EtchTemp Wafer™ User Manual ® KLA-Tencor SensArray 5451 Patrick Henry Dr. Santa Clara, CA 95054 408-986-5600 Fax 408-986-5601 info@sensarray.com www.sensarray.com 86-3820 Version-1.
© Copyright 2009 by KLA-Tencor. All rights reserved worldwide. No parts of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA-TENCOR, One Technology Drive, Milpitas, California 95035. KLA-TENCOR may revise this document at any time without notice. UM-INT- 2007.
Important Notices Warranty EtchTemp Wafer System Hardware KLA-Tencor warrants that the EtchTemp Wafer Systems (“Products”) sold will be free from defects in material and workmanship, and perform to KLA-Tencor’s applicable published specifications for a period of 12 months after shipment for the Docking Station. The EtchTemp is warranted for a specified number of operating hours. Refer to the specification provided with your wafer for the exact warranty terms.
Software License Agreement The Software is owned by KLA-Tencor (SensArray division) and is protected by United States copyright laws and international treaty provisions. Therefore, you must treat the Software like any other copyrighted material. Under the Copyright Laws, the Integral Wafer Software, or accompanying written materials, may not be copied, photo-copied, reproduced, translated, in whole or in part, without the prior written permission of SensArray.
Radio Frequency Interference Compliance Applies to the Storage Cases, RF Carrier Station and RF FOUP NOTE: This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment.
Table of Contents i Using This Manual ...................................................................................................................ii Overview ........................................................................................................................................... ii What You Need to Know.................................................................................................................. ii Conventions Used in this Manual ...............................
KLA-Tencor Confidential ii Using This Manual Overview This manual consists of the following sections. • Chapter 1, Overview - Discusses features, components, and configurations of the EtchTemp Wafer System. • Chapter 2, System Setup - Discusses unpacking the system components, preparing the equipment for the cleanroom, and connecting the system cables.
iii KLA-Tencor Confidential Using This Manual Conventions Used in this Manual Several standard conventions are used in the text of this manual to make the information presented a little clearer and easier to understand. Every attempt is made to be consistent in the application of these conventions. Note: Highlights important information. Bold Bold text indicates button names, icon names, and menu items. italic Italic text indicates the section and/or chapter name in a cross-reference.
KLA-Tencor Confidential 1-1 Chapter-1 Overview The EtchTemp Wafer User Manual is designed to document the setup and use of the ET Wafer system in conjunction with the SensArray Tool. This manual is applicable for ET wafer only. This ET wafer will only work with SensArray Tool (Plasma Suites) This chapter discusses the features of the EtchTemp Wafer System.
1-2 KLA-Tencor Confidential Figure 1-1 SensArray Tools Main Screen Figure 1-2 Mission Controller Screen 86-3820 Version-1.
Overview KLA-Tencor Confidential 1-3 During acquisition, EtchTemp wafer performs computations on acquired data, such as determining the minimum, maximum, mean, range (max-min), and standard deviation of all wafer sensor values for the sample, and logs the results in columns. These computed values are referred to as calculated values. After acquiring, linearizing, and storing the sensor data, you can display or print the data as a line plot graph, as shown in Figure 1-3.
KLA-Tencor Confidential 2-1 Chapter-2 System Setup Before you can begin working with the EtchTemp Wafer system, you need to unpack the system components, prepare the equipment for transfer to the Cleanroom, and charge the wafer batteries. Before You Begin Before using the EtchTemp Wafer, there are several safety and handling precautions that should be noted. Please read the information provided in this manual and become familiar with the EtchTemp Wafer before attempting your first thermal survey.
2-2 KLA-Tencor Confidential System Setup Removing the Wafer from the Storage Case: The wafer storage case is designed to keep the EtchTemp Wafer batteries charged to the optimum level for an extended period of 1 to 2 years. This is done by periodically checking the status of the batteries and recharging the batteries when their voltage drops below a threshold. CAUTION: The storage case is not designed to be used to recharge wafers after acquiring data.
