KT Automation User Guide Global SVQQPSU SFSWJDFT (GSS) Knowledge Services 9022549‐000 AB KLA-Tencor Confidential—Restricted Distribution
KT Automation User Guide Page Intentionally Blank KLA-Tencor Confidential - Restricted Distribution 9022549-000 / AB
KT Automation User Guide is preliminary document is not complete. This document contains significant omissions and inaccuracies. GSS Technical Publications distributes this preliminary draft for review purposes only. Customers and KLA- Customer Service Engineers should not use this document while installing, servicing, or using the KT Automation System. Any input regarding the accuracy of the content of this document is welcome and appreciated. KLA-Tencor Corporation One Technology Drive, Milpitas, CA.
Copyright Copyright © 2016-2017 by KLA-Tencor. All rights reserved worldwide. No part of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA-Tencor, One Technology Drive, Milpitas, California 95035. KLA-Tencor may revise this document at any time without notice.
Table of Contents Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Preface . 1.Introduction 1.1 KT Automation System Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.2 KT Automation System Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.3 KT Automation Missions . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TABLE OF CONTENTS . 3.KT Automation Web UI 3.1 Logging In . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11 3.2 Logging Out. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11 3.3 KT Automation Home Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-12 3.3.1 Equipment Coverage and Usage . . . . . . .
Preface Manual Purpose This User Guide describes: • Hardware components of the KT Automation™ System for KLA-Tencor instrumented test wafers • Setting up the system for automatic missions • Managing inventory • Controlling the KT Automation System • Launching user missions using SensArray® Temperature Wafers and Automation Metrology™ Wafers Manual Structure This manual consists of this preface, 4 sections, and a glossary. Each section is briefly described below: Preface Introduces the manual.
Preface Reference Documentation The following table specifies documents referenced in this manual. Document Number Title 9022547-000 CPG KT Automation System Safety Manual 9022552-000 KT Automation System GEM/SECS Reference Manual Conventions Used in this Manual WARNING Indicates danger to personnel. Includes instructions needed to prevent any damage. CAUTION Indicates danger to Equipment. Includes instructions needed to prevent any damage.
1. Introduction 1.1 KT Automation System Overview The KT Automation System provided by KLA-Tencor automates the use of instrumented wafers in a semiconductor wafer fab. The KT Automation System is used with SensArray temperature wafers and Automation Metrology motion analysis wafers to enable real-time measurement and monitoring of parameters that are critical to fab yield and productivity.
1. Introduction 1.2 KT Automation System Operation KT Automation System Operation The KT Automation System provided by KLA-Tencor is used to deploy and manage instrumented wafers in a semiconductor wafer fab to enable real-time measurement and monitoring of parameters that are critical to fab yield and productivity. Operation is completely automated (see Figure 1-1).
1. Introduction KT Automation Missions arrives at the Automation Station, the host executes another CJ/PJ to process the data (6). The mission results are uploaded to the KT Automation Controller and the Go/No Go results are reported to the host from the Station, per the metrology recipe in effect (7). Figure 1-2: 1.3 KT Automation System Mission Sequence KT Automation Missions There are 3 ways to launch and control KT Automation missions: 1.
1. Introduction 1.4 1.4.1 Regulatory Compliance Statements Regulatory Compliance Statements Prohibitions on Modifications Changes or modifications not expressly approved by KLA Tencor could void the user's authority to operate the equipment. 1.4.2 Class A Digital Device Note: This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to part 15 of the FCC Rules.
2. KT Automation System Hardware Components 2.1 2.1.1 KT Automation Station KT Automation Station Function The KT Automation Station communicates with the KT Automation FOUP to start missions and to extract the results after the missions are completed. The KT Automation Station also recharges the KT Automation FOUP between missions. Figure 2-1 shows the KT Automation Station (including the optional signal tower), with and without a KT Automation FOUP loaded on the station.
2. KT Automation System Hardware Components 2.1.2 KT Automation Station KT Automation Station Indicator Panel LEDs The indicator panel at the front of the top cover (see Figure 2-2) contains all the Automation Station LEDs, as well as the Manual/Auto control button.
2. KT Automation System Hardware Components 2.1.3 KT Automation FOUP KT Automation Station Indicator Panel Manual/Auto Button The Manual/Auto control button is located between the MANUAL and the AUTO LEDs on the KT Automation Station Indicator Panel (see Figure 2-2). The button has two functions: 1. Toggles between Auto mode and Manual mode Press and hold the Manual/Auto control button for 5 seconds to toggle the Automation Station between Auto mode and Manual mode, indicated by the AUTO and MANUAL LEDs.
