FCC ID : OPO199909010001 CONFIDENTIAL “SELOHT SOHT-300” OHT Vehicle Operation Manual of SHINKO OHT SYSTEM Aug.31, 1999(Rev.0) Shinko Electric Co., LTD Ise Japan KEN72-3699(E)Rev.
FCC ID : OPO199909010001 Revision Note # #1 Revision Rev.0 Month/Day/Year Aug.31, 1999 Contents The first edition(Preliminary) KEN72-3699(E)Rev.
FCC ID : OPO199909010001 Table of contents Safety precautions............................................................................................................................... 5 (1) General..................................................................................................................................... 5 (2) Definitions of Danger and Warning ...................................................................................... 5 (3) Precautions on use........................
FCC ID : OPO199909010001 6.2 Two kinds of teaching ......................................................................................................... 24 7.Move in and move out of the vehicle............................................................................................ 26 7.1 construction.......................................................................................................................... 26 7.2 Replacement of the vehicle...............................................
FCC ID : OPO199909010001 Safety precautions (1) General Prior to using this product, make sure the “Safety Precautions”, Maintenance Instruction Manual and other attached documents shall be well read and understood for appropriate application. Engage specialists in electrical works. Don’t improve the product by yourselves. Be sufficiently proficient with the equipment, the relevant safety knowledge and the precautions prior to using this product.
FCC ID : OPO199909010001 (3) Precautions on use Danger Follow the following advice strictly to avoid electric shock or burns. 1. Don’t enter the operation area of the vehicle. Work on the ladder may collide to the vehicle and may cause injury. 2. Don’t touch the vehicle on the track when Power Supply Panel output the power. 3. Don’t touch the moving parts of the vehicle while it is in operation. Doing so may cause injuries. 4. Don’t touch and Teaching and maintenance shall be done by a qualified person. 5.
FCC ID : OPO199909010001 (4) Storage Prohibition 1. Don’t store the equipment at locations where it is subject to rain, water hazardous gas or liquid. Mandatory Implementation 1. Store the equipment at locations in not subjected to sun shine. Store it at predetermined relative humidity and temperature. 0 50 ,90% RH and below, no dew. (5) Transportation Warning 1. Don’t carry in a manner except for designated. materials loss or injuries. Doing so may cause Mandatory Implementation 1.
FCC ID : OPO199909010001 (7) Operations Mandatory Implementation Install an external emergency circuit so that operations can be immediately stopped and power cut off when required (8) Maintenance and lnspection Prohibition Don’t engage non-specialist technicians to disassemble and repair the equipment. Danger 1. Maintenance of the vehicle shall be done on the ground. 2. Switch off the power and wait for 3 minutes or longer before carrying out wiring work or inspection.
FCC ID : OPO199909010001 1.General 1.1 Application This document describes the operation of OHT Vehicle for “SELOHT SOHT-300”, Shinko OHT(Overhead Hoist Transport) System. 1.2 Related SEMI document Following documents are parts of the specification: (1) SEMI E10-0299 (1999) (RAM) (2) SEMI E15.1-0299 (1999) (LOAD PORT) (3) SEMI E30-0998 (1998) (GEM) (4) SEMI Draft 2998 (Future E82-0999 (1999), IBSEM) (5) SEMI E37.1-96 (1996) (HSMS-SS) (6) SEMI E47.
FCC ID : OPO199909010001 2.Outline of OHT System and Vehicle 2.1 Purpose of OHT OHT is an automated transport system, used in the clean room in a building of the semiconductor manufacturing factory . 2.2 OHT system Silicon wafers are transferred from the process tool to process tool kept in a specific carrier called FOUP (Front Opening Unified Pod) in the clean room. Top view of a typical OHT system is shown on Fig. 2.1. It is 30 meters x 10 meters size typically. Fig. 2.
FCC ID : OPO199909010001 Fig.2.2 Bird-eye view of OHT system Fig. 2.3 Cross sectional image KEN72-3699(E)Rev.
FCC ID : OPO199909010001 2.3 Non-contact power supply The principle of non-contact power supply is an electro-magnetic coupling, and it can be understood as an special style of a transformer, by which electric power is supplied to the OHV. There is a power cable on the track and alternate current is constantly supplied from the power supply panel on the ground (Normally it is 400V A.C and 5kW output). Shinko uses 8.66 kHz of the alternate current for the main power supply.
