TES-63 Source User manual – version 06/2021 User Manual TES-63 versions up to 15 kV with reverse polarity Polygon Physics SAS au capital social de 72 000 euros - 19, rue de Sassenage - 38600 Fontaine SIREN 799 584 453 RCS Grenoble - TVA intracommunautaire FR 19 799584453 - APE 2899B Page 1/46
TES-63 Source User manual – version 06/2021 Page 2/46 1 Symbols definitions ......................................................................................................................... 4 2 General safety instructions ............................................................................................................. 5 3 Hardware description ......................................................................................................................
TES-63 Source User manual – version 06/2021 7 8 9 Page 3/46 6.1 Starting and stopping ............................................................................................................ 20 6.2 Setting the parameters.......................................................................................................... 22 6.3 Data recording ....................................................................................................................... 25 6.
TES-63 Source User manual – version 06/2021 Page 4/46 1 Symbols definition Human safety warnings are indicated by the following statements: DANGER WARNING CAUTION Danger Indicates an imminent hazardous situation, which, if not avoided, could result in death or serious injury. Warning Indicates a potentially hazardous situation, which, if not avoided, could result in death or serious injury.
TES-63 Source User manual – version 06/2021 Page 5/46 2 General safety instructions WARNING 2.1 Follow the safety and operating instructions to avoid the risk of personal injury and hardware damage.
TES-63 Source User manual – version 06/2021 Do not disconnect any cables or hoses while the system is operating. If liquid is spilled on the control rack, push the nearest EMO button.
TES-63 Source User manual – version 06/2021 2.3 Page 7/46 List of hazards hazard consequences Stored high voltage energy is below 45µC and 0.3J is under IEC 61010 threshold and can only cause very minor muscle contraction and no skin burn.
TES-63 Source User manual – version 06/2021 Neutral gas Neutral gas can replace oxygen and cause operator dizziness in case of gas line leak 2.
TES-63 Source User manual – version 06/2021 Page 9/46 3 Hardware description 3.1 General specifications Source inner size Source outer size Source flange Source weight Rack size Rack weight Rack power rating Cable bundle length UHF power High voltage power Electrode plasma Electrode focus Electrode GND In vacuum materials Operating pressure Flow rate Suppressor (option) 3.
TES-63 Source User manual – version 06/2021 c) Page 10/46 Gas valve The Pfeiffer EVR 116 gas valve regulates the amount of gas entering the source. d) SMA extension cable (2) 2.45GHz SMA cable Male/Male to transfer the UHF power from the rack to the source flange. e) Power cord (3) CE22 standard power cord to connect the rack to the grid. f) Gas valve cable (4) D-Sub 15 Male / DIN 5 cable to connect the gas valve with the control rack.
TES-63 Source User manual – version 06/2021 3.4 Page 11/46 Identification of the connectors on the control rack backpanel a) Power Input IEC C14 inlet, 220V 50/60 Hz. This is the power inlet for the control rack, to plug the provided 220V power cord. b) Ground M4 threaded rod. This is the common ground of the control rack. It needs to be connected to earth with a ground strap (not included). c) Mass Flow Female D-Sub 15 connector to power and control the mass flow.
TES-63 Source User manual – version 06/2021 6 7 8 9 Page 12/46 Relay, signal to switch Relay, normally open state Ground +24V, 1A max Connect the reading of a pressure gauge controller (not included) to pin 3. e) Data Enter 2 Female D-Sub 9 connector for the reading/control of user equipment.
TES-63 Source User manual – version 06/2021 Page 13/46 source. Use the supplied SMA extension cable (2). CAUTION Never operate the rack without the SMA extension cable connected between the rack and the source flange (it could damage the UHF power generator). i) High Voltage cable exit for the source Rack output for the "HV Beam" cable, to connect to the corresponding HV feedthrough on the source flange. WARNING NEVER DISCONNECT THE HIGH VOLTAGE CABLES WHEN THE CONTROL RACK IS OPERATING.
TES-63 Source User manual – version 06/2021 a) Page 14/46 Source gas feedthrough DN16 iso KF for mounting the gas valve. b) Connector for the gas valve Female D-Sub 15 connector to connect to control rack, to control the gas valve controller. Use the provided D-Sub 15 male / DIN5 cable. c) UHF power feedthrough SMA feedthrough suitable for 2.45 GHz, to transfer the UHF power from the control rack to the source flange. Use the provided SMA extension cable.
