KLA - Automation User Guide 9022549‐000 AH
KLA - Automation User Guide Page Intentionally Blank KLA - Confidential - Restricted Distribution 9022549-000 / AH
KLA Automation User Guide is preliminary document is not complete. This document contains significant omissions and inaccuracies. GSS Technical Publications distributes this preliminary draft for review purposes only. Customers and KLA- Customer Service Engineers should not use this document while installing, servicing, or using the KT Automation System. Any input regarding the accuracy of the content of this document is welcome and appreciated.i KLA - Corporation One Technology Drive, Milpitas, CA.
Copyright Copyright © 2016-2017 by KLA. All rights reserved worldwide. No part of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA, One Technology Drive, Milpitas, California 95035. KLA may revise this document at any time without notice.
Table of Contents Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Manual Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Manual Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Reference Documentation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Conventions Used in this Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.2.5 3.2.6 3.3 FA UI (Factory Automation User Interface). . . . . . . . . . . . . . . . 37 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 Software Upgrade for FOUP and Wafer . . . . . . . . . . . . . . . . . . . . . . . . 46 3.3.1 3.3.2 To Upgrade FOUP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48 To Upgrade Wafer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49 4 KLA Automation Web UI . . . . . . . . . . . . . . . . .
Preface Preface Manual Purpose This User Guide describes: • Hardware components of the KLA Automation™ System for KLA instrumented test wafers • Setting up the system for automatic missions • Managing inventory • Controlling the KLA Automation System • Launching user missions using SensArray® Temperature Wafers and Automation Metrology™ Wafers Manual Structure This manual consists of this preface, 4 sections, and a glossary.
Preface Reference Documentation The following table specifies documents referenced in this manual. Document Number Title 9022547-000 CPG KLA Automation System Safety Manual 9022552-000 KLA Automation System GEM/SECS Reference Manual Conventions Used in this Guide WARNING Indicates danger to personnel. Includes instructions needed to prevent any damage. CAUTION Indicates danger to Equipment. Includes instructions needed to prevent any damage.
1. Introduction KLA Automation System Overview 1. Introduction 1.1 KLA Automation System Overview The KLA Automation System provided by KLA automates the use of instrumented wafers in a semiconductor wafer fab. The KLA Automation System is used with SensArray temperature wafers and Automation Metrology motion analysis wafers to enable real-time measurement and monitoring of parameters that are critical to fab yield and productivity.
1. Introduction 1.2 KLA Automation System Operation KLA Automation System Operation The KLA Automation System provided by KLA is used to deploy and manage instrumented wafers in a semiconductor wafer fab to enable real-time measurement and monitoring of parameters that are critical to fab yield and productivity. Operation is completely automated (see Figure 1-1).
1. Introduction KLA Automation Missions arrives at the Automation Station, the host executes another CJ/PJ to process the data (6). The mission results are uploaded to the KLA Automation Controller and the Go/No Go results are reported to the host from the Station, per the metrology recipe in effect (7). Figure 1-2: 1.3 KLA Automation System Mission Sequence KLA Automation Missions There are 3 ways to launch and control KLA Automation missions: 1.
1. Introduction 1.4 1.4.1 Regulatory Compliance Statements Regulatory Compliance Statements Prohibitions on Modifications Changes or modifications not expressly approved by KLA could void the user's authority to operate the equipment. 1.4.2 Class A Digital Device Note: This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to part 15 of the FCC Rules.
1. Introduction 1.4.6 Regulatory Compliance Statements Input Power for Battery Charging 1. For 12V DC: The device is powered through listed AC/DC power adapter with Limited Power Source (LPS) at minimum rate of 3.75A. 2. For 24V DC: The device is powered through listed AC/DC power adapter with Limited Power Source (LPS) at minimum rate of 4A. NOTE The power option through the Control Electronics Box (CEB) of the Automation System within the AM station.
1. Introduction 1.4.7 Regulatory Compliance Statements Environmental conditions for the equipment Table 1-4: Environmental conditions Wafer Temperature Pressure AF120 0 - 85 °C - AM Wafer 0 - 85 °C (unlimited), < 120 °C 1E-9 Torr - 760 Torr (Air, CDA, N2 or Ar) (for one minute) Note: Clean the wafer only with dampened lint free cloth with deionized H2O (IPA ratio 10:1) 1.4.
2. KLA Automation System Hardware Components KLA Automation Station 2. KLA Automation System Hardware Components 2.1 2.1.1 KLA Automation Station KLA Automation Station Function The KLA Automation Station communicates with the KLA Automation FOUP to start missions and to extract the results after the missions are completed. The KLA Automation Station also recharges the KLA Automation FOUP between missions.