FCC ID : OPO199909010001 2.4 FCC rules Structure of Shinko OHT System & FCC Rules For OHT system, there are two FCC rules to be applied. One is part15 subpart C, Intentional radiator portion is applied. The other is Part 18, Power supply and related components are applied. See fig. 2.4 Fig.2.4 FCC rules and OHT construction KEN72-3699(E)Rev.
FCC ID : OPO199909010001 2.5 FCC Notice and Warning KEN72-3699(E)Rev.
FCC ID : OPO199909010001 3.OHT Vehicle 3.1 External View of the OHT Vehicle Fig.3.1 shows the outline of the OHT Vehicle Fig. 3.1 Outline of OHT Vehicle KEN72-3699(E)Rev.
FCC ID : OPO199909010001 3.2 Name of the parts and function 3.2.1 Vehicle Body The vehicle consist of X, Y, theta and Z axis. X axis is a traveling of the Vehicle, Y axis is a lateral shift of the (B) part, theta axis is a rotation of the (B) part, and Z axis is a up/down motion of the gripper. Traveling is driven by the linear DC motor. Y, theta axis are driven by brush-less DC motor, Hoisting axis is driven by AC servo motor. And gripper is driven by brus-hless DC motor.
FCC ID : OPO199909010001 3.2.6 Control panel Fig. 3.2 Is a outline of the control panel. The meaning of LED indicator and Switches are as follows. Fig. 3.
FCC ID : OPO199909010001 (2) 7 segment LED It indicate the status of the vehicle (3) Switches R: Mode switch(Key switch) Manu : Set while Maintenance Auto : mode controlled by OHVC change to local mode by OHVC and controlled by Remote Control Box Local : Remote Control Box S: CPU reset : Reset of CPU board. T: Err Reset : Reset of Latch circuit of the error. U: E84 on/off : On/off a SEMI photo I/O communication. V: MD on/off : On/off a Melody sound of the vehicle. KEN72-3699(E)Rev.
FCC ID : OPO199909010001 3.3 safety consideration 3.3.1 EMO ( Emergency Power OFF) on Power Supply Panel EMO switch is installed on the front surface of Power Supply Panel. By pressing this button, power supply to all the vehicle in that system (generally in the bay) will be suddenly stopped and all the vehicles will be suddenly stopped (stopped within three seconds at worst). Same function EMO switches can be added to the system optionally.
FCC ID : OPO199909010001 3.3.6 Bumper Switch Bumper switch is a contact tape switch attached around the vehicle body. If it touch the obstacle, the power source of the traveling motor is cut. For safety, two bumper switches are equipped in parallel. 3.3.7 Look down sensor Each vehicle can be optionally added a look down sensor, which detects the obstacles between the vehicle and the load port. (It is under development, not yet completed.) 3.3.
FCC ID : OPO199909010001 4.Specification 4.1General Specification 4.1.1. Transport carrier (1) Name : 300mm wafer FOUP (2) Type : (3) Manufacturer : (4) Material : Compliant with SEMI E47.1-0299 (1999) (5) Color : Compliant with SEMI E47.1-0299 (1999) (6) Weight : 8.7 kgf (Max., including 25 wafers) (7) Dimension : 430mm (W) x 356 mm (L) x 338 mm (H) (8) Outline shape : Compliant with SEMI E47.1-0299 (1999) 4.1.2 Transport unit (1) 1 FOUP / 1 vehicle 4.1.
FCC ID : OPO199909010001 4.2 Basic technical specification ITEM Track structure Driven method Max.
FCC ID : OPO199909010001 5Auto Mode and Manual 5.1 Operation mode of the Vehicle Operation mode of the Vehicle is shown in Fig. 5.1 Fig. 5.1 Operation mode of the Vehicle 5.2 Auto mode (assumption : Vehicle has already moved in the OHT main track) (1) Change the key switch of the control panel to “Auto” (2) Send a entry command from OHVC --- The vehicle start to run in order to search position ID(Bar Code Label) If the vehicle searched BCL, the vehicle stop at that position.
FCC ID : OPO199909010001 6Teaching 6.1 Reference (1) Teaching manual (KEN72 - 3644(E) (2) Remote control box specification (KEN72-3501(E)) (3) Remote control box operation manual (KEN72-3502(E)) 6.2 Two kinds of teaching There are two ways of teaching methods (1) Manual teaching In this, teaching is carried out by moving the vehicle. Vehicle is operated by teaching operator with remote control box. The image of Manual teaching is shown in Fig. 6.
