INSTRUCTION MANUAL FOR MODEL S-3400N SCANNING ELECTRON MICROSCOPE (User’s Operation/Maintenance Edition) Please read through this manual carefully before using the instrument. • Before using the instrument, read the safety instructions and precautions carefully. • Keep this manual in a safe place nearby so it can be referred to whenever needed. Hitachi Science Systems, Ltd. Copyright C Hitachi Science Systems, Ltd. 2004. All rights reserved. Printed in Japan. Part No.
NOTICE: 1. 2. 3. 4. Information contained in this document is subject to change without notice for improvement. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved. No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation.
FOREWORD APPLICATION • The S-3400N SEM utilizes an electron beam accelerated at 300V to 30kV. The instrument is designed mainly for observation and evaluation of specimens prepared for the SEM. • Note that Hitachi Science Systems, Ltd. will not be responsible for injury or damage caused by usage of the instrument in a manner not described in this manual.
Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment. Scope of Instruction Manual This instruction manual comprises the following: 1. 2. 3. 4. 5. 6.
GUARANTEE Period of Guarantee The charge-free guarantee period is one year from the date of installation. Details of Guarantee (a) The instrument will be repaired free of charge if it malfunctions due to a defect in manufacture within the charge-free guarantee period. (b) Note that a substitute part may be used for repair, or replacement with an equivalent product may be made instead of repair.
GUARANTEE (i) Failure of instrument or damage of basic software, application software or other data due to a computer virus. (j) Failure of the PC used with the instrument or damage to basic software, application software and/or data because of momentary voltage drop caused by lightning or power interruption.
INSTALLATION AND AFTER-SALES SERVICE Installation • Only the persons who have been trained by a certified engineer of the manufacturer are allowed to carry out the installation work • Before installation, refer to section 1 and prepare the necessary utilities. • Installation at another place after delivery will be provided at charge. nearest Hitachi service representative for details.
Available Training Programs Hitachi service offers various kinds of training programs at its own facilities or at the user's site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them. Applicants will be charged.
For Safe Handling For Safe Handling Before operating the machine, read the following instructions carefully. Safety precautions are indicated with the following headings , words “Danger”, “Warning”, and combining the alert symbol “Caution”, and heading words: : This safety alert symbol calls the user’s attention to a danger that can potentially be injurious to people. To avoid the hazard, or even death, that can occur, all safety messages following the symbol must be heeded.
For Safe Handling General Precautions on Safety Before Using the System ■ Before using this product, read the operating manual careful and be sure to understand its contents. ■ The operating manual should be kept in a safe place near you for ready access and reference. ■ The system should be handled according to the procedures given in this manual. ■ Be sure to understand the safety-related instructions provided in this manual and heed them.
For Safe Handling General Precautions on Safety (cont’d) Precautions on Using the System ■ When leaving the system unattended, turn off the acceleration voltage. ■ If abnormal conditions arise when the system is being used, such as abnormal noise, noxious odor, fumes, or gas leakage, immediately shut off the power, shut the master gas valve, and take any other safety measures that the situation may dictate, and call the HS Service Department.
For Safe Handling Warnings in the Operating Manual Warnings provided in this manual and where they occur are summarized below. ● This system does not have components that require signs. Danger Warning Indicators ● Burns from the Rotary Pump ■ If it stops abnormally the rotary pump remains hot. Touching it can cause burns. Do not touch the rotary pump in the event of an abnormal stoppage.
For Safe Handling Warning Indicators (cont’d) ● Injury from Splashing Compressor Drain ■ The inside of the compressor tank is pressurized. When draining off the compressor, jerky motion can cause the liquid to splash, causing eye injuries. When draining off the compressor, do not stand directly in front of the drain. Turn the drain cock slowly.
For Safe Handling Caution Indicators ● Fatigue due to Long Hours of Operation ■ In operating the system while viewing the display, looking at the display for long hours at the same posture can build up fatigue in the eyes or body. For your health, when operating the system for long hours, take a break 10 to 15 minutes every hour or so to rest your eyes and body. (Chapter 3 Operation) ● Injury from Lifting Heavy Objects ■ The goniometer (stage) is a heavy object.
For Safe Handling Caution Indicators (cont’d) ● Burns from Touching the Heated Aperture Plates ■ Heated aperture plates after baking are hot. Touching it can cause burns. Do not touch the heated aperture plates heated with bare hands.
For Safe Handling System Warning Labels Safety pages 7 to 10 show Warning labels that are affixed to the S-3400N. The contents of the warning labels should be checked against the actual equipment. Warning labels should be checked, cleaned, and maintained from time to time so that they are clearly visible from a safe distance. If warning labels fade and become difficult to read due to aging, call the nearest Service Department for replacement.
For Safe Handling （Right side view） (Rear view) Warning Label Pasting Locations on System Unit SAFETY - 9
For Safe Handling Warning Labels Pasting Locations on Rotary Pump Motion shielding weight Compressor （Top view） (Back view） Warning Label Pasting Locations on Weight/Compressor SAFETY - 10
(Front view) SAFETY - 11 Warning Label Pasting Locations Display Unit (Left side view) For Safe Handling
For Safe Handling Precautions for Proper Operation ― Precautions for the Proper Operation of the S-3400N ― About Electricity (a) Single-phase AC 100 V(±10%), 50/60 Hz, 2 kVA (for main unit).When the supplied power line voltage is 100 V, the instrument works by direct connection. When the supplied power line voltage is other than 100 V (200 V or others), use a step down transformer to step the power line voltage down to 100 V.
For Safe Handling Precautions on Proper Operation (cont’d) Third Party’s Industrial or Proprietary Rights Hitachi Science Systems, Ltd. shall not be responsible for a third party’s claim regarding infringement of any patent rights or industrial properties with respect either to products manufactured through the use of equipment supplied by Hitachi or its related companies or to applications of the Hitachi equipment.
For Safe Handling Precautions on Proper Operation (cont’d) Backup of Important Data Trouble-free operation cannot be guaranteed for the computer system. You are recommended to copy important data on the hard disk into floppy disks (FD) or magneto-optical disks (MO) at a regular interval About Computer Applications Software Other applications software should not be installed on the PC that is a part of this system.
For Safe Handling Precautions on Proper Operation (cont’d) About Changes in Computer Settings Do not change the following system settings of your PC. These are set up at the optimum conditions for operation of the S-3400N SEM before shipping. (a) Connection to the USB ports This instrument uses a USB port for communication between the PC and the internal microprocessor. The USB port number 1 is assigned to the instrument.
For Safe Handling (e) Power Saving mode Do not use the Power Saving mode. It will cause trouble in communication between the PC and internal microprocessor. (f) Virtual memory setting Do not change the virtual memory setting. (g) Any saved image data is subject to control by SEM data Manager. Image files should not be renamed or deleted by using Windows File Manager or Windows Explorer.
For Safe Handling Precautions on Proper Operation (cont’d) OS Operation during S-3400N SEM Operation Although the Windows Task Manager can be launched from the Taskbar or by Ctrl+Alt+Del key operation, if Standby or Halt mode is set or logged-off while the S-3400N control program is running, it will not work normally when recovered from such a status. Close S-3400N control program if setting of such mode is necessary. USB Devices When connecting USB devices such as external storage unit, printer etc.
For Safe Handling Precautions on Proper Operation (cont’d) Network Connection The PC is equipped with Ethernet ports for network connectivity. Performing a network connection using the Ethernet requires extensive knowledge of the network environment. Such a connection should be undertaken in consultation with the Network Administrator. (1) Connecting a cable to an Ethernet port is carried out by Hitachi Science installation engineers or service engineers.
For Safe Handling Precautions on Proper Operation (cont’d) Using Other Windows Applications Running non-SEM Windows applications (especially the Printer or Internet Explorer) during a SEM operation, especially image capture, transfer of saved. Personal Computer (PC) Do not turn off the PC power independently. If the PC power is turned off during access to hard disk or floppy disk, the PC or data and programs stored therein may be damaged.
For Safe Handling Precautions on Proper Operation (cont’d) Transportation and Relocation of Instrument (a) The transport of the system, which carries considerable risk, should never be attempted by a customer. Any system transport should be performed with the assistance and supervision of Hitachi-approved engineers. (b) Do not lift the instrument by holding the table. The strength of table fitting is not sufficient for bearing the weight of display unit, approximately 120 kg.
Additional Information of PC Setting Setting of Windows (r) XP Professional Service Pack2 in S-3400N 1. Outline As of February 2005, OS of the personal computer for the PC-SEM control is Windows XP Professional Service Pack2 (SP2). In SP2, a security function is strengthening in addition to accumulation of the correction program published in the past. The setting of SP2 when PC-SEM is shipped from factory is described as follows.
The Windows Firewall is set as shown in the figure below. To restore all Windows Firewall settings to a default state, select the Advanced tab and click the Restore Defaults button. Fig.
2.2 Automatic Updates (1) Click Automatic Updates in the Windows Security Center window or click the Automatic Updates tab in the System dialog. Fig. 3 The Windows Security Center Window (2) Select "Notify me but don't automatically download or install them." Fig.
2.3 Virus Protection The anti-virus software is not installed. In SP2, if the anti-virus software is not installed or the date of the virus definitions file is old, message is displayed when OS starts. When the instrument is shipped from factory, the Virus Protection setting is set as follows so that the message is not displayed. (1) Click the Recommendations button in the Windows Security Center window. Fig.
We have tested the following anti-virus software that install in the personal computer of PC-SEM, and confirmed that the SEM control software operates correctly (as of February 2005). Symantec Norton Anti Virus 2004 Symantec Norton Anti Virus 2005 Our company doesn't support above-mentioned anti-virus software. The user is requested to prepare a proper Computer viruses protection on his or her own responsibility with consulting to the network administrator.
(3) Appearance tab Windows and buttons: Windows XP style Color scheme: Default (blue) Effects: (Click the Effects button): do not check "Use the following method to smooth edges of screen fonts." (If it is checked, when the SEM image with a high brightness is displayed, the character of the data display becomes hard to see.) (4) Settings tab Screen resolution: 1280 by 1024 pixels Color quality: Highest (32bit) Monitor refresh rate (Click the Advanced button, and select the Monitor tab): 60Hz (LCD) 3.
3.4 Setting of Taskbar When the instrument is shipped from factory, the setting of the taskbar is set for the following. There is no influence in the operation of the SEM software even if this setting changes. (1) Taskbar (Right-click on the taskbar and select Properties): Check "Auto-hide the taskbar" (2) Start Menu (Select the Start tab in the Taskbar and [Start] Properties)：Select "Start menu" 3.5 Setting of BIOS Note that the setting of BIOS might be different in each model of PC.
Table of Contents FOREWORD ....................................................................................................... FOREWORD - 1 Scope of Instruction Manual ......................................................................... FOREWORD - 2 Acronyms...................................................................................................... FOREWORD - 2 GUARANTEE ......................................................................................................
1 SPECIFICATIONS AND INSTALLATION REQUIREMENTS .........................................1 - 1 1.1 Specifications ........................................................................................................1 - 1 1.1.1 Resolution ................................................................................................1 - 1 1.1.2 Magnification............................................................................................1 - 1 1.1.3 Electron Optical System.......................
2.3.7 2.3.8 2.3.9 2.3.10 2.3.11 2.3.12 2.3.13 2.3.14 2.3.15 2.3.16 2.3.17 2.3.18 2.3.19 2.3.20 2.3.6.2 Electron Gun Control Unit ........................................................2 - 26 2.3.6.3 Scan Control Windows.............................................................2 - 27 2.3.6.4 Auto Control .............................................................................2 - 28 2.3.6.5 Magnification Control................................................................2 - 30 2.3.6.
3 OPERATION ..................................................................................................................3 - 1 3.1 Starting the System ...............................................................................................3 - 2 3.1.1 Start-up Confirmation Items .....................................................................3 - 2 3.1.2 Startup Operation.....................................................................................3 - 2 3.2 Mounting a Specimen .......
3.5.7 3.6 3.7 3.8 3.9 Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage) ....3 - 57 3.5.7.1 Coordinate Notation ...............................................................3 - 57 3.5.7.2 Movable Range and Specimen Exchange Position ................3 - 58 3.5.7.3 Setting Specimen Size and Detectors in Use .........................3 - 60 3.5.7.4 Operation Methods Used to Move the Specimen Stage .........3 - 61 3.5.7.5 X, Y, R Axis Operation ..............................................
3.9.7 Pseudo Color Display.............................................................................3 - 129 3.9.8 Data Entry Function ...............................................................................3 - 130 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation .......................3 - 134 3.9.10 Printing Images Using Report Generation Function ...............................3 - 136 3.9.11 Copy Image......................................................................................
4.2 4.3 4.4 4.5 4.6 4.7 4.8 4.1.3 Maintenance for the Orifice Unit...............................................................4 - 10 4.1.4 Maintenance for the Condenser Aperture ................................................4 - 15 4.1.5 Cleaning of Aperture Plates .....................................................................4 - 19 4.1.6 Ultrasonic Cleaning with Organic Solvent.................................................4 - 20 4.1.7 Replacement of Scintillator...........................