System Setup KLA-Tencor Confidential 2-3 Charging the Equipment Before Use: Place the EtchTemp Wafer into the carrier station shipped with the unit to maintain the charge on the internal batteries. Please see Using the Charge and Communication Carrier Station for more information on inserting and removing the wafer to and from the carrier stations. Plug the laptop into the AC power supply and fully charge the laptop battery.
2-4 KLA-Tencor Confidential System Setup Cleaning the Carrier Station: The carrier station is easily cleaned by wiping the surfaces with a cleanroom cloth dampened with IPA. Nothing harsher is needed to remove contamination from the surface. Be sure to clean the interior of the carrier station. Debris on the surface may cause stress points on the EtchTemp Wafer when the lid is closed. To avoid damage to the EtchTemp Wafer, only clean the interior of the carrier when the wafer is not present.
KLA-Tencor Confidential 3-1 Chapter-3 Using the Charge & Communication Carrier Station/RF FOUP The Carrier Station/RF FOUP provides a method of charging and communicating with the wafer through an RF signal rather than a set of contact pins. EtchTemp wafer will only work with SensArray Tool 2.1 and above. Using the Carrier Station Before using the carrier station with EtchTemp Wafer, make sure the carrier firmware version is compatible. Carrier firmware version needs to be 2.1.90 or above.
3-2 KLA-Tencor Confidential Using the Carrier Station Table 3-1: LED status indicators LED color Indicates Green Successful USB connection to computer Yellow USB communications activity Red Wafer Charging Blue Communication received from wafer Red/Blue alternating Wafer measurement has been initiated Carrier reset switc h Green LED USB port Yellow LED Red LED Blue LED Figure 3-2 Connections and LED Indicators Removable rechargeable battery Figure 3-3 Backside of C/C Carrier 86-3820 Versi
Using the Carrier Station KLA-Tencor Confidential 3-3 Figure 3-4 LCD Display Figure 3-5 C/C Carrier Station Closed To open the carrier station and gain access to the wafer, push in the white Delrin cover latch button as shown in Figure 3-6 and lift the handle attached to the lid. Latch Button Figure 3-6 Unlatching the Carrier Station 86-3820 Version-1.
3-4 KLA-Tencor Confidential Using the Carrier Station Once the lid is raised completely, spring tension will keep it open. Figure 3-7 Carrier Station Open CAUTION: Only handle the Wafer on the edges with gloves on. The wafer is locked to the surface of the white plastic insert on the carrier station by a spring-loaded clamp mounted to the side of the carrier station. To unclamp the wafer, pull the wafer clamp straight out until it clears the side of the wafer carrier.
Using the Carrier Station KLA-Tencor Confidential 3-5 Removing the Wafer from the Carrier Station While the Lid is opened, you can slide the wafer off the carrier plastic insert surface. A groove is provided on the right-hand side of the carrier station surface to allow you to get your finger below the side of the wafer as shown in Figure 3-9. Slide the wafer to the left until there is enough of the wafer free of the carrier plastic insert surface to put your other hand or a vacuum wand under the wafer.
3-6 KLA-Tencor Confidential Using the Carrier Station Using the Wafer with the Carrier Station To place the wafer on the carrier station, first open the lid of the carrier station. Slide the wafer onto the plastic insert surface and slightly push the wafer against the wafer positioners. Make sure the edge of the wafer slides under the top surface of the positioners.
Using the Carrier Station KLA-Tencor Confidential 3-7 Figure 3-13 Wafer Ready Displayed If you close the LID and no wafer is inside the carrier, you will see the message No Wafer detected. There may be a delay between the carrier LCD display messages and the SensArray Tool mission controller application message on your laptop. Do not use the wafer until you actually see the message display on the mission controller screen. Also, only perform the survey when the wafer voltage is >4.10V.
3-8 KLA-Tencor Confidential Using the Carrier Station Using the RF FOUP The RF FOUP protects the Wafer and maintains the battery charge during storage. It also provides the communication link between the Wafer and the host computer through the USB port. • When wafer is present, the LCD will display Loading Wafer. Once the wafer is detected, the message Wafer Ready will display.