2. KLA Automation System Hardware Components 2.1.2 KLA Automation Station KLA Automation Station Indicator Panel LEDs The indicator panel at the front of the top cover (see Figure 2-2) contains all the Automation Station LEDs, as well as the Manual/Auto control button.
2. KLA Automation System Hardware Components 2.1.3 KLA Automation FOUP KLA Automation Station Indicator Panel Manual/Auto Button The Manual/Auto control button is located between the MANUAL and the AUTO LEDs on the KLA Automation Station Indicator Panel (see Figure 2-2). The button has two functions: 1.
2. KLA Automation System Hardware Components 2.2.2 KLA Automation FOUP KLA Automation FOUP Indicators and Controls All FOUP indicators and controls are on the rear of the KLA Automation FOUP (see Figure 2-4).
2. KLA Automation System Hardware Components 2.2.3 2.2.4 KLA Automation FOUP KLA Automation FOUP Data Storage and Transfer • When the Wafer is back in the Automation FOUP, it automatically transmits the data it collected during the mission to the Automation FOUP. • When the Automation FOUP is placed on the Automation Station, the Automation FOUP automatically transmits the data to the Automation Controller to be stored in the centralized database.
2. KLA Automation System Hardware Components 2.2.5 KLA Automation FOUP Option: Emulating Occupied KLA Automation FOUP Slots An available KLA Automation FOUP option is a set of emulation fins for slots that contain any electronics boxes. The fins cause load port wafer mappers to identify those slots as occupied. Figure 2-5: KLA Automation System Topology 2.2.6 Reset the KLA Automation FOUP (software restart) IMPORTANT Reset the KLA Automation FOUP only when it is in an error state. 1.
2. KLA Automation System Hardware Components KLA Automation FOUP 2. Open a browser window in Chrome or Firefox. 3. Go to URL: http://192.168.10.100:5000 (the FOUP’s static IP address) 4. Log in to the FOUP using the following ID and Password: • User ID = admin • Password = admin 5. In the FOUP Configuration page, click Advanced. Figure 2-7: FOUP Configuration Page 6. In the Advanced page, click Restart system. Figure 2-8: FOUP Restart 7. Wait until the system restarts.
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3. KLA AM Station Application UI Access to UI 3. KLA AM Station Application UI 3.1 Access to UI 1. This User Interface is developed by WPF forms using MVVM architecture pattern. 2. User must go to the required build path and copy the required installer to the station/system. 3. User shall double click on the installer as shown in the below figure. 4. After the successful installation, User can start the application through window key or click on the icon which is created over the desKLAop.
3. KLA AM Station Application UI Access to UI 5. The display of the KLA AM Station Application will be as shown below after the double click on the Icon. 6. From the above figure User shall observe the below mentioned Navigation Tabs displayed in the application.
3. KLA AM Station Application UI 3.2 3.2.1 Features in the Application Features in the Application Home Page 1. Use must click on the tab “Home Page” to see the over view of the home page tab. 2. The display of Home Page will be shown as mentioned below. 3. The Home Page is a default page that should open whenever User try to access the KLA AM Station application. 4.
3. KLA AM Station Application UI Features in the Application 5. The Automation Station ID section contains the below mentioned data. • 22 Software Version • As shown in the below Figure, User must click on "Version" to know the Software Version details, Then a pop up window is displayed with station version and its dependent component version. • After clicking on the "Version", User will observe the below mentioned pop up related to information about "Server", "Station", "Foup" and "Wafer".
3. KLA AM Station Application UI 9022549-000/AH Features in the Application • Server status also is displayed in the Home Page which tells about the Station whether in communication with the server or in any error condition. • Station access mode information also be displayed in the Home Page. • User shall get the details of Carrier ID in the Home Page. • Status of Foup Clamping (Clamped or Unclamped) shall be displayed in the Home Page.
3. KLA AM Station Application UI 24 Features in the Application • Details of Foup sensor shall be displayed as shown below. • Station Transfer state shall be displayed as shown below. • User can identify the the label "Mission State" to know the Mission State status. • Right side label shall be texted with one of the following state “CJ1” or “CJ2” or “IDLE”. • Also User shall see the button “Mission Parameters” to know the details of the Mission Parameters.
3. KLA AM Station Application UI 9022549-000/AH Features in the Application • If the mission is in "CJ1" or "CJ2", then user shall able to see current mission parameter. • If the mission is in "IDLE", then user shall able to see current mission parameter.