TES-63 Source User manual – version 06/2021 Page 15/46 4 Hardware installation WARNING CAUTION The source and its control rack can exhibit hazardous voltage levels. They should be operated by properly trained staff only. Operators must follow the instructions in this manual.. Never use the source or the control rack in a manner different from that described in this manual. 4.
TES-63 Source User manual – version 06/2021 b) Page 16/46 Mounting and connecting the gas valve The gas valve comes with two DN16 iso KF flanges: one for the gas supply line, one for the gas input on source flange. Make sure the gas valve is mounted on the source flange in the correct orientation (bottom flange of the valve connected to the source flange). Connect the gas valve cable on the back panel of the control rack with the provided D-Sub 15/ DIN 5 cable and fasten it.
TES-63 Source User manual – version 06/2021 Page 17/46 ensured by the provided SMA extension cable. First, install the 90° SMA connector on the UHF power CF16 source flange. Then, connect one side of the cable to the SMA 90° connector on the source flange and the other side on the SMA connector labelled "Microwave Power" on the back panel of the control rack. Recommended torque: 1 Nm.
TES-63 Source User manual – version 06/2021 4.4 Page 18/46 Getting hardware ready for the first beam The control software must be installed before in order to be able to operate the ion source. Please refer to the software installation section. CAUTION Never operate the source (do not put it under High Voltage nor send any UHF power to it) when the source is at atmospheric pressure. a) Evacuate Pump down the system.
TES-63 Source User manual – version 06/2021 Page 19/46 5 Software installation of the IE Gun application (drivers and LabVIEW Run-Time engine) Use a computer running Windows 7 or higher, with a minimum screen resolution of 1366 * 768 for the application program to function properly. 1. Check if the default windows decimal separator is set with a dot (.) and not a comma (,).
TES-63 Source User manual – version 06/2021 Page 20/46 6 User guide of the IE gun application 6.1 Starting and stopping a) Launching the program IE Gun Make sure the drivers have been installed before launching the program for the first time. Make sure the serial connection between the control rack and the computer is established before lauching the program. 1. 2. 3. 4. Find the executable program "IE Gun.exe" in the "IE Gun" folder on the computer desktop. Turn on the rack.
TES-63 Source User manual – version 06/2021 Page 21/46 2. Click on "Stop All". The Labview program stops and the rack is switched off. 3. Switch off the power button the rack. CAUTION Never leave the program running when the rack is off in order to avoid any hardware damage. Now the computer can be turned off without any risk of hardware damage. c) Disabling of the equipment components The "Emergency stop" button is the way to stop all IE-GUN components in one click.
TES-63 Source User manual – version 06/2021 Page 22/46 If the light is green (ON), the element is enabled, otherwise it is grey (OFF). These parameters are visible in the upper right part of the user interface. When the high voltage is switched off, the polarity of each high voltage power supply can be changed with “Pol beam” and “Pol foc” buttons. 6.
TES-63 Source User manual – version 06/2021 b) Page 23/46 Parameters related to the UHF power: The program controls the UHF power that is sent to the source, between 0 and about 18W (the maximum value can change, depending on the calibration mode, the cable and the generator itself. The value in Watt is the power at the entrance of the flange). The top box (white) is where the requested power is entered. The lower box (grey) gives the power value that is being read.
TES-63 Source User manual – version 06/2021 Page 24/46 The fourth box (grey) is a reading of the current supplied by the high voltage power supply. This value is displayed in orange because it is an important parameter for the characterization of the beam. You can change the polarity of the HV supply with the button “Pol. Beam”, but only when the HV button is off. d) Focus parameters: The beam focusing can be adapted by changing the high voltage applied to the focus electrode.
TES-63 Source User manual – version 06/2021 Page 25/46 You can enter a resistance value on the “R FC” box to make the conversion on intensity (only for input 1). f) Parameters of the graph: The graph enables monitoring of the key parameters of the IE-GUN in real time. The horizontal axis of the graph gives the time in seconds. The total time displayed in the graph can be changed by changing the number of points ("# of points") at the bottom. The plot legend is shown left of the graph.