2. KT Automation System Hardware Components 2.2.2 KT Automation FOUP KT Automation FOUP Indicators and Controls All FOUP indicators and controls are on the rear of the KT Automation FOUP (see Figure 2-4).
2. KT Automation System Hardware Components 2.2.3 2.2.4 KT Automation FOUP KT Automation FOUP Data Storage and Transfer • When the Wafer is back in the Automation FOUP, it automatically transmits the data it collected during the mission to the Automation FOUP. • When the Automation FOUP is placed on the Automation Station, the Automation FOUP automatically transmits the data to the Automation Controller to be stored in the centralized database. • An Automation FOUP can store up to 10 hours of data.
2. KT Automation System Hardware Components 2.2.5 KT Automation FOUP Option: Emulating Occupied KT Automation FOUP Slots An available KT Automation FOUP option is a set of emulation fins for slots that contain any electronics boxes. The fins cause load port wafer mappers to identify those slots as occupied.
3. KT Automation Web UI 3.1 Logging In 1. At the KT Automation login page, select your role (in this example, Administrator is selected). 2. Enter your password. 3. Click Start to log in and go to the Home page (see Section 3.3). 3.2 Logging Out 1. From any page in the KT Automation Web UI, click Logout. The display returns to the KT Automation login page.
3. KT Automation Web UI 3.3 KT Automation Home Page KT Automation Home Page The Home page summarizes the current status of all KT Automation System components, usage, and recent mission alerts. It is the first page that you see after you log on. 1. To return to the Home page from any other KT Automation page, click Home.
3. KT Automation Web UI 3.3.1 KT Automation Home Page Equipment Coverage and Usage The Equipment Coverage & Usage area allows you to view information about the Tools, KT Automation FOUPs, KT Wafers, and KT Automation Stations in the system. The color of the header for each equipment type shows the extent of usage: • Green:High usage (>80%) • Orange:Low usage • Red:Not used 1.
3. KT Automation Web UI KT Automation Home Page 2. To view the statistics for the equipment type, hover the cursor over the image. Equipment Statistics Provided Tools KT Automation FOUPs KT Automation Stations KT Wafers 3.3.
3. KT Automation Web UI 3.3.3 KT Automation Home Page Connected FOUPs The Connected FOUPs area displays all KT Automation FOUPs (carriers) in the system and their statuses. For each FOUP, the following information is displayed: 1. Carrier ID 2. Carrier status 3. Wafer IDs 4.
3. KT Automation Web UI 3.4 Tools Page Tools Page The Tools page displays information about all the tools that were set up in the system (as described in Section 3.5.1 through Section 3.5.4). To view the Tools page, click Tools. NOTE • shows that the last mission that ran on this tool was successful • shows that the last mission that ran on this tool indicated a problem 1.
3. KT Automation Web UI 3.5 Setup Page Setup Page Use the Setup page to add new or edit existing tools and mission recipes. IMPORTANT Mission recipes are added or edited for Automation Metrology Wafers only. See Section 3.8.1 for details of adding or editing recipes. 1. To view the Setup page, click Setup. 3.5.1 Edit or Add Tool IMPORTANT Before you can add a new tool, the applicable tool type and handler type must have been defined in the system (see Section 3.5.2 and Section 3.5.3). 1.
3. KT Automation Web UI Setup Page 3. In the Edit Tool window, enter or select a value for every field. 3 NOTE If you are editing an existing tool, enter or select new values only for those fields that you need to update. 4. Click Save to save the values and close the Edit Tool window. 3.5.2 Edit or Add Tool Type 1. In the Setup page, click Tool Type. 2. Continue as follows: • To edit an existing tool type, click the Edit icon for the tool type. • To add a new tool, click + New Tool Type.
3. KT Automation Web UI Setup Page NOTE If you are editing an existing tool type, enter or select new values only for those fields that you need to update. 3. In the Tool Type Edit window, type a Tool Type Name. IMPORTANT Use an informative name that includes information that will be important for operators to know about the tool. 4. Select the Tool Type Recipe. 5. Continue as follows: 9022549-000/AB If you want to... Then continue with...
3. KT Automation Web UI Setup Page 6. To create a new Tool Type Sequence from scratch, click + New. NOTE Each location that wafers visit within a tool is called a tool station. 7. From the list of available stations, select the first station in the sequence. 8. Continue clicking + New and selecting stations until you have selected every station in the sequence. 9.