3. KLA AM Station Application UI • Features in the Application Carrier ID (CID) • This section displays information about CID number and the wafer slots information. • Also User shall know the wafer details in which slot the wafer existing and other related information. • Also this section displays the information about FOUP state. NOTE FOUP State displays the information about whether the FOUP is charging or not. Also Displays the percentage of total charge of the FOUP.
3. KLA AM Station Application UI 3.2.2 Features in the Application Test 1. The display of “Test” shall be shown as mentioned below. 2.
3. KLA AM Station Application UI Features in the Application 3. User shall get details of the AM Station ID in the "AM Station ID" row. 4. User shall test the Carrier ID read option in CID Read by clicking on "Read". 5. User shall also edit details of Carrier ID in "CID Write" by clicking on "Write".
3. KLA AM Station Application UI Features in the Application 6. User shall get the clamiping information as shown in the below figure, Also User shall able to change clamping status by clicking on "Change". 7. Also User shall know the details of "FOUP SENSOR", "Magnetic Connector", Station transfer state and "Mission State". 8. Refer to page 3-26 for CID display information.
3. KLA AM Station Application UI 3.2.3 Features in the Application Configuration 1. Configuration window used to configure the station and its components. The display of Configuration window shall be seen as shown below. 2. In this User controls shall be used to display in UI as third party UI components shall be populated in AM Station application UI. 3.
3. KLA AM Station Application UI Features in the Application 4. Settings 9022549-000/AH • User must click on "Settings" and the display of "Settings" shall be seen as shown below • Tho above figure shows the signal tower setting details. • User shall modify the settings and save the changes. • Also User can able to Import/Export the settings.
3. KLA AM Station Application UI Features in the Application 5. CID • User must click on "CID" and the display shall be seen as shown below. • Carrier ID (CID) tab is used to enter the details of Mask Name, For this User must select the "Use Mask" option. • Also User shall set the details of offset / mask length • Click on "Carrier Read" to read the carrier ID details. • Click on "Carrier Write" to update the Carrier ID details.
3. KLA AM Station Application UI • Features in the Application Light Curtain/Safety barrier configuration • User has to click on "Light Curtain/Safety barrier configuration" to get the below mentioned display.. • A check box shall be displayed (Refer to above figure) which shall allow the User to enable or disable the Light Curtain Option. • 9022549-000/AH E84 Configuration • User must click on “E84 Configuration” to get the below mentioned display.
3. KLA AM Station Application UI Features in the Application 7. Server IP Configuration 34 • User must click on "Server IP Configuration" to get below mentioned display. • User shall know the details of Server Info, Station Info details which are populated in the right side (Refer to above figure). • Server IP: This can be edited as per the requirement. Validate the IP in correct format while clicking apply button.
3. KLA AM Station Application UI Features in the Application 8. Router Configuration • 9022549-000/AH Click on "Router Configuration", Then User shall have the following display as shown below.
3. KLA AM Station Application UI 3.2.4 Features in the Application Diagnostics 1. User has to click on "Diagnostics" icon and the display will be seen as shown below. 2. User shall able to see the three columns from the above figure which are • Test: This column shall give the details of different kinds of tests • Action: This column shall give the details of Action. Here User need to click on respective button to start the action.
3. KLA AM Station Application UI Features in the Application 5. User shall clear the deatils action by clicking "Clear" (Refer to below Figure). 3.2.5 FA UI (Factory Automation User Interface) 1. User must click on "FA UI" and the display will be seen as shown below. 2. Here User can see the the current running jobs which are “E87”, “E40/90”, “E30” and “KTGem Monitor”.
3. KLA AM Station Application UI Features in the Application 3. Click on "E87" and the display will be seen as shown below. 4. Click on "E40/90" and User shall able to see the below mentioned window.
3. KLA AM Station Application UI 9022549-000/AH Features in the Application • Also User can able to add new Process Job by clicking on "Add" in Process Jobs section. • Also User can able to add the new Control jobs a in the "E40/90" window by clicking on "Add" in Control Jobs section.
3. KLA AM Station Application UI Features in the Application 5. Click on "E30" and User shall able to see the below mentioned window. 6. Click on “KTGem Monitor” and User shall able to see the below mentioned window.
3. KLA AM Station Application UI 9022549-000/AH Features in the Application • Click on "Open KTGem Monitor" to open KTGem Deep View 2.0 Application. • From the above figure User can able to view the all tabs and click on respective tab to know detailed information. • User must click on "Clear Logs" to clear the log files for the selected tab.
3. KLA AM Station Application UI 3.2.6 Features in the Application Maintenance 1. User must click on "Maintenance" tab to get the below mentioned display. 2. This window will give User the below mentioned features • Image Back up/Restore. • Open Foup Web. 3. User must click on "Image Back Up / Restore" to open the FOUP Web UI.