Using the Carrier Station KLA-Tencor Confidential 3-9 Figure 3-16 Retrieving the Data • After the survey, when the wafer going back to the RF FOUP, the data from the wafer will be stored in the FOUP. Select the latest data file and click OK to retrieve the data file. Figure 3-17 iWafer System File Transfer NOTE: The RF can only stored up to 12 data files only. 86-3820 Version-1.
KLA-Tencor Confidential 4-1 Chapter-4 Using the SensArray Tool Software The SensArray Tool is a software program that communicates with the EtchTemp Wafer through the carrier station or RF FOUP. It monitors the status of the system, retrieves data from completed thermal surveys, and sets up the parameters for the next set of surveys. Before using the SensArray Tool, please read instructions on using the Carrier Station. See the Using the Carrier Station section of Chapter 3 for more information.
Using the SensArray Tools Software KLA-Tencor Confidential 4-2 Product License at Startup The computer should come with the correct license. However, if an Error dialog box appears similar to Figure 4-2 or Figure 4-3. Figure 4-2 Or Figure 4-3 Or if a license upgrade is needed, click the OK button, then use the License File Manager to resolve the issue. To use the License File Manager 1. Select Tools on the PlasmaSuite or LithoSuite window menu bar, then License File Manager.
4-3 KLA-Tencor Confidential Software Using the SensArray Tools 3. To load the new license, return to the License File Manager window, then click the Change License button. The License Upgrade Wizard – Choose License Manager Action window opens. Figure 4-5 Choose License Manager Action Window 4. Select the first option, then click the Next > button. The License Upgrade Wizard – Add License Form File window opens. Figure 4-6 License Form File Window 5. Click the Load New File button.
Using the SensArray Tools Software KLA-Tencor Confidential 4-4 7. Click the Next > button. The License Upgrade Wizard - Confirm License File Change window opens. 8. Click the Finish button, then close the License File Manager window. The new license is in effect. SensArray Tools Process Flow For the configuration setup, please refer to SensArray Tool user manual. 86-3820 Version-1.
4-5 KLA-Tencor Confidential Software Using the SensArray Tools Acquiring Data Using the Mission Controller The process of acquiring data, using the Mission Controller to run a mission, is comprised of the following steps: Step 1 - Start the Application Step 2 - Run a Mission Step 3 - Download and Tag Mission Data Step 4 - Check Tagged Data Step 5 - View Mission Data Step 1 - Start the Application To start the application: 1. From the PlasmaSuite window, select Mission Controller.
Using the SensArray Tools Software KLA-Tencor Confidential 4-6 Start Condition options are: Start Immediately - Mission starts when the wafer is taken from its bay station. Start After Delay* – Mission starts after the specified time expires. Start at Temperature *When a delay is combined with a temperature trigger, the delay will not start counting down until after the temperature trigger condition is met. Use a direct connection to the wafer: 2.
4-7 KLA-Tencor Confidential Software Using the SensArray Tools Figure 4-9 Waiting for data Window To place the wafer into the process chamber, process it, then bring the wafer back a. If the wafer is in a wafer carrier: b. Transfer the wafer to a standard FOUP. c. Place the FOUP onto the equipment’s load port and instruct the equipment to process the wafer. d. After the run is complete, instruct the equipment to unload the wafer, back to the FOUP. e. Transfer wafer from FOUP to wafer carrier. 3.
Using the SensArray Tools Software KLA-Tencor Confidential 4-8 Step 3 - Download and Tag Mission Data To download mission data 1. After the mission run is complete, return the wafer to its base station (RF FOUP or Carrier Station). Figure 4-10 Slecting the Wafer ID 2. Select the Wafer ID from the drop-down list, and then click the Connect to a device button in the Toolbox panel. The wafer information is read from the wafer.
4-9 KLA-Tencor Confidential Software Using the SensArray Tools 4. Tag each mission by specifying by whom the data was collected, and the chamber and recipe associated with the mission. All missions must be tagged before proceeding. TIP: To tag more than one mission with the same information, select multiple files by pressing and holding the key while selecting additional missions. If multiple missions are selected, anything selected on the right is applied to every mission currently selected.