TES-63 Source User manual – version 06/2021 Page 26/46 default network parameters: IP = 192.168.0.102 and subnet mask = 255.255.255.0 1. If the rack is off, switch on the rack and wait for 1 minute until the microcontroller is initialized. 2. If necessary, set the IP address and subnet mask of the microcontroller with the command set network / where is an IP v4 address and is the subnet mask. For example, if I want to set the IP address to 192.168.0.
TES-63 Source User manual – version 06/2021 Page 27/46 Usually, this value is between 3 and 5W depending on the configuration. c) - Cycle between HV and pulse HF to ignite plasma Press the button Pulse UHF, then release the button. This will set the UHF power to its maximum to ignite the plasma. Then activate the HV button and set the HV beam to 2kV. Be careful to any arc than can happen, it is normal, but if there is too many, lower the HV setting until we lower the gas valve setpoint.
TES-63 Source User manual – version 06/2021 b) Page 28/46 Stabilization dialogue box Type in the desired target current level, and the maximum deviation between the actual value and the desired value in %. Please note that the operating pressure and applied high voltage levels should be chosen such that it is possible to attain the desired current level by the regulation of the UHF power within its applicable range.
TES-63 Source User manual – version 06/2021 Beam current for 0.35mm extraction Beam voltage Focus voltage 6.7 5 µAmp at 8kV beam voltage, 6kV focus voltage and 5W power 8 kV 6 kV Login and access management levels, Page 29/46 4 - 6 µAmp 0 - 15kV 0 - 15kV focus voltage must always be lower than beam voltage by at least 1kV (5kV maximum difference) advanced setup access There is no login and no password for the Labview IE gun application program.
TES-63 Source User manual – version 06/2021 Page 30/46 If the error persists and the readings of HV, HF power… are not updated anymore, stop the program and then relaunch it. c Even if the communication is interrupted, the source may still run with the parameters previously defined. For all other error messages such as “E00x” please refer to the section remote operation serial communication. For other hardware related issues, please refer to the troubleshooting section.
TES-63 Source User manual – version 06/2021 Page 31/46 7 Serial communication remote control This section lists the available elementary functions that can be integrated into the customer’s software for driving the ion source. RS232 protocol 1. 2. 3. 4. 5. 7.1 Baud rate: 115200 Parity check: no parity Stop bit: 1 stop bit Format: 8 bits End of line character: Starting up Switch on the electronics rack. Wait about 30 seconds for microcontroller initialization.
TES-63 Source User manual – version 06/2021 7.2 Page 32/46 Commands library There are 5 main commands to control the electronics unit. Action 1. Modify a setpoint 2. Modify a setpoint by doing a ramp 3. Get a setpoint 4. Measure a value 5. Switch off the microcontroller Command Rack answer No error: Error: E is an integer related to an error type described in the section Error list.
TES-63 Source User manual – version 06/2021 7.3 Page 33/46 Changing a device state with < devicename_state> Important i: is an integer and can take only two values: 0 or 1 Important ii: there is a delay of few seconds before the microcontroller returns the ACK character when the commands < beampolar_state> or < beampolar_state> are used because the voltages are first set to 0 using a ramp.
TES-63 Source User manual – version 06/2021 7.4 Page 34/46 Changing a setpoint with Command set hf Description Set the HF power in Watt. set beam Set the beam high voltage in kiloVolt. set imaxbeam Set the maximum current delivered by the HV beam power supply in microAmpere. Set the focus high voltage in kiloVolt.
TES-63 Source Page 35/46 User manual – version 06/2021 7.5 Changing a setpoint using a ramp with Important i: is a float. Commande ramp hf description Modify the HF power using a ramp up to by step of 0.1W. ramp beam Modify the beam high voltage using a ramp up to by step of 0.1 kV. ramp focus Modify the focus high voltage using a ramp up to by step of 0.1 kV.
TES-63 Source User manual – version 06/2021 Page 36/46 Can be used to decrease voltages. 7.6 Getting state and setpoints with Command get id get version get rack_state Desciption Returns rack name. Returns the software version. Returns the rack state. get hf_state Returns the HF generator state. get beam_state Returns beam high voltage state. get focus_state Returns focus high voltage state. get beampolar_state Returns beam high voltage polarity state.