3. KLA AM Station Application UI • Features in the Application User must click on "Recover" to retrieve the FOUP data when ever required. 4. User must click on "Open Foup Web" to open the Open Foup Web UI. 9022549-000/AH • User must click on "Open Foup Web UI" and the display shall be seen as mentioned below. • From the above figure User shall see the details of Foup Service, Foup Charging, Battery Level and Mission status. • Also User shall able to see the Network details from the above Figure.
3. KLA AM Station Application UI 44 Features in the Application • Click on "Log" to display Foup logs. • Click on "I2C" to see the I2C debugging information.
3. KLA AM Station Application UI Features in the Application 5. User must click on "Collect Logs" and the display shall be seen as shown below. 9022549-000/AH • User must select “Station” or “Foup” to collect respective Logs. • Click on “Collect” to see the display of Foup Log. • From the above figure User shall observe the location for collecting logs.
3. KLA AM Station Application UI 3.3 Software Upgrade for FOUP and Wafer Software Upgrade for FOUP and Wafer 1. Launch AM Station Application. 2. Click on Maintenance, to open the maintenance page. 3. Click on Open FOUP Web UI.
3. KLA AM Station Application UI Software Upgrade for FOUP and Wafer 4. FOUP configuration login page will open. 5. Enter Username, Password and click login to view FOUP configuration page. 6. Click on Upgrade, to view FOUP upgrade page.
3. KLA AM Station Application UI 3.3.1 Software Upgrade for FOUP and Wafer To Upgrade FOUP 1. To upgrade FOUP, click on Choose File and select Foup.deb file from bin folder. 2. Click on Upgrade to upgrade the FOUP. 3. Refresh UI after 5 minutes to view the upgraded FOUP version in the UI.
3. KLA AM Station Application UI 3.3.2 Software Upgrade for FOUP and Wafer To Upgrade Wafer 1. To upgrade Wafer, click on Choose File and select Wafer.bin file from bin folder. 2. Click on Upgrade to upgrade the Wafer. 3. Refresh UI after 5 minutes to view the upgraded Wafer version in the UI.
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4. KLA Automation Web UI Logging In 4. KLA Automation Web UI 4.1 Logging In 1. At the KLA Automation login page, select your role (in this example, Administrator is selected). 2. Enter your password. 3. Click Start to log in and go to the Home page (see Section 4.3). 4.2 Logging Out 1. From any page in the KLA Automation Web UI, click Logout. The display returns to the KLA Automation login page.
4. KLA Automation Web UI 4.3 KLA Automation Home Page KLA Automation Home Page The Home page summarizes the current status of all KLA Automation System components, usage, and recent mission alerts. It is the first page that you see after you log on. 1. To return to the Home page from any other KLA Automation page, click Home. 2. 4.3.
4. KLA Automation Web UI KLA Automation Home Page 3. To select the time period for which you want to see coverage and usage information, select the time period from the drop-down list in the top right-hand corner. 4. To view the statistics for the equipment type, hover the cursor over the image.
4. KLA Automation Web UI KLA Automation Home Page • Temperature Wafer 5. Click on "Vibration" and keep the mouse as shown in the below figure to see the data 6. Click on "Vibration" to know the AM Vibration Wafer information. 7.
4. KLA Automation Web UI KLA Automation Home Page • Foup ID • Current Location • Mission Completed • Purchased Hours (hh:mm) • Remaining Hours (hh:mm) • Total Usage (hh:mm) • Also User can view the list of "Tool IDs", "Mission Type" and "Status" associated to the current AM Wafer. • Battery details are yet to be mentioned in the AM Vibration Wafer mission details. 8. Click on "Temperature" and keep the mouse as shown in the below figure to see the data 9.
4. KLA Automation Web UI KLA Automation Home Page 10. From the above figure, User can see the Temperature Wafer mission details related to 4.3.2 • Wafer ID • Foup ID • Current Location • Mission Completed • Purchased Hours (hh:mm) • Remaining Hours (hh:mm) • Total Usage (hh:mm) • Also User can view the list of "Tool IDs", "Mission Type" and "Status" associated to the current Wafer. • Battery details are yet to be mentioned in the Temperature Wafer mission details.
4. KLA Automation Web UI 4.3.3 KLA Automation Home Page Connected FOUPs The Connected FOUPs area displays all KLA Automation FOUPs (carriers) in the system and their statuses. For each FOUP, the following information is displayed: 1. Carrier ID 2. Carrier status 3. Wafer IDs 4.