6.3.1 6.4 About the External Communication of S-3400N .......................................6 - 10 6.3.1.1 Communication Procedure.......................................................6 - 10 6.3.1.2 Function and Limitation ............................................................6 - 10 6.3.2 Each Command .......................................................................................6 - 11 6.3.2.1 Initialize the Communication.....................................................6 - 16 6.3.2.
6.4.5.2 6.4.5.3 6.4.5.4 6.4.5.5 6.4.5.6 6.4.5.7 Display of SEM Image............................................................6 - 82 Start of CD Measurement Function ........................................6 - 83 Setting Measurement Parameters..........................................6 - 84 Calibration..............................................................................6 - 86 Measurement Operation.........................................................6 - 91 Recording Measured Data ............
1.1.1 1. 1.1 1.1.1 SPECIFICATIONS AND INSTALLATION REQUIREMENTS Specifications Resolution Secondary electron image resolution: 3.0 nm (30 kV acceleration voltage, in high vacuum mode) 10 nm (3 kV acceleration voltage, in high vacuum mode) Backscattered electron image resolution: 4.0 nm (30 kV acceleration voltage, in low vacuum mode) 1.1.2 Magnification 5x to 300,000x (Highest and lowest magnifications are dependent upon accelerating voltage, WD and scan speed.) 1.1.
1.1 Specifications 1.1.
1.1.6 Scanning mode: TV/FAST Slow Reduced area (320 x 240 pixels) Waveform display Split screen/dual mag mode High-definition capture (5120 x 3840 pixels maximum) Frame integration capture (2560 x 1920 pixels maximum) Scanning speed: TV scanning (640 x 480 pixel display: 25/30* frames/s) FAST scanning (full screen display: 6.3/7.5* frames/s) Slow scanning (full screen display: 1, 4, 20/16, 40/32, 80/64* s/frame) (640 x 480 pixel display： 0.
1.
1.2.1 1.2 Installation Requirements Only the persons who have been trained by a certified engineer of the manufacturer are allowed to carry out the installation work described below. 1.2.1 General The following places or conditions should be avoided for installation of the instrument.: (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) 1.2.2 Room adjacent to a transformer room Room adjacent to an elevator Location near large power-consuming equipment (e.g.
1.2 Installation Requirements NOTICE: (a) (b) (c) (d) Line power fluctuation should be slow, and no abrupt fluctuation is allowable. Allowable line voltage fluctuation is ±10 % max. This instrument over-voltage category is "CAT.II". The instrument provides Main ELB of the following type. Leakage current breaker (CE conforming) Rated current : 20 A Trip current : 30 mA Short-circuit interrupting capacity : 5 kA (Not be connected to supplies capable of delivering more than 5 kA.
1.2.5 1.2.5 Stray Magnetic Field Image disturbance will be negligible when the stray magnetic field conditions shown in Tables 1.2-1 are satisfied at the instrument installation place. Before proceeding to installation, check the stray magnetic field conditions as required. Make sure that the conditions shown in the tables are satisfied.
1.2 Installation Requirements Amount of distortion (a) Fig. 1.2-1 Image expansion/contraction Image distortion Effect of Stray Magnetic Field Component Synchronous with Power Frequency (AC magnetic field) C A A B C B (a) Appearance of image disturbance Fig. 1.
1.2.5 Table 1.2-1 Resolution Guaranteeing Conditions Accelerating voltage Magnification WD Beam : 3 kV : ×30,000 : 5.0 mm : 10 Accelerating voltage Magnification WD Beam : 30 kV : ×100,000 : 5.0 mm : 0 Allowable Stray Magnetic Field AC magnetic Field (rms value) DC magnetic Field Variation (peak to peak) Horizontal Direction Vertical Direction Horizontal Direction Vertical Direction 140 nT 730 nT 160 nT 820 nT 200 nT 640 nT 230 nT 720 nT nT: nano-tesla NOTICE: 1. 2. 3. 4. 5. 6. 7.
1.2 Installation Requirements 1.2.6 Vibrations Before installing the instrument, measure floor vibration at the site. Image trouble will not occur if the allowable values in Table 1.2-2 are satisfied under the resolution/photographing conditions.
1.2.7 Type II Stage Allowable Value (high-frequency region) Frequency X, Y, Z-direction 10.0 Hz 50.0 Hz 60.0 Hz 1.0 cm/s2 max. 2 2.0 cm/s max. 2.0 cm/s2 max. 2 Acceleration 4 cm/s (gal) is the same as amplitude 10 µm p-p in the frequency 10 Hz. The allowable values is the value at the prescribed image disturbance of 0.2 mm and at the X 100,000 in photograph. NOTICE: 1. 2. 3. 4. 5. 1.2.7 A sine wave should be used for vibration measurement.
1.2 Installation Requirements Table 1.
1.2.8 1.2.8 Disturbance by Sound Waves Sound waves (vibrations of air) adversely affect the Model S-3400N regardless of their frequency and may cause image trouble. To prevent this, confirm before installation that equipment that may cause a sonic disturbance is not located in the vicinity of the S-3400N. If such equipment exists, then check for noise level.
Installation Requirements (2) Minimum required dimensions of the entrance 0.85 m (W) ×1.7 m (H) (3) Required strength of the floor floor strength (N / m2 ) total mass of equipment (kg) × 9.8 ≧ 3 florr space (m 2 ) (4) Other For layout, see Figure 1.2-3. Rotary Pump 526 800 800 Power cable 10 m Display unit Main unit 850 700 500 or longer 1550 2200 or longer 230 Air Compressor 500 or longer Weight 400 225 1.
1.3 1.3 Customer-supplied Items The items listed in Table 1.3-1 should be procured prior to the installation work. Table 1.
2 2. FUNCTIONS This chapter explains the mechanical configuration of the S-3400N SEM and describes its software. Figures 2-1a and 2-1b show the appearance of the Model S-3400N Type I and Type II. Display unit Main unit Fig. 2-1 (a) Model S-3400N Scanning Electron Microscope, Type I Fig.
2.1 Control Knobs and Switches on Main Unit 2.1 Control Knobs and Switches on Main Unit 2.1.1 Main Unit Figure 2.1-1 shows the appearance of the S-3400N main unit (Type II). Electron Gun Condenser Lens Adjustment Screws (8 places) Specimen Stage (Photo: Type II stage) Column Objective Lens Movable Aperture AIR Switch Specimen Chamber EVAC Switch TrackBall Type II stage accessory Key Switch (Power switch) EVAC Panel Fig. 2.
2.1.2 2.1.2 Electron Optical Column Figure 2.1-2 sketches the sectional view of the S-3400N column. Electron Gun Pre-centered cartridge type Tungsten hairpin filament 1st Condenser Lens Beam Alignment coils Specimen Stage 2nd Condenser Lens Objective Lens Movable Aperture Deflection Coil Objective Lens SE Detector Specimen Specimen Stab Specimen Chamber BSE Detector Fig. 2.
2.1 Control Knobs and Switches on Main Unit 2.1.3 Specimen Stage (Type I) Figure 2.1-3 shows the Type I specimen stage. [R] control [T] control Touch Sensor and Absorbed Current Terminal [X] control [Z] control [Y] control Fig. 2.1-3 Specimen Stage (Type I) • [X] control: Moves specimen in X direction within a range from 0 to 80 mm. • [Y] control: Moves specimen in Y direction within a range from 0 to 40 mm.
2.1.4 2.1.4 Specimen Stage (Type II) Figure 2.1-4 shows the appearance of specimen stage driven by motors (Type II). Absorbed current measuring terminal (normally used as a touch sensor terminal) Fig. 2.
2.1 Control Knobs and Switches on Main Unit 2.1.5 EVAC Panel Figure 2.1-5 shows the EVAC panel. EVAC Switch/light N-MODE Light AIR Switch/light Key Switch PUMP Light Fig. 2.1-5 • Key switch: EVAC Panel The POWER for the system unit. Insert the key and turn it to the START position to start the system. Releasing the key stops the key at the ON position. Returning the key to the OFF position shuts down the system in a few seconds.
2.1.6 2.1.6 Evacuation System Figure 2.1-6 shows the block diagram of evacuating system. S.E.C (OPTION) GV Pi-EX V5 NV Pi-2 V9 V4 V2 V8 V6 V1 Pi-1 V10 V7 V3 TMP VALVE 状態検知 Fig. 2.1-6 TMP: RP: V1-V7: NV: Pi.1: Pi.2: R.P 1 / R.
2.1 Control Knobs and Switches on Main Unit 2.1.7 System Power Distribution Board Figure 2.1-7 shows an external view of the system distribution board located in the back of the main unit. MAIN ELB Fig. 2.1-7 FFB1 STAGE FFB2 DISPLAY System Power Distribution Board • MAIN ELB: Main breaker. At starting turn it ON. Turn it OFF for a complete shutdown. • FFB1 STAGE: Breaker for the power for the Type II stage control unit.
2.2.1 2.2 Control Knobs and Switches on Display Unit 2.2.1 Display Console Figure 2.2-1 shows the display unit. Monitor Display Keyboard Manual Operation Panel Mouse PC (inside the door) Fig. 2.2-1 Display Unit • PC: SEM control personal computer. • Monitor display: Display monitor of PC. For adjustment of the monitor, refer to instruction manual of the monitor. Model of the monitor display is subject to change without notice. Placed inside of the door.
2.2 Control Knobs and Switches on Display Unit 2.2.2 PC (Personal Computer) Figure 2.2-2 shows the front part of the control PC. (Because PCs undergo frequent model changes, the photograph below may not be the same as the model that is actually delivered.) CD-ROM Drive Unit FD Drive Unit PC Power Switch Power Lamp Hard Disk Accessing Lamp Fig. 2.2-2 PC Panel • PC power switch: Power switch of PC. Usually the switch need not be used.
2.2.3 2.2.3 Manual Operation Panel Figure 2.2-3 shows the manual operation panel. Brightness/Contrast Adjusting Section Magnification/Image Shift Control Section Stigma/alignment Adjusting Section Fig. 2.2-3 Focus Adjusting Section Manual Operation Panel • Stigma/alignment adjusting section [Stigma/alignment] [X], [Y] knobs: Use for astigmatism correction in a usual practice manual mode. In the electron optics alignment mode, these knobs serve for alignment adjustment.
2.2 Control Knobs and Switches on Display Unit 2.2.4 Mouse and Trackball Figure 2.2-4 shows the mouse. The mouse has an additional two side buttons, S and E button. Right Button Left Button Wheel and Wheel Button Fig. 2.2-4 Mouse Figure 2.2-5 shows the trackball unit. It is used for stage X and Y-axis manual operation of Type II model. Direction Switch Ball Fig. 2.2-5 • Ball: Trackball Unit The field of view modes in the direction in which the ball is rotated.
2.3.1 2.3 2.3.1 Graphical User Interface (GUI) Starting the PC and Logging in the S-3400 Program Use the following steps to logon to Windows XP. (1) Starting up the PC Use the key switch to turn on the system and star it. The PC will also start up automatically. (2) Logon A message requesting key in will appear. Press Ctrl, Alt and Delete keys simultaneously. (This request message will be shown or not depending on network setting of SEM computer.) Then the Windows XP logon dialog window will appear.
2.3 Graphical User Interface (GUI) Fig. 2.3-1 (Windows XP (R) Example of Windows Desktop is a trademark of Microsoft Corp.) The S-3400 login dialog window will open. Fig. 2.3-2 S-3400N Login Dialog Window At the first startup after installation of the program, use the login name "S-3400" and click the OK button. You need no Password. After login names and passwords have been set, input the name and the password and then click the OK button.
2.3.2 2.3.2 S-3400N SEM Main Window Figure 2.3-3 shows the main window for operation of the microscope. Control Panel Minimize Button Menu Bar Title Bar Size Button Close Button Operation Panel Fig. 2.3-3 • Title bar: S-3400N Main Window (Full screen display) Shows the window title. • Minimize button: Minimizes the window size. Task bar. The window is iconized and placed on the • Size button: The window status becomes Normal type. You can change the window size.
2.3 Graphical User Interface (GUI) • Operation panel: The button hides the panel, and alternate shows it again. Position of the panel can be moved to left or right side with and buttons. The display position can be moved to the right or left edge by using the , buttons. The button can be used to specify whether the panel is to be on all the time. If the thumb tack ( ) is off, the Operation Panel automatically turns off when the mouse cursor moves away from the Operation Panel.
2.3.3 2.3.3 Control Arrangement on the Window Operation tools are placed as follows. (1) Control panel Most frequently used controls are placed on it. (2) Operation panel The Operation Panel is comprised of four tabs: Cond., Image, Utility, and Stage. • < Cond tab > Scanning controls, and electron optical column controls are placed on it. • < Image tab > Principally controls related to image size and detector settings are provided. • < Stage tab > It has stage operation controls for type II model.
2.3 Graphical User Interface (GUI) (6) Shortcut keys Some shortcut keys are specified. Refer to <2.3.20 Using Short-cut Keys>. 2.3.4 Menus The menu bar includes the following menus and commands. (1) File menu: The File menu includes commands for opening SEM Data Manager, saving files, photo recording, and image printing. • Open SEM Data Manager: Opens the SEM Data Manager window. Refer to <3.11 Using SEM Data Manager >. • Direct Save: Opens the Save Image dialog window.