Using the SensArray Tools Software KLA-Tencor Confidential 4-10 Step 5 - View Mission Data 1. On the PlasmaSuite window, select Data Viewer, then select View Data from the File menu. The Mission Selection window opens. 2. Select the mission to be viewed, then drag it to the Selected Missions panel. Click the OK button. The Data Viewer window opens, with this mission displayed. The left panel plots the sensor data versus time.
4-11 KLA-Tencor Confidential Software Using the SensArray Tools Figure 4-14 Data Viewer Window Viewing Data from Previous Missions Select View Data to view data from previously run missions. To view data: 1. Select View Data in the File options on the Data Viewer menu bar. The Mission Selection window opens. 2. Apply various filters in the Mission Filters panel, to narrow the search. After a satisfactory selection of missions is viewed, drag one or more missions into the Selected Missions panel. 3.
Using the SensArray Tools Software KLA-Tencor Confidential 4-12 Close Window Exit Edit option allows copying of a selected graph to the Windows Clipboard. Graph options include: Synch All Graph Scales To: Synch All Graph Intervals To: Line Graph options Set Scale Auto Scale Zoom Zoom Settings Set Background Color View option is Lifetime Information. Window option allows tiling windows horizontally and vertically, and window cascading.
4-13 KLA-Tencor Confidential Software Using the SensArray Tools Identifying Data to Be Analyzed Using a Template A template defines the regions of interest within a mission run using a specific recipe. It also defines the important statistics for each region (such as mean, range, and standard deviation).Templates are an important part of SensArray Tools analysis modules, because they are used to extract key information from the raw data. This section is a guide to the template creation process.
Using the SensArray Tools Software KLA-Tencor Confidential 4-14 Figure 4-17 Mission Selection Window 3. Filter the missions by Recipe, Fab, DataSet, Wafer ID, Date, Included Missions, Data Type, Notes, or Diameter, to limit the number of missions from which to select. NOTE: More than one mission can be selected for this step, to ensure that the program is able to properly analyze other missions from the same recipe. 4. Drag the selected missions to the Selected Missions list.
4-15 KLA-Tencor Confidential Software Using the SensArray Tools Figure 4-18 Templates - Interval Definition Window 2. Click the Add button, to add an interval. An interval defines the mission subset to be analyzed. TIP: To edit the interval start and end time, change the values in the Intervals table or on the graph. To change the values on the graph, click an interval (bordered in orange) to select it. Then press and hold the key while dragging a portion of the interval.
Using the SensArray Tools Software KLA-Tencor Confidential 4-16 To define template parameters: 1. Click the Add New Parameter button to add a parameter. A new row appears in the Interval Parameters list, with a drop-down list for Interval, Statistic, and Sensor Pattern. Figure 4-19 Templates - Parameter Definition window 2. Select the interval to which the parameter applies. 3. Select the statistic to calculate for that interval.
4-17 KLA-Tencor Confidential Software Using the SensArray Tools Identifying Data to Be Analyzed Using a Signature A signature allows limits to be associated with a template, to indicate the expected values for the calculated statistics. For example, if a recipe template calculates the mean of a steady-state period, the signature for that template would specify the minimum, maximum, and average values expected for that mean.
Using the SensArray Tools Software KLA-Tencor Confidential 4-18 3. From the Available Templates list, select the template for which the signature is to be created. The defined interval parameters for that template are listed to the right. Click the Next > button. The Signature Creator Wizard - Define Acceptance Limits window opens. Figure 4-22 Signature Creator Wizard - Define Acceptance Limits window 4. Define a collection of missions for the program to generate a suggested set of limits.
4-19 KLA-Tencor Confidential Software Using the SensArray Tools Figure 4-23 2. Examine each parameter and assign a maximum, nominal, and minimum value, to define the acceptance limits for this signature. To use the suggested values calculated from the dataset, click the Use Suggested button. Click the Next > button. The Signature Creator Wizard - Associate Recipes window opens. Proceed to Step 3 - Associate the Signature with a Recipe.
