED Battery Change LED Power ON/OFF Switch Rotary Switch for Vehicle Number Setting (lower) Rotary Switch for Vehicle Number Setting (upper) 22 SHINKO ELECTRIC CO., LTD S-NEW02-0029 Rev.
Preparation 7. Preparation Preparation for remote control operations is described below. 7.1. Preparation of the OHT Vehicle The OHT vehicle has three modes. (1) Manual mode---------Maintenance purposes only (2) Auto mode------------Automatic running mode (3) Local mode-----------Remote control operation mode Remote control operations are performed in the (3) Local mode. There are two ways to switch from the Auto mode into the Local mode.
Preparation 7.3.1. Confirmation of the DIP Switches of the Remote Control Switches Remove the back cover of the remote control box and set or confirm the DIPswitches as shown below. 1 2 O N 3 4 Figure 7.3.1.1. Back View and the DIPSwitch of the Remote Control Box 7.3.2. Registration of F Number The method for registering the F-number to the remote control receiver on the vehicle side is described below.
Remote Control Box Position 8. Remote Control Box Position This remote control box uses infrared light. For remote control operations, the light from the remote control must be facing toward the receiver of the vehicle. The receiver is located under the side cover of the vehicle (Refer to Figure 8.1). There is a remote control receiver installed on the back corner of the vehicle facing down. Turn the remote control toward that direction. Figure 8.1.Remote Control Box Position SHINKO ELECTRIC CO.
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Remote Control Operation 9. Remote Control Operation 9.1. Remote Control Operation List Table 9.1.Remote Control Function List Button 1 Mode Run Mode Button 1 2 Shift key OFF M/D roller left M/D roller right Status TAP TAP 3 4 5 Forward creep (0.05m/s) Reverse travel (-0.2m/s) Run forward at the mid speed (0.
Remote Control Operation 9.2.
Remote Control Operation 9.3. Basic Button Operation The button operations of the remote control are described below. (1) By pressing the function buttons and the operation buttons, the corresponding functions can be performed. (2) Each time the shift button is pressed, it toggles between Shift ON and Shift OFF. (3) When the shift key is on, a different function can be performed by pressing another button.
Remote Control Operation 9.4.2.3. In Transfer Teaching Button assignment in transfer teaching is shown in Table 9.4.2.3.1. Table 9.4.2.3.1.
Remote Control Operation 9.4.2.4.2. When an Error Occurs Button assignment when an error has occurred is shown in Table 9.4.2.4.2.1. Table 9.4.2.4.2.1 Button Assignment when an Error Occurred Function Buttons SHIFT- OFF SHIFT- ON 1 M/D roller left --2 M/D roller right --3 ----4 ----5 ----6 ----7 ----8 ----RESET Error Reset --- SHINKO ELECTRIC CO., LTD S-NEW02-0029 Rev.
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Installation and Removal of the Vehicle 10. Installation and Removal of the Vehicle Install and remove the vehicle onto/from the OHT track using the maintenance lifter. 10.1. Vehicle Exchange on the Track 10.1.1. Installation of the Vehicle (1) A backup vehicle is loaded onto the vehicle cart. Move this backup vehicle to the maintenance lifter. (2) Connect the lifter operation panel to the connector on the ground.
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Error Recovery Procedures 11. Error Recovery Procedures Recovery procedures when an error has occurred are described below. (1) An error has occurred. (2) Check the error condition. (3) Make sure that you keep the vehicle log with more than 2000 entries and the OHVC communication log with more than 1000 entries.………Note 1 (4) Refer to the troubleshooting section of the "Maintenance Manual" for the error condition and perform an error recovery.
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