2.3.4 • Exit (2) Closes SEM operation. Edit menu: The Edit menu includes commands for copying viewing images and attributes to the Windows clipboard. • Copy Image: Copies viewing images to the Windows clipboard. Refer to < 3.9.11 Copy Image>. • Copy Attribute: Copies information on viewing images to the Windows clipboard. Refer to < 3.9.12 Copy Image Information Text>. (3) Setup menu: Commands for setting system operating conditions. • Optics Setup: Opens the Optics tab of the Setup dialog window.
2.3 Graphical User Interface (GUI) • Filament Image: Displays the Filament Image window. This button is used to perform appropriate image adjustments using a filament image. Normally this function is not used by customers. • Image Adjustment: Displays the Image Adjustment window. This button permits the performance of basic adjustment operations, such as focusing and stigma compensation. • ABCC: Executes automatic brightness and contrast control. Refer to <3.5.
2.3.4 • Scan Mode: (6) Selects the size of scanning image display (Screen mode) from Full, Dual and Small. Refer to <3.9.1 Screen Mode>. Image menu: The Image menu includes commands for signal processing of optional detectors. • Opt. Signal Processing: Opens the Opt Signal Processing dialog window. Refer to <3.9.5 Signal Processing>. • Show Histogram: Displays a histogram of the image being observed. See <3.5.4 Image Brightness and Contrast Adjustment>.
2.3 Graphical User Interface (GUI) • Optional Setup- Mouse Operation: Opens Mouse tab of the Optional Setup dialog window. Use for setting sensitivity of mouse operation. Refer to <3.9.14 Optional Setting>. • Optional Setup- General: Opens General tab of the Optional Setup dialog window. Use for setting various operation parameters. Refer to <3.9.14 Optional Setting>. • Optional Setup- Evacuation: Displays the Evacuation tab on the Optional Setup window. Sets the Evacuation mode for startup.
2.3.4 (9) Window menu: The Window menu includes commands for opening the Captured Image window, and others. • Captured Image: Opens the Captured Image window. Refer to <2.3.10 Captured Image Window>. • Close All: Closes all dialog windows except for the Scanning Image window. (10) Undo menu: Returns to the status prior to conducting the following operation.
2.3 Graphical User Interface (GUI) 2.3.5 Popup Menu Click the center (wheel) button of the mouse on the image area to open the Popup menu. The Popup menu includes frequently used commands and changes depending on present status (scan is running or frozen). (scanning) Fig. 2.3-5 (frozen) An Example of Popup Menu (1) Open when scanning • • • • • • • • • • • • • • Freeze: Capture: Photo: ABCC: Auto Focus: Auto Stigma and Focus: Scan Speed: Stage Register: Freezes scanning. Starts image capturing.
2.3.5 (2) Open when frozen • RUN: Runs scanning. • Memory Photo: Photographs a frozen image (optional). • Layout Print: Opens the Report Generation dialog window. viewing images. • PCI transfer : Transfers a frozen image to the PC.
2.3 Graphical User Interface (GUI) 2.3.6 Control Panel Contains the most frequently used controls such as for image observation, and image recording. Usual operation can be performed using the Control Panel and the Manual Operation Panel. 2.3.6.1 Functional Windows on the Control Panel Electron gun control Scan control Image recording Stage control Auto control/Monitoring function Magnification control Fig. 2.3-6 2.3.6.
2.3.6 2.3.6.3 Scan Control Windows Fig. 2.3-8 Scan Control Block (1) Run button when scanning and changes to Used to run or freeze scanning. The button is at while scan is frozen. To stop scanning, click the button. Scanning continues until it reaches the end of the frame and then stops. During this time, the display in the upper left section of the image shows "Going to Freeze", and after the image stops, the displays shows "Freeze".
2.3 Graphical User Interface (GUI) 2.3.6.4 Auto Control Fig. 2.3-10 Auto Control (1) ABCC Starts auto brightness/contrast control (ABCC). If the results of ABCC are not adequate, you can change the reference brightness and contrast in the Image tab of the Setup dialog window. ABCC is applicable to SE and BSE signal. (2) AFC Starts Auto Focus Control. When magnification is lower than 5,000×, coarse focus (search using a wide focus range) is carried out.
2.3.6 (5) Monit Waveform monitor mode is activated. The Focus monitor and B/C monitor modes are set alternately by clicking the button. At the first click, a waveform is displayed for monitoring the focus. The magnification is set at 1,000×. Focus the image so that the waveform shows sharp peaks. The next click changes the mode to B/C monitor. A waveform and reference lines are displayed for monitoring contrast (amplitude of the waveform) and brightness (vertical level of the waveform).
2.3 Graphical User Interface (GUI) 2.3.6.5 Magnification Control Fig. 2.3-13 Magnification Control (1) Magnification indicator Window Indicates magnification. In this window, moving the mouse while holding down the left or right button changes magnification. To increase magnification, drag the mouse to the right. To decrease it, drag to the left. For coarse changes, press the right button and for fine changes, the left button.
2.3.6 2.3.6.6 Capture Control This block is used to capture images. Fig. 2.3-15 Capture Control Unit Captures an image with pre-specified image resolution and scanning speed. Displayed figures on the capture button (the number 640 in the above example) indicates the button on the resolution of the captured image.
2.3 Graphical User Interface (GUI) • Scan speed unlinked mode Fig. 2.3-17 Scan Speed Unlinked Mode Setting Irrespective of the scanning speed currently in effect, the system captures images using a specified scanning speed, Resolution, and Speed/Integration. Select one of TV, Fast, and Slow, and set the Resolution and Speed/Integration. If an image cannot be captured using specified conditions, either the displayed image size changes or a message comes up.
2.3.6 2.3.6.7 Image Recording Control This block allows you to record captured images. Fig. 2.3-19 Image Recording Control Recording function buttons Of the recording functions to be used, three functions can be assigned to three buttons here. The following seven recording functions are available: Direct Save: Opens the Save Image dialog window. to a disk. Use it for saving viewing images Quick Save: Saves the currently displayed image under a pre-defined file name.
2.3 Graphical User Interface (GUI) Clicking File - Assignment Record Buttons or clicking the button on the Image Recording Control button or right-clicking the Image Recording Control button brings up a Setup window, as shown below. From this window, functions can be assigned to three buttons: Fig. 2.
2.3.6 2.3.6.8 EVAC/AIR Control Fig. 2.3-21 EVAC/AIR Control Clicking the EVAC button initiates the evacuation of the specimen chamber. Similarly, clicking the AIR button causes the AIR processing of the specimen chamber. The display window to the left of the EVAC button lights up when the specimen chamber is in the EVAC state; it blinks when the EVAC process is in progress; and in other cases it remains off.
2.3 Graphical User Interface (GUI) 2.3.6.9 Stage Control （With Type II 5-axis motor-drive stage） Fig. 2.3-22 Stage Control (1) HOME Z10 button Moves the stage to the Exchange Position (X＝60 mm, Y＝25 mm, R＝0°, T＝0°, Z＝10 mm). If the stage is in the Exchange position (the Z-axis at 10 mm), the display window on the left side of the button is in blue. (2) HOME Z65 button Moves the stage to the Exchange Position (X＝60 mm, Y＝25 mm, R＝0°, T＝0°, Z＝65 mm).
2.3.6 2.3.6.10 Extension for Dual Screen Mode When the screen mode is Dual, the control panel is extended as follows. Fig. 2.3-23 Control Panel (Dual screen mode) (1) Right-and-left dual control The Run/Freeze, Capture, Recording, and detector selection control buttons are available in right-left configurations. By using these buttons, you can control right and left actions independently.
2.3 Graphical User Interface (GUI) 2.3.7 Operation Panel The Operation Panel is comprised of four tabs. The Cond., Image, and Utility tabs relate to SEM operations. On each tab, control view/hide can be specified on a user-to-user basis. The Stage tab is for operating the stage. This tab is displayed when the available stage is a Type II stage (with a 5-axis motor drive). The following explains the functions of the blocks that appear on the Cond., Image, and Utility tabs.
2.3.7 2.3.7.1 ELECTRON BEAM Window This block allows you to turn the accelerating voltage on and off, and to set the probe current. Vacc selection box Vacc micro adjustment button Vacc ON/OFF button Probe current selection box Probe current micro adjustment button Probe current setting slider Fig. 2.
2.3 Graphical User Interface (GUI) 2.3.7.2 Focusing Position (WD) WORKING DISTANCE Window This block allows you to set a focusing position. WD setup/display box WD micro adjustment button WD setting slider Analysis position setting button Fig. 2.3-26 Focusing Position (WD) Window (1) WD setup/display window This window displays the current working distance (the focusing position calculated from the lens current).
2.3.7 2.3.7.3 VACUUM MODE Window This window can be used to switch vacuum modes and set a vacuum level. Vacuum mode selection control Vacuum level display area Vacuum level setting control Fig. 2.3-27 VACUUM MODE Window (1) Vacuum mode selection control This control switches between the VP-SEM and SEM modes. If the VP-SEM mode is selected, the vacuum level is set to the level specified in the Setting Vacuum option in the block.
2.3 Graphical User Interface (GUI) 2.3.7.4 SCAN MODE Window This window sets the Scan Mode. Fig. 2.3-28 Scan mode button Norm Line Spot Area SCAN MODE Block (1) Norm Image observation mode (2) Line Displays a line profile of the signal intensity as a horizontal line in the observed image. This control toggles between the 1 (position setting) and 2 (line analysis) modes. (3) Spot Stops the scanning and places the electron beam at a specified point on the image.
2.3.7 2.3.7.5 CONDITION LOAD/SAVE Window This window calls and saves observation conditions and executes the operating guides. Fig. 2.3-29 CONDITION LOAD/SAVE Window (1) Load button This button opens the Op. Cond. tab on the Setup window in the Load mode. (2) Save This button opens the Op. Cond. tab on the Setup window in the Save mode. (3) Guide This button opens the Operation Guide window. 2.3.7.6 SCREEN MODE Window Selects a screen mode. Fig. 2.
2.3 Graphical User Interface (GUI) 2.3.7.7 DETECTOR Window This window switches and controls detectors. Detector selection control ABCC link check box Detector control area Fig. 2.3-31 DETECTOR Window (1) Detector selection control This control switches detectors. (2) ABCC link check box If this box is checked, switching detectors automatically executes ABCC. With the BSE selected, switching the BSE mode or modifying gains also automatically executes ABCC.
2.3.7 2.3.7.9 R.ROTATION Window The raster rotation rotates the direction of the displayed image by rotating the scanning direction of the electron beam. Rotation ON/OFF check box Rotation angle display/set box Angle micro adjustment button 90° step rotation button Angle setting slider Fig. 2.3-33 R.ROTATION Window (1) Rotation ON/OFF check box Clicking this box and placing a checkmark on it enables raster rotation. (2) Rotation angle display/set box This box displays the current angle of rotation.
2.3 Graphical User Interface (GUI) 2.3.7.10 SIGNAL PROCESSING Window Applies real time digital image processing to the scanning image. Processing selection box Intensity selection box Fig. 2.3-34 SIGNAL PROCESSING Window (1) Processing selection box Selects a processing. • Smooth: Applies pixel averaging spatial filtering. Reduces snow noise. Effective especially in case of high magnification image where the beam spot size is larger than pixel size.
2.3.7 2.3.7.11 DATA ENTRY Window Use for drawing texts and graphics on the scanning image. Fig. 2.3-35 Refer to <3.9.8 2.3.7.12 DATA ENTRY Window Data Entry Function>. TILT COMPENSATION Window Specimen tilting causes defocusing and magnification change in the tilt direction. Tilt compensation is the tool to correct the two phenomena.
2.3 Graphical User Interface (GUI) (2) Tilt compensation Tilting the specimen causes the specimen to be viewed from a tilted direction such that the specimen appears shrunk in the direction of tilt. The tilt compensation function corrects this factor so that the magnification in the direction of tilt will be equal to the situation where there is no tilt. Checking the Tilt Comp. check box enables this function.
2.3.8 2.3.8 Mouse Operation on the Scanning Image Mouse operation tools for adjusting focus, stigma, contrast, brightness and specimen stage are provided. 2.3.8.
2.3 Graphical User Interface (GUI) Area: Coarse focus adjustment: move mouse horizontally while pressing down right button. Fine focus adjustment: move mouse horizontally while pressing down left button. Area: Stigma adjustment (X): Stigma adjustment (Y): move mouse horizontally while pressing down left button. move mouse horizontally while pressing down right button. Area: Brightness adjustment: Contrast adjustment: move mouse horizontally while pressing down left button.
2.3.8 2.3.8.3 Stage and Image Shift Tools Controls shown below will appear on the scanning image. Type I manual stage Type II motorized stage (X, Y, R, T, Z) Type II motorized stage (X, Y, R) Type II motorized stage (dragging with mouse) Fig. 2.