4. KLA Automation Web UI 4.4 Tools Page Tools Page The Tools page displays information about all the tools that were set up in the system (as described in Section 4.5.1 through Section 4.5.4). To view the Tools page, click Tools. NOTE • shows that the last mission that ran on this tool was successful • shows that the last mission that ran on this tool indicated a problem 1.
4. KLA Automation Web UI 4.5 Setup Page Setup Page Use the Setup page to add new or edit existing tools and mission recipes. IMPORTANT Mission recipes are added or edited for Automation Metrology Wafers only. See Section 4.11.4 for details of adding or editing recipes. 1. To view the Setup page, click Setup. 4.5.1 Edit or Add Tool IMPORTANT Before you can add a new tool, the applicable tool type and handler type must have been defined in the system (see Section 4.5.2 and Section 4.5.3). 1.
4. KLA Automation Web UI Setup Page In either case, the Edit Tool window opens. 3. In the Edit Tool window, enter or select a value for every field. 3 NOTE If you are editing an existing tool, enter or select new values only for those fields that you need to update. 4. Click Save to save the values and close the Edit Tool window.
4. KLA Automation Web UI 4.5.2 Setup Page Edit or Add Tool Type 1. In the Setup page, click Tool Types. 2. Continue as follows: • To edit an existing tool type, click the Edit icon for the tool type. • To add a new tool, click + New Tool Type. In either case, the Edit Tool Type window opens. NOTE If you are editing an existing tool type, enter or select new values only for those fields that you need to update. 3. In the Tool Type Edit window, type a Tool Type Name.
4. KLA Automation Web UI Setup Page 5. Continue as follows: 62 If you want to... Then continue with...
4. KLA Automation Web UI Setup Page 6. To create a new Tool Type Sequence from scratch, click Add New Cycle. NOTE Each location that wafers visit within a tool is called a tool station.
4. KLA Automation Web UI Setup Page 7. From the list of available stations, select the first station in the sequence.
4. KLA Automation Web UI Setup Page 8. Continue clicking New location and selecting stations until you have selected every station in the sequence. 9. For the last station in the sequence (in this example, FOUP), click Finish here to select that station and remove the option to select from the other stations.
4. KLA Automation Web UI Setup Page 10. Click Save to save the new tool type and close the Edit Tool Type window.
4. KLA Automation Web UI Setup Page 11. You can modify an existing Tool Type Sequence in any of the following ways: • Swap the station where the sequence finishes • Delete a station from the sequence or replace it with a different station • Add another station to the sequence 12. To change the station where the sequence finishes: • Click to deselect the station. Every station in the sequence then displays the option to select it.
4. KLA Automation Web UI Setup Page 13. To delete a station or Replace or to swap a station, from the sequence: • Click for that station. • To delete the station, click Delete station. • Click Replace station. • To Swap the station, click the Swap station. NOTE The list contains those stations that are set up in the KLA Automation System but are not currently used in this Tool Type Sequence. 14.
4. KLA Automation Web UI 4.5.3 Setup Page Edit or Add Handler Type NOTE The only parameter that is entered for a Handler Type is the Name. 1. In the Setup page, click Handler Types. 2. Continue as follows: • To edit an existing handler type, click the Edit icon for the handler type. • To add a new handler type, click + New. 3. Type the Name for the handler type.
4. KLA Automation Web UI 4.5.4 Setup Page Edit or Add Wafer Sequence NOTE The only parameter that is entered for a Chamber or Station is the Name. 1. In the Setup page, click Wafer Sequence. 2. Continue as follows: • To edit an existing chamber or station, click the Edit icon for the chamber or station. • To add a new chamber, click + New Chambers. • To add a new location, click + New Location. 3. Type the Name for the chamber or location.
4. KLA Automation Web UI User Mission page 4. Click 4.6 to save. User Mission page The User Mission page is used to execute the Tool or OHT manual mission. 1. To view User Mission page, click User Mission. • 9022549-000/AH Tool page will open by default.
4. KLA Automation Web UI 4.6.1 User Mission page To Execute Tool Mission 1. Add Tool data to execute the tool mission. 2. Click on Reports to FA Host.
4. KLA Automation Web UI User Mission page 3. Click on Execute to run the tool mission.
4. KLA Automation Web UI 4.6.2 User Mission page To Execute OHT mission 1. Click on OHT to execute the OHT mission. 2. Add OHT data to execute the OHT mission.
4. KLA Automation Web UI User Mission page 3. Click on Reports to FA Host. 4. Click on Execute to run the OHT mission. 4.6.3 To Execute ToolOHT Mission 1. Click on Tool in User Mission. 2. Use drop-down and select ToolID. 3. Use drop-down and select Basline Tool ID (optional). 4. Use drop-down and select Tool Recipe. 5. Use drop-down and select Carrier ID.