FCC ID : OPO199909010001 Fig. 6.1 Image of Manual teaching Fig. 6.2 Image of Semi-auto teaching KEN72-3699(E)Rev.
FCC ID : OPO199909010001 7.Move in and move out of the vehicle Move in and move out of the vehicle to the OHT Track is done by using Maintenance Lifter and Shifter. 7.1 construction Construction of the Maintenance Shifter & Lifter is shown in Fig. 7.1 7.2 Replacement of the vehicle Move in of the vehicle (1) The back up vehicle is loaded in the work bench. Move the back up vehicle to the maintenance lifter and shifter. (2) Connect a connector of the operation panel to the ground side connector.
FCC ID : OPO199909010001 (6) Shift the vehicle to the lifter from the shifter by human power. (7) Do a longitudinal shift, then do a lateral shift, and return to the main track. (8) Turn on the Power Supply Panel. (9) (Start the host controlled operation). (10) Down the lift and tie up to the track of the working bench with a cramp. (11) Shift the vehicle to the working bench from the lifter by human power. (12) Remove a cramp and up the lifter. (14) Disconnect the connector of the operation panel.
FCC ID : OPO199909010001 Fig. 7.1 Construction of Maintenance Shifter & Lifter KEN72-3699(E)Rev.
FCC ID : OPO199909010001 8. Removal of FOUP from OHV and manual lifting of gripper unit 8.1.Two cases in manual removal of FOUP There are two cases in manual removal of FOUP. They are case1 and case 2 below. (case1) Power Supply Panel is on and remote control box can control OHV gripper. (case2) Power Supply Panel is off and OHV is not supplied the power. 8.2. Two kinds of removal procedures There are two kinds of removal procedures according to the position of gripper unit. 8.2.
FCC ID : OPO199909010001 (Case 1) Down the gripper, open the gripper and lift the gripper unit ---By the remote control box.
FCC ID : OPO199909010001 Fig. 8.1 Manual removal of FOUP from OHV and manual lifting of gripper unit (Position A) KEN72-3699(E)Rev.
FCC ID : OPO199909010001 Fig.8.2 Manual removal of FOUP from OHV and manual lifting of gripper unit (Position B) KEN72-3699(E)Rev.
FCC ID : OPO199909010001 9.MAINTENANCE PLAN 9.1 General This chapter describes the maintenance plan of Shinko OHT system. 9.2 Maintenance plan It consists of following four category; (1) Daily check (during the normal operation) (2) Semi-annual maintenance (3) Every one year maintenance (4) Every two years maintenance 9.2.1 Daily check It is not a maintenance but a daily check during the normal operation. By the experience of daily operation, abnormal noise or vibration can be detected.
FCC ID : OPO199909010001 9.2.2 Semi-annual maintenance (1) Vehicle A vehicle shall be removed from the rail and open the outside cover and check and do the following items; (1-a) Check the looseness of the bolts and screws. If it is loosen re-tighten them. Important points are running mechanism, Y-theta axis movement parts, support of the hoisting mechanism. (1-b) Check the connector of all the cables. If it is loosen, re-tighten it.
FCC ID : OPO199909010001 9.2.3 Every one year maintenance (1) Vehicle A vehicle shall be removed from the rail and open the cover and check and do the following items; (1-a) Same items with 9.2.2 (1) semi-annual maintenance. (1-b) Grease-up the gear portion (Y-theta axis, Z-axis, Protection arm). (1-c) Check the surface of Lens and wipe if it becomes dirty. Check the iris and focus is correct (same with predetermined value). (1-d) Do the test operation of each pendant switch.
FCC ID : OPO199909010001 9.2.4 Every two year maintenance (1) Vehicle A vehicle shall be removed from the rail and open the outside cover and check and do the following items; (1-a) Same items with 9.2.2 (1) semi-annual maintenance. (1-b) Replace the memory back-up battery. (1-c) Replace the hoisting belts (all four belts). (1-d) Replace the FFU (Fan Filter Unit). As for the replacement of memory back-up battery and FFU unit, it will not be necessary for replacing all of them.
FCC ID : OPO199909010001 Fig. 9.