2.3 Graphical User Interface (GUI) (1) Type I manual stage It is for image shift operation. Move the mouse pointer to a position and press down left or right button. The pointer will be changed to mark. Move mouse to target position while holding down the button and then release the button. If the above target position is near the center of the image area, the mouse trace line is changed and the target position is moved to the center of image.
2.3.9 2.3.9.1 Optics Tab The Optics tab is for setting operating condition of the electron optical column. (1) ELECTRON BEAM Window Sets electron optical system conditions. Fig. 2.3-40 Setup Window – Optics Tab (a) Vacc Sets and accelerating voltage. This function is equivalent to the ELECTRON BEAM window on the Operation Panel. (b) Emission Current Indicates the present emission current. (c) Filament Changes the filament current and adjusts the temperature to which the filament is to be heated.
2.3 Graphical User Interface (GUI) Low: Long life mode (so that the filament can be used for a long time) Medium: Standard mode High: High resolution mode (when the filament current is to be set near the saturation point for the emission current) AFS can give an error if the filament is improperly installed or an emission current above a specified level fails to flow when a low accelerating voltage is applied. (d) Gun Bias This button, which sets a gun bias, can be used to adjust the emission current.
2.3.9 2.3.9.2 Image Tab The Image tab is for setting operating condition with respect to image observation. Fig. 2.3-41 Setup Window – Image Tab (1) ABCC Window (SE/BSE) If the results of ABCC are not adequate, you can change the reference brightness and contrast. Adjustable range is -5 to +5. Adjustments can be set independently on the SE and BSE detectors. (2) FAST SCAN AVERAGING Window Select number of frames to be averaged for TV1, 2 and Fast1, 2 speeds.
2.3 Graphical User Interface (GUI) (3) LINE PROFILE SIGNAL Window The signal for line profile can be selected independently from the signal for image. For example, you can observe or take a photograph of an X-ray intensity line profile on the secondary electron image. Select a signal for the line profile in the box. When the Image is selected in the Background select buttons, the line profile is overlaid on the image. When the Black is selected, only the line profile is shown on the screen. 2.3.9.
2.3.9 (d) Back Ground Image checkbox When this box is checked, the data display is overlaid on the scanning image. not checked, the background of the data display area is black. If it is (e) Embed into Image checkbox When this box is checked, the auto data display is embedded into the image data when the image is saved to disk. If it is not checked, only the image data is saved. This setting is also applied for Print, Copy and PCI Transfer commands.
2.3 Graphical User Interface (GUI) (4) FILM Window (a) Film Speed Selects a film speed (sensitivity) of the film. The brightness setting is changed internally according to the selected film speed. (b) Photo Size Selects a size of the film. The magnification is adjusted internally according to the selected size. ×1.0: for 4×5 inch instant film ×0.8: for type 107 or 105 instant film ×0.6: for type 120 negative film 2.3.9.4 OP.
2.3.10 2.3.10 Captured Image Window Captured images are displayed as thumbnails on this window. It opens when you have captured an image. Also it will open by selecting Captured Image command from Window menu or using the short-cut key (Ctrl + L). The yellow border shows the present selected image. Tool buttons placed on the window are effective for the selected image. To select multiple images, click thumbnails while pressing down the Ctrl key. The window shows up to 16 images.
2.3 Graphical User Interface (GUI) Close button: Closes the window. Closing the window does not clear thumbnails. You can open them again. : When the box is checked, auto data display at the time of capture and data written with the Data Entry function are recorded with the image. Refer to <3.6.3 Image Capture> and <2.3.18 Opt Signal Processing Dialog Window>. ／ : Vertical/horizontal display switching button Clicking this button toggles the Captured Image between vertical/horizontal display formats.
2.3.11 2.3.11 SEM Data Manager Window SEM Data Manager is an image-filing program with an easy-to-operate database function. Images are registered to the database automatically when saved. For details, refer to <3.11 Using SEM Data Manager>. 2.3.12 Alignment Dialog Window The Alignment dialog window is used for alignment operations. button on the Control panel or select the To open the dialog window, click the Align Alignment command from the Operate menu.
2.3 Graphical User Interface (GUI) • Default button: • Close button: 2.3.13 The Default button is enabled when the alignment mode is either StigmaAlignX or StigmaAlignY. If the alignment mode is StigmaAlignX, sets the stigma X alignment data to the default value, and the X of stigma to the mid-point. If the alignment mode is StigmaAlignY, sets the stigma Y alignment data to the default value, and the Y of stigma to the mid-point. Stops alignment operation and closes the dialog window.
2.3.15 2.3.15 Oblique Dialog Window The Oblique dialog window is used to display an oblique image. select the Oblique command from the Analysis menu. Fig. 2.3-48 Refer to <3.9.13 Oblique Image>. 2.3.16 To open the dialog window, Oblique Image Window Password Setting Dialog Window Use the Password Setting dialog window for setting or changing the password of the login name for current user. To open this dialog window, select the Password Setting command from the Option menu. Fig. 2.
2.3 Graphical User Interface (GUI) 2.3.17 Save Image Dialog Window The Save Image dialog window is used for saving scanning images or captured images. To save scanning images, use the Direct Save button on the Control Panel. Use the save button on the Captured Image window to save captured images. Fig. 2.3-50 Image Save Window See <3.6.4 Saving a Scanning Image (Direct Save)>. See <3.6.5 Saving Captured Images>.
2.3.19 2.3.19 Split/Dual Mag Controller Split Screen mode displays two images in the viewing area, and allows images having different signals and at different magnifications to be displayed. To open this controller, select the Split DM command from the Scan menu. For switching detectors, click the Detector button so that detector-setting control will expand and display a menu. Fig. 2.3-52 Split/Dual Controller Refer to <3.9.2 Split Screen and Dual Mag mode>. 2.3.
3 3. OPERATION Shown below is the procedural flow of typical S-3400 SEM operation. For details, refer to each subsection. 3.1 Starting the System ● ● ● ● 3.2 Mounting a Specimen ● ● 3.3 3.4 Applying the Accelerating Voltage ● Adjusting the Electron ● Optical System 3.5 ● Operation for Image Observation ● Images Shutting Down Precaution on SEM Data Manager Functions Operation (3.11.1) (3.11.2) (3.11.
3.1 Starting the System 3.1 Starting the System 3.1.1 Start-up Confirmation Items Before starting the system, check the following items: (1) Check the amount and quality of oil in the rotary pump. See 4.2.1 Oil Change. (2) Make sure that the rubber tubes in the evacuation system are not loose or disconnected. (3) Close the drain cock of the compressor. See 4.3.1 Checkup and Maintenance. (4) Is the compressor stop valve open? See 4.3.3 Location and Functions of Major Components.
3.1.2 (2) Windows will start up and request to key in Ctrl + Alt + Delete will appear. Press Ctrl + Alt + Delete simultaneously (This request message will be shown or not depending on network setting of SEM computer). The logon dialog window will appear. Enter user name and password. The Windows XP will start. The following initial settings are made when the instrument is shipped from the factory. User name: S-3400 Password: None Reference: 2.3.
3.2 Mounting a Specimen 3.2 Mounting a Specimen 3.2.1 Precautions Concerning Specimen Preparation During specimen preparation, observe the following. (1) Wear clean gloves when exchanging specimens. with bare hands should be avoided. Holding the specimen or specimen stub (2) Avoid using an excessive amount of conductive paste to fix a specimen on the specimen stub. Ensure that the paste has dried before placing the specimen in the chamber.
3.2.3 3.2.3 Mounting a Specimen on the Type I Stage (Manual Stage) IMPORTANT: The specimen base that comes with the system is round. When loading an angular specimen, select an appropriate specimen base so that the entire specimen will fit on the base. Movable range limits are established by restricting the operating range for the X and Y-axes to within the diameter of the specimen stand and by calculating the safe operating range for the Z and Tilt axes.
3.2 Mounting a Specimen Specimen height (Standard) Specimen Specimen stub Adjusting screw Locking ring Specimen holder Level gauge Fig. 3.2-2 Measuring the Specimen Height IMPORTANT: If the specimen is tilted or the Stage Z is short, the specimen can touch the objective lens or the backscattered electron detector that is provided on the underside of the objective lens, which can result in damage to the specimen, objective lens or the backscattered electron detector. 3.2.3.
3.2.3 3.2.3.4 Procedure for Loading a Specimen (1) Removing the specimen, from the specimen chamber • If the accelerating voltage is on, click the OFF button on the Control Panel to shut it off. • Press the AIR button on the EVAC panel on the front side of the main unit or click the AIR button located in the upper right section of the Control Panel. EVAC Panel Fig. 3.2-4 Control Panel AIR Button (lets air into the specimen chamber) • Air is introduced into the specimen chamber.
3.2 Mounting a Specimen IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that clothes are never placed when you bring the hand close to the movement mechanism in the specimen stage by the specimen exchange etc. EVAC Panel Fig. 3.2-6 Control Panel Operating the EVAC Button (evacuating the specimen chamber) CAUTION: When pushing the specimen stage into the specimen chamber, be careful that your fingers are not caught between the stage and the specimen chamber.
3.2.4 3.2.4 Mounting a Specimen on the Type II Stage (5-axis motor-driven stage) IMPORTANT: The specimen base comes with the system is round. When loading an irregularly shaped specimen, select an appropriate specimen stub so that the entire specimen will fit on the stub. Movable range limits are established by restricting the operating range for the X and Y-axes to within the diameter of the specimen stub and by calculating the safe operating range for the Z and Tilt axes.
3.2 Mounting a Specimen 3.2.4.2 Measuring and Setting the Specimen Height (1) Measuring of the specimen height with the height gauge (a) The specimen is combined with the specimen stub and the specimen base stand. The height gauge indicates the height of the specimen when the specimen stub and specimen base stand (S, L) are combined as shown in Fig. 3.2-8. The height of the specimen holder isn't contained. Specimen Specimen stub Specimen base stand (S, L) Fig. 3.
3.2.4 (2) Setting the Specimen Height and Specimen Height and Size The specimen height and the specimen size measured in (1) are set. This setting limits the amount of the movement of the stage (Z and T direction), and protects the specimen and and components inside the specimen chamber from damage by contact of both. (a) Moving the Stage to the Specimen Exchange Position The specimen size and height can be set only at the exchange position.
3.2 Mounting a Specimen In Set Sample Size/Detector window, select from the pull-down and set the specimen height and size measured with the height gauge. In the case of the height In the case of the of the specimen size of the sample measured with the height is 32 mm diameter. gauge is +15 mm. The Size is set to The Height is set to + 32 mm. 15 mm. Fig. 3.
3.2.4 IMPORTANT: When the stage is in motion, the Replace Z10, Z65 HOME Z10, Z65 button should not be pressed repeatedly. Pressing the button several times can disable the ! STOP button, and can potentially damage the specimen or components inside the specimen chamber. 3.2.4.4 Loading the Specimen (1) Removing a specimen form the chamber (a) If the accelerating voltage is on, click the OFF button on the Control Panel to turn it off.
3.2 Mounting a Specimen (2) Loading a Specimen (a) Set the specimen holder on the specimen holder receptacle on the stage. (b) Using the handles on both sides of the specimen stage, push the stage into the chamber. (c) Set the specimen height and specimen size Refer to 3.2.4.
3.3.1 3.3 Applying the Accelerating Voltage 3.3.1 Conditions under which Accelerating Voltage can be Applied If Electron Beam box at the left top position on the Control Panel is grayed out, the accelerating voltage can not applied, wait until the ON button is activated with the evacuation of the camber is completed. When the accelerating voltage is on, the accelerating voltage indicator shows the currently set accelerating voltage and the emission current (in µA).
3.3 Applying the Accelerating Voltage (c) Pressing ON on ELECTRON BEAM block on the Cond. tab on the Control Panel. Fig. 3.3-4 Applying the Accelerating Voltage (c) (d) Selecting DETAIL on the Optics tab on the Control Panel, and pressing ON on the ELECTRON BEAM menu. Fig. 3.
3.3.2 (1) For accelerating voltage, select the desired accelerating voltage level from the list displayed buttons can in the accelerating voltage Vacc input section. If necessary, the Up/Down be used to set the defined value in 100V increments. If desired, a specific numerical value can be entered from the keyboard (use the Enter key to set the value). (2) Set a filament current, Filament. Select DETAIL on the Optics tab on the Control Panel, and press AFS with Mid selected. Fig. 3.
3.4 Adjusting the Electron Optical System 3.4 Adjusting the Electron Optical System 3.4.1 Setting Parameters for the Electron Optical System Parameters for the electron optical system can be set in two locations: (1) Condition Tab (on the Control Panel) On the Condition tab, accelerating voltage Vacc, Probe Current, focusing position WORKING DISTANCE, and DETAIL can be set and selected. Fig. 3.
3.4.1 (2) Setting electron optical system parameters on DETAIL The DETAIL menu provides a consolidated view of all parameters related to the electron optical system, including Vacc, Filament Current, Gun Bias, Probe Current, WORKING DISTANCE, automated functions (AFS and ABC), and DeGauss. Fig. 3.4-2 DETAIL Window The following methods can be used to set parameters: (a) Setting a Gun Bias The emission current can be adjusted by varying the bias voltage for the electron gun.