4. KLA Automation Web UI User Mission page 6. Use drop-down and select the Wafer ID. 7. Use drop-down and select the Mission Recipe (added through Setup Recipes - New Recipe). 8. Use drop-down and select Chamber description. 9. Click on Reports to FA Host. 10. Select the Load Port Number.
4. KLA Automation Web UI User Mission page 11. Click on Execute to run the ToolOHT mission.
4. KLA Automation Web UI 4.7 History Page History Page The History page displays information about missions that have run. 1. To view the History page, click History. NOTE 4.8 • shows that the mission ran successfully • shows that the mission did not run successfully Administration Page The Administration page allows those with Administrator-level privileges to remote-connect to KLA Automation Stations to perform troubleshooting.
4. KLA Automation Web UI 4.8.1 Administration Page KLAStations IMPORTANT This will allow users to view the list of configured KLA Automations Stations to the Server. 1. Click on “KTStations” to view the list of KT Automation Stations. 2. User can filter the KT Automation Stations using the available selections, (Default, Days and Date (select the required date)). 3. Click on “Collect Logs” to collect the all crash dump logs for the selected KLA Automation Station (Refer to the above Figure). 4.8.
4. KLA Automation Web UI 4.8.3 Administration Page FOUPS IMPORTANT This will allow User to view the configured FOUPs list in the server. 1. Click on "FOUPS" to view the list of FOUPs configured in the server. 2. The newly added FOUP Status will be "Disabled" by default. 3. User has to enable the Status to "Enabled" with the edit option. 4.8.4 Data Maintenance IMPORTANT This feature allow the User to clean up the AM Data in Drive and Database. 1.
4. KLA Automation Web UI Administration Page 3. User must see the available space in Drive and Database in “Available space”. 4. Also User must be notified when clean up is required to AM Data in Drive and Database (Refer to below Figure). 5. To cleanup the AM Data in Drive and Database, User must select required option in the Cleanup option drop down box (Refer to below Figure). 6. Then enter the password in the “Enter Password” section (Refer to below Figure).
4. KLA Automation Web UI Administration Page 7. Then click on “cleanup” (Refer to below Figure). 8. Now the AM Data is cleaned up in the Drive and Database.
4. KLA Automation Web UI 4.9 Analysis Analysis IMPORTANT This Analysis page will allow User to create Baseline, allow User to see the monitoring mission results and User must view whether the tool has qualified or not. • 4.9.1 Click on “Analysis” and the page will be displayed as shown below. Baseline IMPORTANT This section will allow user to create the Baseline per tool id and load port number. 1. Click on “Baseline” and the page will be displayed as shown below. 2.
4. KLA Automation Web UI Analysis 4. User need to know the below mentioned details before creating the Baseline in the Chart • Adding/Removing the stations • Adding/Removing the Label 5. User has to right click on the chart to get the below shown options.
4. KLA Automation Web UI Analysis 6. Click on “Add All Cursor” to add all stations in the chart which is shown in the below figure 7. Also User can able to delete the all stations by clicking on “Remove All Cursor” (Refer to step 5). 8. Each stage and label will be indicated between two green lines as shown in the above figure.
4. KLA Automation Web UI Analysis 9. User must add each station into the chart by clicking “Add Cursor” and “Add Label” as shown in the below figure. • Right click on the Chart to get the options. • Select “Add Cursor” to add Station. • Select “Add Label” to add station number. 10. User can define the stage (or) Wafer sequence by moving the Station line (Green line) horizontally as shown in the above figure.
4. KLA Automation Web UI Analysis 11. User will get the detailed information related to Baseline creation after defining the Stage (or) Wafer sequence and Station number (or) Label. 12. Also User can see the “Error List” as shown in the above Figure. NOTE Error List must be appeared in the Baseline mission if mission data has discrepancy with the predefined settings data.
4. KLA Automation Web UI Analysis 13. Re-analysis: In the “Errors List” User can see the list of errors for the particular mission. Here User has to do the required changes in the JSON settings and re-run the machine to reduce the errors. NOTE Here the number of errors may be increased if the JSON settings changes are not modified properly. User has to keep the exact values to reduce the errors.
4. KLA Automation Web UI Analysis 14. User can enable the “Zoom” option as mentioned in the below figure. 15. User has to check and click on respective error in “Error List” to see the detailed information about the error.