Using the SensArray Tools Software KLA-Tencor Confidential 4-20 2. A signature can be assigned as the “default” for a given recipe; in that case, it is automatically loaded by Go/No-Go for missions run using that recipe. To assign a signature as the default for a recipe, use the Signature Creator Wizard – Assign Default Recipe window. Select a signature, then click the Next > button. The Signature Creator Wizard – Summary window opens. Proceed to Step 4 - Verify and Complete the Signature.
4-21 KLA-Tencor Confidential Software Using the SensArray Tools Validating Process Readiness – Go/No-Go This module allows users to quickly determine whether the process is within spec. To analyze missions with Go/No-Go, a template and signature must be defined for the mission to analyze. To validate mission readiness 1. Select Go/No-Go from the PlasmaSuite window. The Go/No-Go window opens. Figure 4-26 2. Select Open from the File menu, to select the mission to analyze.
Using the SensArray Tools Software KLA-Tencor Confidential 4-22 Figure 4-27 5. If any parameters are out of spec, the data and/or the Go/No-Go Status area are shaded red, to alert that the mission did not pass. NOTES: The Overlay tab presents a graph of the selected mission mean, compared to the template mission mean. The Template tab presents, for reference, the original mission used for the template. The 2D Comparison tab provides surface plots of the selected and template missions.
4-23 KLA-Tencor Confidential Software Using the SensArray Tools review trend information for a specific chamber, to ensure the chamber remains within spec over time. SPC Charting requires a template for the recipe to be analyzed. If an appropriate template is not available, refer to the Identifying Data to Be Analyzed Using a Template - Step 1 - Create a Template section.
Using the SensArray Tools Software KLA-Tencor Confidential 4-24 AutoCD includes Create Track and Create Litho Flow Wizards, to aid in setting up the lithography fab. This section provides instructions for the following data management tasks: Importing Files and Data Backing Up and Restoring the SensArray Tools Database Importing Files and Data A data tag is a set of metadata for a mission.
4-25 KLA-Tencor Confidential Software Using the SensArray Tools Figure 4-28 2. Select one of the following options: Load Data From WFR Files Modify Existing Tags in the Database Import Pilot Wafer Data Import SensArray Data 3. Click the Next > button. The window for the second step in the process opens. If an option was not selected, a Warning dialog box opens, with a reminder to select one of the options.
Using the SensArray Tools Software KLA-Tencor Confidential 4-26 Figure 4-29 To select data of interest: 1. Click the Select Files… or Import Another File… button, located under the first instruction. The Open window lists available files of the selected data type. 2. Select the file of interest, then click the Open button or double-click the file name. The file appears in the panel below the button. Repeat sub-steps 1 and 2, until all files of interest are selected. 3.
4-27 KLA-Tencor Confidential Software Using the SensArray Tools Step 2 - Select Missions Use this version of Step 2 to import missions that were previously tagged and saved. Figure 4-30 To select missions 1. To narrow the number of missions selected, apply filters in the Mission Filters panel. Missions can be filtered by Recipe, Fab, DataSet, Wafer ID, Date, Included Missions, Data Type, Notes, and Diameter.
Using the SensArray Tools Software KLA-Tencor Confidential 4-28 Step 3 - Tag Selected Data Tag each mission by specifying by whom the data was collected, and the chamber and recipe. ALL missions must be tagged before proceeding. TIP: To tag more than one mission with the same information, select multiple files by pressing and holding the key while selecting additional missions. If multiple missions are selected, anything selected on the right is applied to every mission currently selected.
4-29 KLA-Tencor Confidential Software Using the SensArray Tools To check tagged data: 1. If any information is incorrect, click the < Back button and correct it. 2. If the data is correct, click the Finish button. The PlasmaSuite or LithoSuite window opens. NOTE: If there is a problem with the tagged data, a Warning dialog box opens, listing the problem parameters, and the Launch Go/No-Go window pinpoints the out-ofspec information. Correct the information before proceeding.