3.4 Adjusting the Electron Optical System (c) Auto Beam Setting (ABS) ABS combines the automation functions of AFS (Auto Filament Saturation), ABA (Auto Beam Alignment), ABCC (Auto Brightness Contrast), and AFC (Auto Focus Control) to produce good-quality SEM images. This feature can be helpful when steps such as the setting the filament current and the adjusting the gun alignment axes after a filament is replaced. For details, see the individual Auto functions.
3.4.1 When a WD value is selected from the list which is displayed when the ↓ button is clicked, the current for the objective lens will be set so that the specimen is in focus at that WD (the actual position of the specimen can be adjusted by manipulating the Z-axis of the specimen stage). For X-ray analysis, a WD value of 10 mm should always be used in order to maintain a fixed X-ray extraction angle in relation to the detector.
3.4 Adjusting the Electron Optical System 3.4.2 Axial Alignment To fully exploit the capabilities of the system, it is necessary to perform axis alignment on the electron optical system. The chart below shows axis alignment procedures. The required items should be adjusted after imaging conditions are modified.
3.4.2 3.4.2.2 Axial Alignment Items in Detail (1) Preliminary checks before performing an axial alignment Before commencing an axial alignment, the following preliminary steps should be performed: (a) Place a specimen in the specimen chamber. See 3.2 Mounting Specimen. (b) Set the accelerating voltage to 5.0kV. (c) Set Probe Current on the electron optical system SETUP tab to 80. (d) Set the objective lens movable aperture to the "0" position (open aperture). (e) Set the WD to 10 mm; focus the specimen.
3.4 Adjusting the Electron Optical System • After the alignment process is finished, click the Off button on the [Alignment] window. • Adjust the contrast so that the screen will be at the best possible brightness to view images. (B) Using the Auto feature This method allows you to perform alignment using ABA (Auto Beam Alignment) on both Beam Align Shift and Beam Align Tilt. • Click the Beam Align Shift button. • Click the Auto button shown in the figure below: Fig. 3.
3.4.2 (3) Performing a mechanical axial alignment on the objective lens movable aperture • Set the objective lens movable aperture to the number to be used (normally 2 or 3). Aperture diameters: 1: 100 µm 2: 80 µm 3: 50 µm 4: 30 µm • If the image becomes dark, adjust the contrast. • Use relatively low magnification. • Adjust the aperture hole adjustment X, Y knobs so that the brightness of the image is maximized. X direction Fig. 3.
3.4 Adjusting the Electron Optical System (4) Aperture Alignment The Aperture Alignment is designed so that the electron beam will pass through the center of the objective lens. If this alignment is not performed precisely, focusing operations can shift the image, resulting in inadequate resolution or image quality. Fig. 3.4-8 Aperture Alignment Menu NOTICE: For normal observation, axial alignments should be performed using the Electromagnetic Alignment.
3.4.2 NOTICE: An accurate aperture alignment cannot be performed at a low magnification (1.000x or less). After making coarse adjustments at low magnification factor, the final adjustments should be made at 1,000x or higher. Prerequisite to an accurate aperture alignment is the correct focus adjustment. NOTICE: If the focus is changed substantially for some reason, the recommended procedure is to click the Degauss button, and then perform alignment adjustments.
3.4 Adjusting the Electron Optical System (5) Stigma Alignment X, Y adjustments The Stigma Alignment function is designed to ensure that the image will not move during the stigma correction process. This function is also necessary for the accurate operation of Auto Stigma. Fig. 3.4-10 Selecting the Stigma Alignment (A) Basic axial alignment that is performed while viewing an image • Set the magnification between 1,000x to 5,000x. Move a salient spot on the specimen to near the center of the image.
3.4.2 (B) Using the Auto feature Select either the Stigma Align X or Stigma Align Y button and click the Auto button to run the stigma alignment auto axial alignment (AAA) process. Fig. 3.4-11 • • • • Selecting the Auto Axial Alignment (AAA) Click the Stigma Align X button. Click the Auto button shown in the figure below. Click the Stigma Align Y button. Similarly, click the Auto button shown in the figure below.
3.4 Adjusting the Electron Optical System (6) AFC Alignment adjustments The AFC Alignment function is designed to the electron beam will pass through the center of the objective lens. This function is also necessary for the accurate operation of Auto Focus and the Auto Stigma and Focus. Fig. 3.4-12 Selecting the AFC Alignment • Set the magnification between 1,000x to 5,000x. Move a salient spot on the specimen to near the center of the image. • Perform focus and stigmation alignments.
3.5.1 3.5 Operation for Image Observation Follow the operation below for observation of a scanning image. • • • • • • • 3.5.1 Selecting a Detector ................................................................... (3.5.1) Selecting Magnification............................................................... (3.5.2) Selecting Scanning Speed ......................................................... (3.5.3) Image Brightness and Contrast Adjustment ............................... (3.5.
3.5 Operation for Image Observation As signals detected by a detector have the following characteristics, they should be selected according to the intended purpose: Table 3.5-1 Detector General Characteristics of Detector-dependent Signals Characteristics SE High resolution surface information (Secondary electron) High edge contrast Application Useful for making morphological observations on the specimen surface.
3.5.1 3.5.1.2 Backscattered Electron Detector (BSE) For conducting observations, a backscattered electron detector is normally used in the lowvacuum mode. The backscattered electron detector picks up the electrons reflected from the specimen by means of a semiconductor sensor attached to the underside of the objective lens.
3.5 Operation for Image Observation IMPORTANT: The BSE uses semiconductor elements in its detection unit. To prevent damage to the semiconductor elements and the specimen, the following precautions should be observed: • The movable range for the stage must be observed strictly. In particular, a short WD or a high angle tilt can cause the stage or specimen to touch the detector, damaging the sensor. See 3.5.6 Operation of the Specimen Stage (Type I - Manual Stage).
3.5.1 (1) Setting the backscattered electron detector (BSE) Selecting the BSE option in the DETECTOR block produces a BSE image. This menu can be used to set the type of BSE signal, COMP, TOPO or 3D, and the amount of gains to be produced. Fig. 3.
3.5 Operation for Image Observation (c) 3D mode This mode produces enhanced Topographic or 3D images with a mixture of specimen surface composition information and topology information. Each pressing of the 3D mode button changes the intensity of shading. Fig. 3.5-8 3D Mode For BSE Gain, normally select a level 3. If the amount of detected backscattered electrons is large and the image contrast appears to be too strong, change the Gain to 2 or 1.
3.5.1 Fig. 3.5-9 BSE Detail Dialog IMAGE MODE: This button switches between detection modes, similar to pressing the COMP/TOPO/3D buttons in the DETECTOR block. ELEMENT SETTING: Either select radio buttons A-E or click elements in the detector sensor diagram to set each element to +/－/OFF. 3.5.1.3 Other Detectors (optional) By selecting a detector other than SE/BSE in the DETECTOR block, it is possible to observe images based on the different detector.
3.5 Operation for Image Observation 3.5.2 Selecting Magnification There are several ways to select a magnification. (1) Manual Operation Panel The MAGNIFICATION knob can be used to set a magnification. See 2.2.3 Manual Operation Panel. (2) Dragging the mouse in the Magnification indication area on the Control panel. Fig. 3.5-10 Magnification Control Unit To increase magnification, drag the mouse to the right. To decrease magnification, drag the mouse to the left.
3.5.2 3.5.2.1 Notes on Using the Lowest Magnification and Conducting Observations at a Low Magnification (1) Range of minimum magnifications Table 3.5-2 shows available minimum magnifications for the various observation parameters. The minimum magnification is subject to restrictions by WD and accelerating voltage, scan speed. Table 3.5-2 Vacc(kV) 30.0 ～ 28.0 ～ 26.0 ～ 24.0 ～ 22.0 ～ 20.0 ～ 18.0 ～ 16.0 ～ 14.0 ～ 12.0 ～ 10.0 ～ 8.0 ～ 6.0 ～ 4.0 ～ 2.0 ～ Minimum Magnification WD(mm) 3.5～ 9.5～ 13.5～ 19.5～ 29.
3.5 Operation for Image Observation (2) Notes on operating at low magnifications. In the light gray range shown in Table 3.5-2, depending on the particular observation parameters employed (especially low accelerating voltages or low-magnification at a short WD), the use of the No. 4 or 3 objective lens movable aperture with Slow scan speed can produce a shadow, as illustrated in Figure 3.5-11, on the edge of the image.
3.5.2 HINT: The light and dark gray observation conditions shown in Table 3.5-2 permit wide FOV observations, which are suitable for searching for a specimen. Under such conditions, observations should be conducted by changing the objective lens movable aperture to No. 1 or 0. NOTICE: Auto magnification fraction adjustment The auto fraction adjustment calculates and sets nearest even value magnification when capturing an image or directly photographing.
3.5 Operation for Image Observation 3.5.3 Selecting Scanning Speed Twelve scanning speeds are available with four buttons. To select a scanning speed, click one of the Scan speed icons on the Control panel. Fig. 3.5-13 Scanning Control Unit Two scanning speeds are assigned to each button. They are set alternately by clicking the button. The assignment of scanning speeds to four buttons can be customized. Refer to <2.3.6.3 Scan Control Windows>.
3.5.3 (3) Slow Scanning: Slow1 and Slow2 are relatively fast slow scans. These two speeds are asynchronous to AC line frequency. It may cause some field magnetic disturbance at high magnification and/or low kV condition. Use for a field search of the specimen, coarse focus, etc. Slow 1: About 1 s/frame (Full screen) About 0.5 s/frame (Small screen) Slow 2: About 4 s/frame (Full screen) About 2 s/frame (Small screen) (4) Slow Scanning: Use these for observation, fine focus, and astigmatism correction.
3.5 Operation for Image Observation 3.5.4 Image Brightness and Contrast Adjustment Image brightness and contrast can be adjusted both manually and automatically. BC Monitor mode is also available for manual adjustment. A histogram of present image can be shown for reference of adjustment. (1) Auto adjustment (ABCC) on the Control panel or select the ABCC command from Click the ABCC button Operate menu to start auto-adjustment.
3.5.4 (2) Manual adjustment using the mouse on the GUI . Drag the mouse while holding down the left The cursor changes to the B/C cursor button to adjust brightness; and while holding down the right button to adjust contrast. Drag it to the right to increase and to the left to decrease brightness or contrast. Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the Optional setup dialog window. Additionally, you can adjust the brightness and contrast using the scroll bars.
3.5 Operation for Image Observation (5) Histogram display A histogram of the corrent image can be shown. To show histogram, select Show Histogram from Image menu. This function periodically calculates and displays a histogram of the displayed image. Fig. 3.5-17 3.5.5 Histogram Focus and Astigmatism Correction Focus and astigmatism correction can be done manually and automatically. Focus Monitor mode is available for manual focusing.
3.5.5 (b) Adjust the stigmators X and Y alternately for the sharpest image. Fig. 3.5-19 Stigma Adjustment (c) Focus again and check image drift and sharpness. (d) Repeat steps (a) to (c) until adjustments are completed. NOTICE: If it takes a long time to focus and correct astigmatism, you may end up with specimen damage due to electron beam irradiation and/or contamination. If the specimen is beam- or contamination-sensitive, we suggest the following techniques: (a) Reduce probe current.
3.5 Operation for Image Observation (3) Manual Focus Manual focusing can be done using the control knobs on the operation panel or the mouse in the Scanning Image window. (a) Knob operation Use Focus control knobs COARSE and FINE on the manual operation panel. (b) Mouse operation Move the mouse cursor to the lower half of the image, where the mouse cursor is . Move the mouse while holding down the left button changed to the Focus cursor for fine focus or the right button for coarse focus.
3.5.5 (5) Manual astigmatism correction Manual astigmatism correction can be done using the knobs on the manual operation panel or with the mouse operation in the Scanning Image window. (a) Knob operation Use Stigma control knobs X and Y on the operation panel. (b) Mouse Operation Move the mouse cursor to the top left quadrant of the image, where the mouse cursor is changed to the STIGMA cursor . Drag the mouse while holding down the left button for X or the right button for Y correction.
3.5 Operation for Image Observation Fig. 3.5-20 Dynamic Stigma Monitor When placed on the observation image, the cursor becomes a cross-hair cursor. Clicking an in-focus point on the image moves the selected in-focus point to the center. Alternatively, the stigma knobs X and Y can be used to align the in-focus point with the center of the image. Fig. 3.
3.5.5 (5) Focus Monitor mode A waveform is displayed for monitoring the focus. The magnification is set at 1,000×. To start the Focus Monitor, click the Monitor button the image so that the waveform shows sharp peaks. Defocused Fig. 3.5-22 on the Control panel and focus Focused Focus Monitor Mode To close the Focus Monitor, click the Cancel button in the Focus Monitor mode message or click one of the Scanning Speed buttons.
3.5 Operation for Image Observation 3.5.6 Operation of the Specimen Stage (Type I - Manual Stage) The S-3400N Type I SEM provides a 5-axis manual stage. 3.5.6.1 Movable Range and Specimen Exchange Position The following table shows movable range and specimen exchange position. The specimen exchange position is indicated on the label on the stage. Table 3.5-3 3.5.6.