3. KT Automation Web UI Setup Page 11. You can modify an existing Tool Type Sequence in any of the following ways: • Change the station where the sequence finishes • Delete a station from the sequence or replace it with a different station • Add another station to the sequence 12. To change the station where the sequence finishes: • Click to deselect the station. Every station in the sequence then displays the option to select it.
3. KT Automation Web UI Setup Page 13. To delete a station from the sequence or replace it with a different station: • Click for that station. • Click Replace station. • To delete the station, click Delete station. • To replace the station, click the station from the list of available station. NOTE The list contains those stations that are set up in the KT Automation System but are not currently used in this Tool Type Sequence. 14.
3. KT Automation Web UI 3.5.3 Setup Page Edit or Add Handler Type NOTE The only parameter that is entered for a Handler Type is the Name. 1. In the Setup page, click Handler Types. 2. Continue as follows: • To edit an existing handler type, click the Edit icon for the handler type. • To add a new handler type, click + New. 3. Type the Name for the handler type.
3. KT Automation Web UI 3.5.4 Setup Page Edit or Add Wafer Sequence NOTE The only parameter that is entered for a Chamber or Station is the Name. 1. In the Setup page, click Wafer Sequence. 2. Continue as follows: • To edit an existing chamber or station, click the Edit icon for the chamber or station. • To add a new chamber, click + New Chamber. • To add a new location, click + New Station. 3. Type the Name for the chamber or station.
3. KT Automation Web UI 3.6 History Page History Page The History page displays information about missions that have run. 1. To view the History page, click History. NOTE 3.7 • shows that the mission ran successfully • shows that the mission did not run successfully Administration Page The Administration page allows those with Administrator-level privileges to remote-connect to KT Automation Stations to perform troubleshooting.
3. KT Automation Web UI 3.8 3.8.1 Automation Metrology Wafer Functions Automation Metrology Wafer Functions Edit or Add an Automation Metrology Wafer Mission Recipe 1. In the Setup page, click Recipes. 2. Click the folder where the recipe you want to edit or add is located. 3. Continue as follows: If you want to... Then continue with... Add a new folder step 4 Edit an existing recipe or add a new recipe step 5 4. To add a new folder: 26 • Click Folder. • Type the Folder Name. • Click Save.
3. KT Automation Web UI Automation Metrology Wafer Functions 5. To edit an existing recipe or add a new recipe: • Click the Edit icon for the recipe, or • Click + New Recipe. NOTE If you are editing an existing recipe, enter or select new values only for those items that you need to update. 6. Type a Recipe Name. 7. Select a Recipe Type. 8. Select the recipe’s Start Trigger (the trigger to start data acquisition).
3. KT Automation Web UI Automation Metrology Wafer Functions 9. If you selected Delay in the previous step, enter the Delay (seconds). 10. Select the recipe’s Stop Trigger (the trigger to stop data acquisition). The following are available stop triggers: Trigger Description Door Close FOUP door closes Duration Data acquisition ends after the specified duration (in seconds) of data acquisition Wafer Return to FOUP Wafer is returned to the FOUP at the end of a tool mission 11.
3. KT Automation Web UI 3.8.2 Automation Metrology Wafer Functions Define and Execute an Automation Metrology Wafer User Mission The User Mission page allows you to define and execute an Automation Metrology Wafer user mission. IMPORTANT Before you can define a mission, the applicable recipes, tools, and carrier IDs must have been defined in the KT Automation system (see Section 3.5 and Section 3.8.1). 1. To view the User Mission page, click User Mission.
3. KT Automation Web UI Automation Metrology Wafer Functions 2. Select the following: • Tool ID of the target tool to be measured by the mission NOTE Tool Type is populated automatically once Tool ID is selected.
3. KT Automation Web UI Automation Metrology Wafer Functions 3. If you want the results of the mission to be reported to the FA Host, click Report to FA Host. 4. Type the Load Port Number of the load port on which the FOUP will be loaded (if applicable to the selected recipe). 5. When you have set up all the mission parameters and loaded the FOUP on the load port, click Execute.
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Glossary Term, acronym, abbreviation 9022549-000/AB Description CID Wafer Carrier ID (serial number contained in RF Pill of FOUP; might also be Lot ID, if written by fab) FA Factory Automation (software- and communications-based control of a semiconductor fab) FOUP Front-Opening Universal Pod (wafer container) GEM Generic Model for Communications and Control of SEMI Equipment GSS Global Support Services (KLA-Tencor Support organization).
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Revision History Revision Date New Rev. Level 10/2016 Changes Made Reviewer Approver AA Initial Issue Avi Zaban Henry Lam AB DCR T35533: Add Regulatory Compliance Statements (Section 1.
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