4-30 KLA-Tencor Confidential Boxplot. Method for showing different types of data populations; the spacing between the various parts of the box help indicate variance, skew, and identify outof-specification values. Critical Dimensions (CDs). Width of a patterned line or the distance between two lines, monitored to maintain device performance consistency; also, the dimension of a specified geometry that must be within design tolerances. Import.
4-31 KLA-Tencor Confidential Software Profile Comparison. View 2D profiles of multiple missions. Recipe. Computer program, rules, specifications, operations, and procedures, which are organized in steps and are performed each time to produce/process a wafer. Used in PlasmaSuite. Each chamber in the fab must have a recipe associated with it. Recipe Step. Single action within a recipe. Sample Rate. Speed of acquisition during data collection.
4-32 Software License Terms Pre-Installed Software License Terms Standard (U.S.) Version 2005.1.1 These Pre-installed Software License Terms apply to any quote, order, and order acknowledgment, and any license or delivery of software pre-installed on hardware by KLA-Tencor Corporation, 160 Rio Robles, San Jose, California 95134 (“K-T”) to any acquirer (“Customer”).
Software License Terms 4-33 2.8 Audit.
4-34 Software License Terms Standalone Software License Terms Standard (U.S.) Version 2005.1.1 These Standalone Software License Terms apply to any quote, order, and order acknowledgment, and any license or delivery of standalone software provided by KLATencor Corporation, 160 Rio Robles, San Jose, California 95134 (“K-T”) to any acquirer (“Customer”).
Software License Terms 4-35 3.2.3 Server-Client Architecture.
4-36 Software License Terms 6. PAYMENT. Customer shall pay (i) ninety percent (90%) of the license fees thirty (30) days after receipt of K-T’s invoice; and (ii) ten percent (10%) of the license fees thirty (30) days after express acceptance or deemed acceptance in accordance with Section 2.2 (Acceptance Testing), whichever occurs earlier. Payment shall be made in accordance with the General Terms. 7. LIMITED WARRANTY AND DISCLAIMERS 7.1 Limited Warranty.
Software License Terms 4-37 8.1 Termination for Cause. Without limiting Section 3.
KLA-Tencor Confidential A-1 Appendix A Reference Information Sensor Bank Reference Sensor S0 S1 S2 S3 S4 S5 S6 S7 S8 S9 S10 S11 S12 S13 S14 S15 S16 S17 S18 S19 S20 S21 S22 S23 S24 S25 S26 S27 S28 S29 S30 S31 S32 S33 S34 S35 S36 S37 S38 S39 Sensor Name A01 B02 B03 B04 B05 C06 C07 C08 C09 D10 D11 D12 D13 D14 D15 D16 D17 E18 E19 E20 E21 E22 E23 E24 E25 F26 F27 F28 F29 F30 F31 F32 F33 G34 G35 G36 G37 G38 G39 G40 86-3820 Version-1.0 Radius(mm) 0 9 9 9 9 37 37 37 37 74 74 74 74 74 74 74 74 92.2 92.2 92.2 92.
A-2 S40 S41 S42 S43 S44 S45 S46 S47 S48 S49 S50 S51 S52 S53 S54 S55 S56 S57 S58 S59 S60 S61 S62 S63 S64 KLA-Tencor Confidential G41 H42 H43 H44 H45 H46 H47 H48 H49 J50 J51 J52 J53 J54 J55 J56 J57 J58 J59 J60 J61 J62 J63 J64 J65 86-3820 Version-1.0 140 144 144 144 144 144 144 144 144 147 147 147 147 147 147 147 147 147 147 147 147 147 147 147 147 285 330 15 60 105 150 195 240 285 307.5 330 352.5 15 37.5 60 82.5 105 127.5 150 172.5 195 217.5 240 262.5 285 36.2 124.7 139.1 72 -37.3 -124.7 -139.1 -72 37.
Reference Information KLA-Tencor Confidential Correlating Sensor Coordinates 86-3820 Version-1.
A-4 86-3820 Version-1.