3.5.
3.5 Operation for Image Observation 3.5.6.4 Tilt and Z Axis Limitations The allowable tilting angle depends on both Z-axis position and specimen size. A diagram of the relationship between allowable tilt angles for various Z positions is shown below. The values shown here represent the case where the specimen height is set in the Standard position by uising a level gauge.
3.5.6 5 ∅77mm, ∅85mm 0 ∅102mm T [deg] -5 ∅127mm ∅153mm -10 ∅15mm ∅200mm -15 -20 ∅26mm ∅32mm ∅51mm -25 0 5 10 15 20 25 30 35 40 Z [mm] Fig. 3.5-25 Allowable Angle of Tilt (Type I) with respect to the Z Axis (negative angle of tilt) IMPORTANT: Set Z and T within the allowable range; otherwise, the specimen may strike the objective lens or BSE detector and cause damage to both specimen and them. 3.5.6.
3.5 Operation for Image Observation 3.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk Specimen When observing a specimen that is higher than the Standard position on the height gauge or a bulk specimen, the interference verification protective fixture should be used when inserting the specimen stage so that the specimen will not touch the protective fixture, and the stage should be used within those ranges.
3.5.7 3.5.7 Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage) The S-3400N Type II SEM provides a 5-axis motorized stage. 3.5.7.1 Coordinate Notation S-3400N utilizes two coordinate notation systems, Stage (Mechanical) Coordinate and Sample Coordinate. The Sample Coordinate system will be better for using the Rotation Assist function. The Stage Coordinate system is also available for users familiar with previous Hitachi SEMs using the Stage Coordinate system.
3.5 Operation for Image Observation Fig. 3.5-28 Coordinate System Area NOTICE: The sample coordinate is not exactly the coordinate of the sample. with the sample when it is rotated. 3.5.7.2 It is not rotated Movable Range and Specimen Exchange Position (1) Movable Range and Specimen Exchange Position The following table shows the movable range and the specimen exchange position. Mechanical coordinate and specimen coordinates are selectable for X and Y-axes.
3.5.7 Table 3.5-5 Restrictions on Operation by Specimen Size (Type II Stage) X Motion Range Y Motion Range ∅15 mm 52~68 17~33 ∅26 mm 46.5~73.5 11.5~38.5 ∅32 mm 43.5~76.5 8.5~41.5 ∅51 mm 34~86 0~50 ∅15 mm x 4 34~86 0~50 ∅77 mm 21~99 0~50 ∅85 mm 17~100 0~50 ∅102 mm 0~100 0~50 ∅127 mm 0~100 0~50 ∅153 mm 0~100 0~50 ∅200 mm 30~60 7~44 □50x5 mm 34.5~85.5 22~28 □30x10 mm 44.5~75.5 19.5~30.5 EBSP Holder 20~90 21~29 For motion ranges along the T and Z-axes, see 3.5.7.
3.5 Operation for Image Observation IMPORTANT: The Exchange Z10 [HOME Z10] button moves the Z-axis of the specimen stage to the 10 mm mark. Therefore, if the Exchange Z10 [HOME Z10] button is pressed when a tall specimen not suitable for the Z-axis 10 mm mark is mounted, the specimen will touch the BSE located on the underside of the objective lens, damaging both the BSE and specimen. To avoid this problem, the specimen should be exchanged using the Exchange Z 65 [HOME Z65] button. 3.5.7.
3.5.7 (2) When the dialog shown in the figure below appears, click the button to select Size and Height from the list and check the applicable detector. Press the OK button to confirm the settings and close the dialog box. Fig. 3.5-31 3.5.7.4 Set Window Operation Methods Used to Move the Specimen Stage The following operation methods are available to move the stage.
3.5 Operation for Image Observation The figure below illustrates the Stage tab on the Operation Panel: SPECIMEN box Sets specimen size, detector Speed slider Adj. speed of motion X, Y motion step count box X, Y axis step count display & input X/Y/R box X, Y, R axes display & op. X/Y/R specimen position display X, Y step move button Starts X, Y axis step motion X, Y coordinate box X, Y coordinate display & input Abs/Rel select button R-axis absolute/relative coord. specs.
3.5.7 3.5.7.5 X, Y, R Axis Operation (1) Manual operation using trackball Stage moves in the direction of trackball rotation. Direction switch Ball Fig. 3.5-33 Trackball • Amount of stage motion by ball rotation is linked with magnification. To move a long distance, it is advisable to lower the magnification. • The amount of stage motion with respect to the amount of ball rotation can also be veried in four steps by setting Operation Panel - Stage tab - Speed slider.
3.5 Operation for Image Observation (4) Mouse operation on the scanning image Operation of all 5 axes by using the mouse is available. Refer to <3.5.7.7 Mouse Operation of Stage on the Scanning Image>. (5) Moving the X and Y-axes in defined steps By entering the number of steps by which the X and Y-axes are to be moved in the [Step] button, the X and Y-axes can be moved in 1-step box and clicking the increments. The allowable range of steps that can be entered is 0.01~10 mm.
3.5.7 (8) Position display The size of the specimen, its present position and rotation angle are displayed on the XYR position monitor area. White circle: Specimen stub Straightline on specimen circle: Angle of specimen rotation. Directly above at 0°. Green rectangle: Scanning direction of electron beam on specimen. Turns by raster rotation. Red circle corresponds to upper left pos. on screen. Red cross cursor intersection: Electron beam irradiation position Blue square: Observable area on the specimen.
3.5 Operation for Image Observation 3.5.7.6 Z and Tilt Axis Operation (1) Operation using the Z/TILT box of the Stage tab on the Operation Panel (coordinates specifications) When moving Z and Tilt axis by specifying a set of coordinates, use the Z and Tilt scrollbars to specify coordinates, and then click the GO button. Z and Tilt axis coordinates can be set by input from the keyboard and then press ENTER key.
3.5.7 3.5.7.7 Mouse Operation of Stage on the Scanning Image Use the Mouse Mode on the Option menu or the Mouse Mode on the popup menu to activate the stage and image shift operation mode (the condition in which the Stage Move tool shown in the figure below is displayed). (Operation mode without T, Z tools is also available.) Fig. 3.5-37 Image Shift/Stage Move Tools (1) X, Y continuous driving (joystick-like operation) . Move the mouse pointer to the circle at the center.
3.5 Operation for Image Observation (2) Dragging the image At the outside of tools, where the mouse pointer is MOVE mark , place the mouse cursor at a start point on the scanning image. Move the mouse to an end point holding down the left button (a red line is drawn), and release it. The stage is then driven so that the image at the start point moves to the end point. Fig. 3.
3.5.7 (5) Electrical image shift The Electrical Image Shift function moves the scanning image electrically. It is useful at high magnifications where mechanical stage motion is not desired. To move the image with Electrical Image Shift, use the same operation as in the above (2) but use right button instead of left button. When you press right button, the mouse pointer . Move the mouse to an end point while holding down the will change to Beam mark right button (a red line is drawn), and release it.
3.5 Operation for Image Observation (7) R axis continuous driving On the rectangles of the R axis tool, mouse pointer will be changed as shown below. Fig. 3.5-42 R-axis Moving Tool (continuous move) Press down the left button on one of the rectangles. Stage will be rotated continuously while holding the button down. On the right side rectangle, stage rotates clockwise, and on the left side, counterclockwise. The eucentric rotation function is not effective when using this selection.
3.5.7 (9) Z axis continuous driving On the rectangles at the top and bottom of Z-axis tool, mouse pointer will be changed as shown below. Fig. 3.5-44 Z-axis Moving Tool (continuous move) Press down the left button on one of the rectangles. The stage will go up or down continuously while holding the button down. On the top rectangle, stage moves to a shorter Z, and on the bottom, to a longer Z. Z motion will stop when it reaches the end of allowable range calculated using the present Tilt angle.
3.5 Operation for Image Observation (11) Tilt axis continuous driving On the rectangles at the top and bottom of Tilt axis tool, mouse pointer will be changed as shown below. Fig. 3.5-46 Tilt-axis Moving Tool (continuous move) Press down the left button on one of the rectangles. Tilt axis will move continuously while holding the button down. On the top rectangle, tilt angle is increased and on the bottom, decreased.
3.5.7 (12) Rotation adjust tool The rotation adjust tool is convenient for adjusting an image to horizontal. Sa le mp im e ag R adjust tool Move the mouse at about the center of the tool. . Mouse pointer will be changed to array mark Press down the left button and move the tool to fit an end to the inclined line part to be rotated to horizontal. Press down the left button in the circle of another end and fit the tool to the line part. Release the mouse button.
3.5 Operation for Image Observation (13) To move tools The Z, Tilt and R adjust tools can be placed anywhere in the scanning image. The mouse pointer will be changed as shown below when mouse is moved to about the center of vertical line part of Z tool, near the intersecting point of Tilt tool, and center of horizontal line part of R adjust tool. Fig. 3.5-48 Movable Tools Press down the left button and move tools while holding down the button.
3.5.7 3.5.7.8 Position Memory Function The stage coordinates, both absolute and relative, can be memorized and retrieved. 200 absolute coordinates (20 points on each of 10 pages) and 20 relative coordinates can be saved in total. Three axes, X, Y, and R, can be registered. Click the Memory button on the Stage tab. The following Position Memory dialog window will open. Fig. 3.
3.5 Operation for Image Observation (4) Registration of relative stage coordinates by direct input (a) Select page Rel and Number. (b) Input coordinates in X, Y and R boxes using the keyboard followed by the Enter key. Input any comments in the Comment box and click Save. (5) Moving the stage to a memorized position To move the stage to a memorized position, select a Page and Number, and click Go. The Next button moves the stage to the coordinate of next number.
3.5.7 3.5.7.9 Stage History Function Displays present position and registered positions on a specimen picture with trajectory lines showing the order of registration. Click the Disp button in the XYR block on the Stage tab. The Stage History dialog box will open. Fig. 3.5-50 History Display Box (1) Display The white circle represents the stub size. The red cross indicates beam irradiation point. The green points are registered points. And the blue point is selected point.
3.5 Operation for Image Observation (4) Deleting registered points To delete points individually, select the point and click the Delete button. points, click the Clear button. To delete all (5) Saving and reading history data To save displayed position data, click the Save button. A dialog box for saving will open. Specify folder and file name and then, click the Save on it. The extension of history files is .ssh.
3.5.7 3.5.7.10 Image Navigation The Image Navigation function moves the stage to the position pointed out on the navigation images. Captured SEM images at low magnification as well as imported externally created images, such as optical microscope images or drawings, are available as navigation images. In this case, alignment operations are needed to ensure that the drawing (photo) to be used and the specimen being observed match in their relative geometry.
3.5 Operation for Image Observation NOTICE: • Use the navigation image function at magnification lower than 5000×. Capturing of higher magnification image is not allowed. • When the following operations are performed, the precious image becomes unregistered, and the [Need Refresh] window will blink in red: (a) When the R, T, or Z-axis for the stage is moved (for raster rotation, changing angles does not unregister an image). (b) When the accelerating voltage is changed.
3.5.7 (5) Alignment operation To use imported images for navigation, alignment operation is necessary. Select two alignment points on a navigation image. These two points shall be separated left - right or upper - lower side of the image center. (a) Select the object, which corresponds to the first alignment position on scanning image. (b) Click the Alignment button on the Image Navigation dialog window. Fig. 3.
3.5 Operation for Image Observation NOTICE: • The two alignment points on the navigation image shall be separated left - right or upper - lower side of the image center. The navigation image is divided into four areas with cross marker in the alignment operation. Alignment points shall be selected on two different areas. • When you have moved R, T or Z-axis of stage or have changed accelerating voltage, perform alignment again.
3.5.7 3.5.7.11 Rotation/Tilt Eucentric Function and Calibration The rotation eucentric function serves to keep the present field of view after specimen rotation. It calculates XY position that will recover the present viewing position after rotation axis is driven using the present XY position and the angle to be rotated. XY axes are moved to the calculated point together with rotation axis.
3.5 Operation for Image Observation NOTICE: For this auxiliary operation, a flat specimen should be used and the specimen height should be measured as accurately as possible using the height gauge. This series of operations will automatically move the R, Z, and T-axes of the stage. (3) Stage tilt calibration - Calibration necessary for each specimen exchange When specimen height differs from the standard value and the specimen is tilted, the rotation and tilt center axes will shift.
3.5.7 (c) Click the Reset button. The following message will appear. Fig. 3.5-56 Confirming the Operation Method As described in the message, bring the structure of interest to the image center at a magnification of about 500×, then click Enter button of Tilt 0 deg. (d) Stage is moved to tilt angle of 20°. Again bring the structure of interest to the image center, and click Enter button of Tilt 20 deg. A Calibration Factor is calculated and indicated.
3.5 Operation for Image Observation (4) Calibration is necessary when accuracy is degraded. Carry out the following three calibrations when accuracy of eucentricity is degraded. (a) Rotation center It measures the deviation of the rotation center from the beam irradiation point. For this auxiliary operation, use a specimen base (height: 6 mm) on which no specimen is loaded. Use the Stage tab to set the specimen Height in the SPECIMEN block to Standard.