TES-63 Source User manual – version 06/2021 Page 37/46 setpoints. Description of the list returned by This command returns a list whose elements are: 1. rack_state 2. hf_state 3. beam_state 4. focus_state 5. beampolar_state 6. focuspolar_state 7. de_state 8. state7 (Not connected) 9. state8 (Not connected) 10. HF 11. beam 12. focus 13. imaxbeam 14. imaxfocus 15. gasflow 16. ao1 (data enter 2, pin 1) 17. ao2 (data enter 2, pin 2) 7.
TES-63 Source User manual – version 06/2021 meas hf meas beam meas ibeam meas focus meas ifocus meas interlock meas source Returns the measurement of the high frequency power delivered by the HF generator in W. Returns the measurement of the beam voltage kV. Returns the measurement of the current delivered by the beam power supply in µA. Returns the measurement of the focus voltage kV. Returns the measurement of the current delivered by the focus power supply in µA.
TES-63 Source User manual – version 06/2021 10. 11. 12. 13. 14. 15. 16. 17. 18. 19. 20. 21. 22. 23. 24. Page 39/46 beam ibeam focus ifocus pressure ai1 (data enter, pin 4, can be used to read a Faraday cup current) ai2 (data enter 2, pin 4) ai3 (data enter 2, pin 5) ai4 (data enter 2, pin 6) ai5 (data enter 2, pin 7) ai6 (data enter 2, pin 8) ai7 (data enter 2, pin 9) ai8 (data enter 2, pin 10) ai9 (data enter 2, pin 11) interlock (if the measured value is equal or greater than 4.
TES-63 Source User manual – version 06/2021 7.8 Code E001 E002 Errors list Description Rack state is 0. To activate the rack, use set rack_state 1 Rack state is already 1. E003 Impossible to initialize measurement cards. E004 Impossible to initialize control cards. E005 Impossible to initialize relay cards. E006 Impossible to disconnect measurement/control/relay cards. Setpoints or state not recognized. E007 Page 40/46 And/or measurement/control/relay cards not working.
TES-63 Source User manual – version 06/2021 E010 E011 Command does not exist. Impossible to access to shared folder. Short circuit detected for beam and/or focus power supplies. All setpoints and states are set 0. High voltage security mode is activated, setpoints and state commands are ignored. Error code E012 is returned. E012 7.9 CAUTION Page 41/46 microcontroller inside the rack. Switch off and on the rack. Check the syntax. Switch off and on the rack.
TES-63 Source User manual – version 06/2021 Page 42/46 8 Support 8.1 Contact for RMA process Please fill the following RMA number request template before shipment of defective parts to factory, either for parts under guaranty or another repair order after the guaranty period. Please ship free of charge by DHL – account # 963897121 FROM (Company Name sending goods): TO POLYGON PHYSICS SAS 19 rue de Sassenage 38600 Fontaine France Attn : Intracom VAT FR19799584453 It.
TES-63 Source User manual – version 06/2021 8.
TES-63 Source User manual – version 06/2021 Voltage reading stays to 0kV when changing the high voltage setpoint The Labview software freezes 8.3 • HV button is not ON • • Make sure to click on the high voltage ON button Make sure to click outside the setpoint adjustment box Press enter after changing the setpoint Make sure the rack is powered • Restart the program • Rack is not powered, RS232 connection lost Page 44/46 Maintenance plan There are no wearing parts.
TES-63 Source User manual – version 06/2021 Page 45/46 9 Information to user about radio technology in the TES 63 driver (FCC statements) CAUTION The user that changes or modifications not expressly approved by the party responsible for compliance could void the user's authority to operate the equipment. Number of radio modules inside Frequency band Radiated power and frequencies Number of antenna Country restrictions 1 MHz 2357.000 6911.125 1881.300 2304.250 2334.312 2392.625 4602.469 4819.812 7229.
TES-63 Source User manual – version 06/2021 Page 46/46 10 Declaration of conformity Manufacturer: Polygon Physic 19, rue de Sassenage F 38600 Fontaine Product: TES 63 15kV Specifications: Ion source TES-63-15-B unit Control unit with 15kV bipolar power supplies This product complies with the emissions and immunity requirements of IEC 61326 related to electromagnetic compatibility in an industrial electromagnetic environment.