4. KLA Automation Web UI Analysis 16. User must remove the stage by clicking on “Remove Cursor”, User must remove the station number (or) Label by clicking on “Remove Label” and User must remove all stations by clicking “Remove All Cursors”. 17. User can view the required raw data along with graph co-ordinates using Magnify. See below image for reference. 18. User can change the baseline colors for the graph using Color Settings.
4. KLA Automation Web UI Analysis 19. User can hide the error by clicking Hide Error.
4. KLA Automation Web UI Analysis 20. After the successful creation of the Baseline the pop up will be shown as mentioned below. NOTE A pop up will be shown in case of the Baseline already exists, Here User has to decide whether to override or cancel the Baseline creation. 21. The Baseline existence will become “true” in “Results“ page after successful creation of Baseline to the particular Tool Id and Load Port combination.
4. KLA Automation Web UI Analysis 2. User has to select the “Tooltype, Tooltype Recipe, and Loadport” to view the raw details (Refer to the below figure). 3. Also this “Results” page will allow user to see the existence of baseline. NOTE User can not see the mission results without baseline, in the Results page. 4. User has to create Baseline in Baseline section in case of non-existence of the baseline for the created mission.
4. KLA Automation Web UI Analysis 6. Click on “Load” to get the mission raw data for the existence of Baseline of particular Tool ID, Tool Recipe, and Load Port Number. See below figure shows the mission raw data.
4. KLA Automation Web UI 4.9.3 Analysis BaselineView IMPORTANT This section will allow user to view the Baselines existed (Base line created in Baseline section) per tool type and also allow the User to view their Mission Data. 1. Click on "BaselineView" and the page will be displayed as shown below. 2. Select Tool Type to load the mission data. 3. Click on “Load” to select to get the mission raw data of particular event selected in the mission data. 4.
4. KLA Automation Web UI 4.9.4 Analysis Tool Qualification IMPORTANT This UI must allow User to see the health of a tool mapping issues to different stations. 1. Click on “Tool Qualification” and the page will be displayed as shown below. 2. There will not be any data if no tool qualification data exists after clicking on “Load” for the particular combination of “Tool Id” and “Load Port”.
4. KLA Automation Web UI Analysis 3. For the successful qualified tool data, the data will be shown as mentioned below. 4. Mission end status of Tool qualification data will be anyone of the following 3 states 9022549-000/AH • Failed - the tool has Baseline, Monitor mission has faults compared to Baseline. • Completed -the tool has Baseline, Monitor mission is equal to Baseline. • Completed with Failures - The tool has no Baseline.
4. KLA Automation Web UI Analysis 5. Result Signal 4.9.5 • The result signal will be RED if “Failed” status exists in any stage (Refer to above step 3). • The result signal will be RED if both “Failed” stage and “Completed with Failures” stage exists. • The result signal will be in YELLOW if “Completed with Failures” stage exists and no “Failed” status. • The result signal will be GREEN if “Completed” stages only exists. OHT Analysis 1. Click OHT Result to view, OHT Result page. 2.
4. KLA Automation Web UI Analysis 4. Click on “Load” get the analysis report of the particular mission selected in the mission data. 5. Click on chart to view the OHT result graph.
4. KLA Automation Web UI 4.10 Diagnostics Diagnostics IMPORTANT This page allows the user to know the status of AM required Ports and AM system communications. User must click on “Diagnostics' and the display will be seen as shown below. This page must have the below mentioned features.
4. KLA Automation Web UI 4.10.1 Diagnostics Ports 1. User must click on “Ports” and the UI display will be seen as shown below. 2. Ports section must be divided into 4 sub sections which are shown below • Station IP • Available Stations • Server Details • Start Diagnostics 3. Station IP 9022549-000/AH • This section allows the User to add new Station. • User must enter the IP details in the text box and click on “Add” to add the new Station IP details.
4. KLA Automation Web UI • Diagnostics The new Station IP address must be displayed in the section "Available Stations". NOTE This Section must be used to add the Station IP in the available Station IP Grid. 4. Available Stations 102 • The “Available Stations” section must be seen as shown below. • User must view the list of Station IPs which were added in the "Station IP" section. • User must see the following columns in this section.
4. KLA Automation Web UI • Diagnostics User must see the below listed columns on clicking Expand. • Port Number • Used By • Protocol • Status • Manual Test (Button) • User must click on Manual Test button to test the particular port status. • The status of the port must be seen under status column. 5. Server Details • 9022549-000/AH The Server section must be displayed as shown below.
4. KLA Automation Web UI 104 Diagnostics • This section has a table with nested grid. when the page gets loaded the nested grid will be expanded. • User must see the all port details after the table grid expansion. • User must see the below listed columns on clicking the expand button • Port Number • Used By • Protocol • Status • User must click on Manual Test button to test the particular port status. • The status of the port must be seen under status column.