3.5.7 5) The specimen rotates to an angle of 90°. center and click Enter button. Again bring the point of interest to the 6) In the same way, each click of Enter button rotates the specimen 45° at a time. Bring the point of interest to the center each time and then click Enter. Upon clicking Enter at a rotation angle of 315°, a Calibration Factor is calculated and indicated. This value is the stage coordinate at the rotation center, and is normally within 60±1 mm, 25±1 mm.
3.5 Operation for Image Observation 3) Click the Reset button. be shown. Fig. 3.5-60 The following message indicating steps of operation will Verifying the Operating Method As described in the message, bring the point of interest to the image center at a magnification of about 500×, then click Enter button of Tilt 0°. 4) The stage will be moved to a tilt angle of 20°. Bring the point of interest to the image center and click Enter button of Tilt 20°.
3.5.7 3) Click the Reset button. be shown. Fig. 3.5-62 The following message indicating steps of operation will Verifying the Operating Method Upon closing the message, the Z-axis will be driven to 30 mm. Carry out focusing and set magnification to about 500×, then bring the point of interest to the image center and click Enter button. 4) The Z-axis of stage will be driven to 50 mm. Carry out focusing again, bring the point of interest to the image center and click Enter.
3.5 Operation for Image Observation 3.5.7.12 Stopping Stage and Returning to Previous Stage Position If an incorrect position specification must be canceled when the stage is moving to a coordinate specification or the stage keeps moving and does not stop for some reason, click the !STOP button. Fig. 3.5-63 !STOP Button To return to a previous position after moving stage using coordinate specifying operation, use Undo - Stage Drive menu. It is effective for only one previous position.
3.5.7 (2) Observable range The following page shows the X and Y observable ranges by specimen size, and mutual restrictions on the Z and Tilt axes at the Standard height, and the movable range for the Tilt axis as a function of specimen height by specimen size.
3.
3.5.7 Type II stage Movable range of the Tilt axis with respect to Z values st Standard specimen height by specimen size (when an optional detector is not used) • Restrictions on positive angles of tilt 95 90 ∅15 mm 85 ∅32 mm ∅51 mm ∅26 mm ∅77, ∅85 mm 80 ∅102 mm 75 ∅127 mm 70 ∅153 mm 65 60 T [deg] 55 50 45 40 35 30 25 20 15 ∅200 mm 10 5 0 0 5 10 15 20 25 30 35 40 45 50 55 60 65 Z [mm] Fig. 3.
3.5 Operation for Image Observation • Restrictions on positive angles of tilt (when an optional detector is not used) 0 -5 ∅200 mm ∅102 mm T [deg] -10 ∅127 mm ∅51 mm -15 ∅15 mm ∅153 mm -20 ∅26 mm ∅77, ∅85 mm ∅32 mm -25 0 5 10 15 20 25 30 35 40 45 50 55 60 65 Z [mm] Fig. 3.
3.6.1 3.6 3.6.1 Saving and Recording Images Saving and Recording Images It is possible to record images using conventional photo films and printers, and/or as image data files (to disk drive). There are four methods of image recording: (1) Taking photographs (optional photo-recording unit is necessary) For photographic image recording, you can use Direct Photo or Memory Photo recording. Memory Photo can produce multiple photographs from a given image. See <3.6.6 Taking Photographs (Option)>.
3.6 Saving and Recording Images 3.6.2 Preparing Images for Recording The source of images to be recorded is frozen images in the image memory except for direct photographing. (1) Freezing an image (a) Using Run/Freeze button Scanning image will be frozen. When scanning speed is slow, scanning continues to the end of the frame and then, the image is frozen. Image size is 1280 x 960 pixels in full screen. It is 640 x 480 pixels in small and dual screen mode.
3.6.3 (b) Data Entry When recording scanning images, graphics and texts written using Data Entry function are recorded as they are shown on the scanning image. When recording captured images using command buttons placed on the Captured Image window, graphics and texts written before starting capture are embedded into captured images and recorded. Note that they may be different from present displayed data. If data embedding is not necessary, uncheck the Embed into Image on the Captured Image window.
3.6 Saving and Recording Images • 640 x 480: Low resolution Advantageous for small image sizes and faster acquisition times. • 1280 x 960: Medium resolution Adequate image quality with reasonable acquisition times. Recommended for usual operation. • 2560 x 1920: High resolution Fine quality image. The large image size results in a long acquisition, storage and processing time. • 5120 x 3840: Highest resolution Effective for relatively low magnification and samples containing very fine structure.
3.6.3 (2) Selecting the number of integration frames and the speed of slow scanning capture Either click the Capture Setting button ( ) in the upper right section of the Capture button on the Control Panel or right-click the Capture button to bring up a list of capture settings. Fig. 3.6-2 Link to Scanning Speeds Selected • The scanning speed link check-marked: Capturing is executed according to the current scanning speed settings.
3.6 Saving and Recording Images Fig. 3.6-3 No Link to a Scanning Capture Link • The Scanning Speed Link is not check-marked: Irrespective of the current scanning speed, the capturing process is executed at the scanning rate selected on the TV/Fast/Slow radio button. • TV/Fast: Select the desired number of integration frames (16 to 1024 frames) for the TV/Fast scanning capture process. The larger this number, the higher is image quality at the expense of an increased processing time.
3.6.3 (3) Image Capture To start Image Capture, click the Capture button on the Control panel. capture can be started either in RUN or FREEZE status. Image (4) Displaying a captured image After the scanning is finished, the Captured Image window opens and the captured image is added in the list as a thumbnail. Fig. 3.
3.6 Saving and Recording Images 3.6.4 Saving a Scanning Image (Direct Save) The scanning image, simply frozen or captured, can be saved. Resolution of saved image is 1280 x 960 or 640 x 480 depending on present screen mode when saved just after freezing the image. When saved after capturing, resolution follows capture resolution. Graphics and texts written using Data Entry function and CD measurement function are put on saved images when saved while they are shown on the image.
3.6.4 Fig. 3.6-6 Settings Window Record Tab In the above case, resulting file names are [S3400_i001.TIFF], [S3400_i002.TIFF] and so on. If the Auto Increment is not set when the Data Number Save is selected, Following message will be shown. Fig. 3.6-7 Data No. Save Window If the function is reset so that the above auto incrementing is not performed after the "Save Data No." option was enabled, the image will be saved with no Data No. (using a specified file name only).
3.6 Saving and Recording Images (3) Input INFORMATION. User Name, Sample Name, Keywords can be selected from already used names or created newly. Entry of these items is not necessary but useful for selection of files in the SEM Data Manager. (4) Set options. The saved data is automatically registered to SEM Data Manager database when the SDM Register is checked. (5) Specify folder and file name. The ↓ button beside the Folder and Image Name input box opens a list of recently used names.
3.6.5 3.6.5 Saving Captured Images Captured images can be saved using the Save button in the Captured Image window. To save captured images, select an image by clicking a thumbnail or multiple images by clicking thumbnails and pressing Ctrl key. Also multi selection with Shift key is available. The Save button opens the Save Image dialog window. Procedure is the same as above. Additionally the All Save option is available. The selected images are identified with yellow bordering.
3.6 Saving and Recording Images 3.6.6 Taking Photographs (Option) To take a photograph of an image, use one of two modes: Direct Photo mode and Memory Photo mode. Direct Photo: Direct Photo mode takes a photograph while directly scanning the electron beam. Memory Photo: Memory photo mode can produce photographs of simply frozen or captured, or stored images.
3.6.6 (1) Photo Speed • Direct Photo Recommended selection is 80 seconds. Use a 40-second scan for beam-sensitive specimens, or to shorten recording time. A selection of 160 or 320 seconds is recommended for recording X-ray mapping images. Number of scanning lines is shown below the selection box. • Memory Photo The number of scanning lines is selectable.
3.6 Saving and Recording Images 3.6.6.2 Direct Photo Recording Direct Photo mode takes a photograph while directly scanning the electron beam. It generally shows better image quality compared to the Memory Photo mode. button on the Control panel or select the Direct To start recording, click the Photo Photo command from the File menu. The scanning speed and other conditions can be selected in the Setup dialog window - Record tab. 3.6.6.
3.6.7 3.6.7 Recording Data Display with Images Text and graphics drawn using Auto Data Display and Data Entry function are embedded into image data as follows. 3.6.7.1 Image Recording Using Menu Commands or Buttons on the Control Panel When images displayed on the scanning image screen are saved, photographed, printed or transferred to PCI using menu commands or using command buttons on the Control panel, text and/or graphics will be embedded and recorded as they are shown on the image.
3.6 Saving and Recording Images 3.6.7.2 Captured Image Recording Using Buttons on the Captured Image Window When images are captured, text and graphics shown on the image at the moment of starting capture are memorized as the data for the captured image. The memorized data will be recorded when the image is recorded using command buttons on the Captured Image window. (1) To change entry data of the latest captured image, edit or add data and then click the Update button on the Data Entry window.
3.6.7 3.6.7.3 Record Captured Images without Embedding Text or Graphic Data When the Embed into Image checkbox on the Captured Image window is not checked, captured images are recorded without embedding text or graphic data even if the data has been memorized at the moment of capture. This selection can be set at just before carrying out recording. NOTICE: If the checkbox is not checked, only the images are recorded. Fig. 3.6-13 3.
3.8 Shutting Down 3.8 Shutting Down 3.8.1 Turning High Voltage Off (1) Close opening dialog windows. Save data if necessary. on the Control Panel to turn off the (2) Click the Acceleration Voltage OFF button acceleration voltage. 3.8.2 Setting the Stage at the Specimen Exchange Position (1) Type I (manual stage) Align the axial scale with the specimen change position.
3.8.3 3.8.3 Withdrawing the Specimen The following procedures can be employed to withdraw a specimen from the specimen chamber: (1) On the EVAC panel located on the front side of the main unit, press the AIR button. Alternatively, click the AIR button located in the upper right section of the Control Panel. This introduces air into the specimen chamber. Wait approximately 100 seconds until the specimen chamber is completely at the atmospheric pressure. EVAC panel Fig. 3.
3.8 Shutting Down (3) If the vacuum mode is set to Low Vacuum (VP-SEM) on the Operation Panel, change it to High Vacuum (SEM). (4) Grasp the handle. Insert the specimen stage into the specimen chamber. On the EVAC panel on the front side of the main unit, press the EVAC button. Alternatively, click EVAC located in the upper right section of the Control Panel. The evacuation of the specimen chamber commences.
3.8.5 If the processing is not completely finished, the following message appears. If this happens, take appropriate action: • Some of the captured images still need to be saved: [There are unsaved images in the capture area. Do you want to save them?] Click "Yes" to save. An Image Save dialog appears. • The acceleration voltage is not shut off: [OK to turn off HV?] Click OK to exit. (2) On the Windows task bar, click the Start button and select Shut Down.
3.9 Other Functions 3.9 Other Functions In addition to the basic operations described above, the system provides various functions, which should be employed depending on the particular application to be accomplished. 3.9.1 Screen Mode Screen modes, Full, Dual or Small are selectable with SCREEN MODE window of the operation panel. Fig. 3.9-1 SCREEN MODE Window (1) Full screen mode A scanning image is displayed with full desktop size. Image resolution is 1280 x 960 pixels.
3.9.1 (2) Small screen mode Scanning image size is reduced to half. Image resolution is 640 × 480 pixels. Faster scanning rate compared with Full screen mode may result in better image quality in some cases. Magnification of displayed image is about 1.5 times the indication. Fig. 3.9-3 Small Display Mode (3) Dual screen mode Two 640 × 480 pixel images are shown simultaneously. These two images can be live or frozen independently, and can display different signals or the same signal.
3.9 Other Functions • Run/Freeze operation buttons located in the right and left frames at the top of the screen, Using the Panels A and B can independently be toggled Run/Freeze. To toggle Run/Freeze both for Panels A and B at the same time, use the button at the center. • Capturing images button located at the top To capture an image on one of the two screens, click the of the screen to be captured. To capture the images on both Panels A and B, click the button located in the center.
3.9.2 3.9.2 Split Screen and Dual Mag Mode In the split screen/dual mag mode, the screen can be split two ways to display dissimilar signal images, such as a secondary electron image and a backscattered electron image on the right and left screens (split screen). It is also possible to enlarge a part of the left screen to display it on the right screen (dual mag). This feature can be used in both Full and Small modes. Selecting Split DM Mode from Scan menu brings up the Split/Dual Mag controller.
3.9 Other Functions 3.9.3 Signal Selection and Color Mixing The S-3400N has three external signal channels for optional signal detectors and one X-ray signal input, in addition to the standard secondary electron detector. When these detectors are installed, you can select a signal from among these detectors. Using Dual screen mode or Split screen mode, you can display two images with two different signals simultaneously. Also color mixing, which combines two signals with different colors, is available.
3.9.3 (2) Signal selection in Dual mode Fig. 3.9-10 Enhanced Control Panel for Dual Mode In the Dual mode, use the left box to select Panel A (left image), and the right box to select Panel B (right image) signals. Brightness and contrast adjustments using the mouse on the screen work on the image signals that are selected on the signal selection fields in Panels A and B.