4. KLA Automation Web UI Diagnostics 6. Start Diagnostics 9022549-000/AH • This section allows the User to know the status of all available ports status in the Server. • User has to click on the required check box of available station to know the status. • User must click on “Start Diagnosis”. • Then all the available ports tests will be displayed after the completion of the diagnosis in the server as well as in the Station which was selected by User.
4. KLA Automation Web UI 106 Diagnostics • User must find the all ports status in their respective column. • Also User can stop the diagnosis by clicking on “Stop Diagnosis” after the start of the Diagnosis.
4. KLA Automation Web UI 4.10.2 Diagnostics System Communication IMPORTANT This will allow the User to know the status of communication between AM Systems. 1. User must click on “System Communication” and the display must be seen as displayed below. 2. From the above figure User must observe the table with a nested grid. 3. The nested grid must have the following columns.
4. KLA Automation Web UI Diagnostics 4. User must know the communication of between • Server to Station • Station to Server • Server to Foup 5. The UI Page of communication will look like as shown below. 6. From the above figure, User can see the status as “Success” of the station. 7. User must see the table with a nested grid with the below mentioned columns from the above figure. • Source: An image with IP address of the source machine. It could be server, station or Foup.
4. KLA Automation Web UI Diagnostics 8. User must click on the check box of the respective station and then click on “Start Diagnostics”. 9.
4. KLA Automation Web UI 4.11 Automation Metrology Wafer Functions Automation Metrology Wafer Functions The below mentioned parameters are used to Start and Stop the triggers.
4. KLA Automation Web UI Automation Metrology Wafer Functions 4. Click on New Recipe. 5. New recipe pop-up page will open. 6. Enter Recipe Name. 7. Select Tool in Recipe Type. 8. Use drop-down menu to select the Start trigger and Stop Trigger, for the Tool Parameters.
4. KLA Automation Web UI • • 112 Automation Metrology Wafer Functions Select Stop Trigger - DoorClose If required, Generate KLARF file for monitoring mission.
4. KLA Automation Web UI Automation Metrology Wafer Functions 9. Click on Save to add the new tool recipe. 4.11.2 To Add OHT Recipe 1. Select OHT, from the New Recipe pop-up. 2. Enter Recipe Name. 3. Use drop-down menu to select the Start trigger and Stop Trigger, for the Tool Parameters.
4. KLA Automation Web UI • Automation Metrology Wafer Functions Select Stop Trigger - FoupReturnCharging 4. Click on Save to add the new OHT recipe.
4. KLA Automation Web UI 4.11.3 Automation Metrology Wafer Functions To add ToolOHT Recipe 1. Select both Tool and OHT in Recipe Type, from the New Recipe 2. Enter Recipe Name. 3. Use drop-down menu to select the Start trigger and Stop Trigger, for the Tool Parameters.
4. KLA Automation Web UI Automation Metrology Wafer Functions 4. Click on Save to add the new ToolOHT recipe.
4. KLA Automation Web UI 4.11.4 Automation Metrology Wafer Functions Edit or Add an Automation Metrology Wafer Mission Recipe 1. In the Setup page, click Recipes. 2. Click the Automation Metrology Recipes folder to edit or add new recipes. 3. Automation Metrology Recipes page will open. 4. Click on edit icon to update the recipe.
4. KLA Automation Web UI Automation Metrology Wafer Functions 5. Edit Recipe pop-up will open. 6. Update the recipe as per the requirement. 7. Click on Save to update the recipe.
Glossary Glossary Term, acronym, abbreviation 9022549-000/AH Description CID Wafer Carrier ID (serial number contained in RF Pill of FOUP; might also be Lot ID, if written by fab) FA Factory Automation (software- and communications-based control of a semiconductor fab) FOUP Front-Opening Universal Pod (wafer container) GEM Generic Model for Communications and Control of SEMI Equipment GSS Global Support Services (KLA Support organization).
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REVISION HISTORY Revision History Revision Date New Rev. Level 10/2016 Changes Made Reviewer Approver AA Initial Issue Avi Zaban Henry Lam 04/2017 AB DCR T35533: Added Regulatory Compliance Statements (Section 1.4); other minor edits Avi Zaban Henry Lam 05/2017 AC DCR T35123: Added FOUP Reset (Section 2.2.6) Avi Zaban Henry Lam 05/2018 AD Figures Modified and added for the sections 3.3 and 3.3.1 Text added in the section 3.3.1 about Vibration and Temperature. Added the Sections 3.7.
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