3.9 Other Functions (4) Color Mixing mode (available in Dual mode) When different signals are assigned to the right and left screens, this feature assigns different colors (R/G/B) to the two signals to display a mixed color image. The image on the right will be in color. First, turn on the Dual mode, and then assign different signals to the right and left before observing images. In the Color Mixing block located at the top of the image, place a checkmark on the Color Mixing box.
3.9.4 3.9.4 X-ray Analysis Mode Scanning modes for analysis is available in the Full and Small screen modes. Use the SCAN MODE block in the operation panel. Fig. 3.9-13 (1) Normal mode Normal image observation mode. SCAN MODE Window Click this to return from analysis modes. (2) Line Analysis mode Displays a line profile of the signal intensity as a horizontal line in the observed image. The Line Analysis button is used for two scanning modes as follows.
3.9 Other Functions Fig. 3.9-14 LINE PROFILE SIGNAL Window The Run/Freeze button changes run and stop alternately. In the Freeze state, the line profile of an image is displayed clearly. Recommended procedure for taking a photograph is: 1) Observe an image in Position Set mode at Slow2 or slower scanning speeds. Click the Line Analysis button when the scanning raster reaches the bottom of the screen. 2) Set the line cursor at an analyzing position.
3.9.4 (b) Spot Analysis mode When the Spot Analysis button is clicked in Position Set mode, the scanning image is frozen and the electron beam is positioned at the cross point of the cursor. You can make analysis of this point. The cursor can also be moved in this mode with the same operation as above. The Run/Stop button and Scanning Speed buttons are disabled in this mode. Images containing a cross cursor cannot be photographed.
3.9 Other Functions 3.9.5 Signal Processing Processing of the image signal is available on a live image. For SE signal, digital processing, spatial filtering, gamma control and inversion can be applied. In addition, analog signal processing is available for an optional detector signal. (1) Digital signal processing Use SIGNAL PROCESSING block on the operation panel to apply digital signal processing. Fig. 3.
3.9.5 (c) Edge Enhance (1/2) Similar but stronger effect than the above Sharpen. (d) Invert Inverse contrast. (e) Gamma (-5 to +5) Plus value of Gamma suppresses white contrast and enhances dark part. Minus value increases contrast. NOTICE: 1. The digital processing is applied to saved images and pictures taken using Memory photographing. It is not applied to pictures taken with Direct photographing. 2. When you set or change the processing, scanning will be reset to the top of the frame.
3.9 Other Functions 3.9.6 Operating Condition Memory The Operating Condition Memory is provided for saving and loading conditions of the electron optical column. If the column is aligned and a specimen is observed at a particular accelerating voltage, the same condition can be reproduced by saving and loading the condition memory. (1) Saving Present Operating Conditions Use the following steps to save the present operating conditions.
3.9.6 (2) Loading a Set of Operating Conditions Use the following steps to load a set of operating conditions. (a) Open the Setup dialog window Select Condition Load from the Operate menu, or click the Setup button in the tool button section of the Operation panel and select Op.Cond tab. Select Load Memorized Condition on it. (b) Select a condition name Memorized condition names are listed. Select a name by clicking it. Use sample picture and comment for reference of selection.
3.9 Other Functions 3.9.8 Data Entry Function Use the DATA ENTRY window on the Operation panel for drawing graphics and texts on the scanning image display. For saved image, use the same function provided in the SEM Data Manager. Fig. 3.9-22 Data Entry Window (1) Function of tool buttons (a) Stop data entry Stops data entry. Tool buttons are disabled. Drawn data remains on image. (b) Edit text Edits already written texts. mark.
3.9.8 (e) Arrow Draws single-head arrow marks on the image. (f) Double head arrow Draws double-head arrow marks on the image. (g) Inner dimension mark Draws inner dimension arrow marks on the image. (h) Outer dimension mark Draws outer dimension marks on the image. (i) Inner dimension mark with measurement Draws inner dimension marks with measurement on the image. (j) Outer dimension mark with measurement Draws outer dimension marks with measurement on the image.
3.9 Other Functions (q) Select buttons or button selects graphics or text on the image in order. A selected graphics is indicated with gray color and a surrounding dotted line box. A selected text is indicated with gray color and black background. They can be moved and re-positioned by mouse dragging. A selected text can be edited by double-clicking on it. The text line is prolonged and editing becomes possible. All button selects all graphics and text. (r) Clear button Clears selected graphics or text.
3.9.8 (5) Recording entry data with images According to entry data, recording refer to < 3.6.7 Recording Data Display with Images>. NOTICE: The Auto Data Display mode saves the data displayed on the screen together with the image itself if the [Embed into Image] checkbox is turned ON in the Record tab of the Setup window. If the checkbox is turned OFF, the displayed data, even when appearing on the screen, will not be saved as embedded data.
3.9 Other Functions 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation (1) Raster Rotation Scanning of electron beam can be rotated within a range of -200° to +200°, using the slider. This allows observation of an image at the best orientation. Use the R. ROTATION window on the Operation panel. Fig. 3.9-23 R.ROTATION Window To operate the Raster Rotation, check the R. Rotation box.
3.9.9 Fig. 3.9-24 TILT COMPENSATION Window Use the following steps to focus the entire field. (a) Set the Raster Rotation angle at 0. In this condition, direction of the scanning beam coincides with the specimen tilting direction. (b) Check the Dynamic Focus box and focus the image so that the center of the image is focused. Adjust the Dynamic Focus slider so the whole image is in focus. (c) Alternately, use the Reduce 2 scanning speed.
3.9 Other Functions 3.9.10 Printing Images Using Report Generation Function The scanning image or saved image can be printed using a Windows-supported printer. This function allows you to lay out and print one or more images on paper with a specified size. (1) Report Generation function The Report Generation window will open by selecting Layout Print from the File menu or on the Control panel or on the Captured Image window.
3.9.10 Fig. 3.9-26 Image Setting Menu • Format This allows you to specify whether the file name of the image to be printed should be printed independently in the upper left portion of the image or it should be printed as part of the image attribute section. • Size - Photo Size (127 mm x 96.3 mm) When an image is added, the same image size as the Polaroid film is used (at this size, the magnification rate for the printed image will be equal to the magnification rate of the displayed image).
3.9 Other Functions Images can be added from the Add tab. Fig. 3.9-27 Add Tab (4) Adjusting layout and image size To adjust image size on the sheet, select an image by clicking it and drag the lower-right corner. To move an image, drag it using the mouse. The Arrange button on the toolbar arranges images automatically.
3.9.10 (5) Text information • Header and Footer On the Setting tab, enter the header and footer texts. when Header and Footer boxes are checked. Fig. 3.9-29 Both are printed on the sheet Header/Footer Control • File name and image information File Name, Micron Marker and Image Information are printed around the image when check boxes for each on the Display tab are checked. To change these fonts, click the Set button for Font located under the Control to bring up a Font setup window. Fig. 3.
3.9 Other Functions The comment placed on the sheet can be moved by mouse dragging. To edit a comment, double-click it. The comment input dialog window will open and you can edit the comment on it. To delete a comment, highlight the comment with the mouse, and then press the Delete button on the keyboard. (6) Contrast adjustment When you click an image on the sheet, the image will be brought to preview area of the B/C Adjustment block of the Tool tab. Adjust brightness and contrast using scrollbars.
3.9.10 (8) Additional functions These functions allow you to perform image contrast compensation on the layout, fetching images that are registered in SEM Data Manager, and saving and reading paper formats. • Batch Print Fig. 3.9-34 Batch Print Window By clicking the Add button, you can specify an image file and add it to the list. By clicking Print, you can print the image that was added to the list in the layout. These functions can be used to print different images in the same layout.
3.9 Other Functions • Layout template The Layout Print application provides predefined report templates. Clicking the button to the right of the New button brings up the window shown above, from which a desired layout can be selected: Fig. 3.9-36 Layout Template Menu • Open/Save A layout that has been created can be opened and saved by using the button shown in the above figure on the Toolbar. When saved, a layout can be output in a report file as well as in an HTML format document. Fig. 3.
3.9.11 3.9.11 Copy Image The Copy Image command copies the scanning image to the Windows clipboard in a size of 1280 × 960 pixels (Full screen) or 640 × 480 pixels (Small or Dual screen). The copied image can be used in any application software such as a word processor or image processor by pasting it from Windows clipboard. To copy an image to the Windows clipboard, select the Copy Image command from the Edit menu or click the Copy Image button 3.9.12 on the tool button area on the Operation panel.
3.9 Other Functions 3.9.13 Oblique Image An oblique (or bird's-eye-view) image is formed from a scanning image. To open the Oblique window, select the Oblique command from the Analysis. Fig. 3.9-38 Oblique Menu (1) Setting properties Check the Image box to show reference image together with oblique image. Bird's eye area specifies viewing angle and tilting angle. If it is not checked, just a flat image is formed. X Resolution and Y Line specify number of horizontal pixels and vertical lines.
3.9.14 3.9.14 Optional Setting Operation environments are set on the Optional Setup dialog window. To open the Optional Setup dialog window, select the Optional Setup command from the Option menu or click the Opt Setup on the tool button area of the Operation panel. button The dialog window has 6 tabs. Each has functions as follows. NOTICE: Setting on each tab is applied when the OK button is clicked.
3.9 Other Functions (e) PRINT SIZE This box allows you to specify an image size on the application if an image saved in either TIFF or BMP format is assigned in an application that supports X Resolution/Y Resolution that are stored in a file in the S-3400. Entering an X value in the left box automatically sets a Y value (0.75 times the value of X).
3.9.14 (3) Stage tab (a) MOTOR DRIVE STAGE Selects enable (On) or disable (Off) for motor driven stage (5 axis motorized stage of type 2). Set it at Off when the motorized stage is removed or not used, for example when using the cryo-stage. It is necessary when control program accesses motor drive part and may be locked up if there is no response from the motorized stage. (b) REVERSE MODE Changes direction of image motion by mouse operation on the scanning image and by the trackball and the joystick.
3.9 Other Functions Fig. 3.9-41 Mouse Op. Tab (5) Selecting a vacuum mode when the application is started: Evacuation tab/Evacuation menu Fig. 3.
3.9.14 • Selecting a startup vacuum mode This box allows you to specify the particular vacuum mode to be in effect when an application is started. The Previous Mode recalls the vacuum mode that was used previously. The SEM option starts the High Vacuum mode. The VP-SEM option starts the Low Vacuum mode. For low vacuum, the desired vacuum level can also be specified at the same time. (6) Setting the Auto Axial Adjustment function: AAA Adjust tab/AAA Adjust menu Fig. 3.
3.9 Other Functions 3.9.15 Password Setting Use the Password Setting dialog window for setting or changing the password of the login name for current user. To open this dialog window, select the Password Setting command from the Option menu. Fig. 3.9-44 Password Setting Window The present login name is shown in the User box. Input present password to Old Password box and then input New Password and Confirm Password. Click the OK button. Up to eight characters are accepted as password.
3.9.16 Use the following steps for setting password protection. (1) Login with the name "S-3400". (2) Open the Login Setting dialog window by selecting the Login Setting command from the Option menu. (3) Select the "S-3400" in the Login Name list. Set a password for the name. Input Old Password, if already set, and input new password to New and Confirm Password boxes and then click the Change button. If you do not open the password to other users, they cannot use the login name "S-3400" for next login.
3.9 Other Functions 3.9.17 Restoring DB S-3400N control program utilizes database files for storing conditions or data. If an error occurs in a database file, it cannot be accessed normally and a message "Database not found" will be shown. A database error may occur, for example, when PC is stopped while the database file is open for accessing.
3.9.18 3.9.18 User Dependent Operation Condition Memory The operating conditions just before shutting down S-3400N operation program are memorized and reproduced at the next starting up. Most of operating conditions are memorized individually to each login user name. The following list shows items memorized individually for login user name. Table 3.
3.9 Other Functions 3.9.19 Password Locking of Windows Password locking of Windows is possible using screen saver function. However, it can not be used when operating S-3400N program because the screen saver locking forces termination of Direct Draw function which is used by S-3400N program for image display and results missing of image display when unlocked again. Instead of using Windows function, password locking can be started on S-3400N GUI.
3.9.20 3.9.20 Downloading Stage Control Program Upgrading of specimen stage control program can be carried out by user. However, it shall be operated only by manufacturer's or service engineer's request. To start stage program download, select Stage Program Download from Option menu. The following message will appear. Fig. 3.9-50 Stage Program Download Confirmation Message Click OK to continue. At first stage status is checked.
3.9 Other Functions Set the CD-ROM and click OK. Program downloading will start. Following messages are shown on the message area of the above dialog window. Fig. 3.9-54 Writing The above message comes on while a write operation is in progress. Fig. 3.9-55 Write Error This message comes up when an error occurs. If this happens, please note the error number and notify the Hitachi Service Department. Fig. 3.9-56 Write Completed The program has terminated normally.
3.10.1 3.10 Image Quality The following are references for getting better image quality. 3.10.1 Accelerating Voltage and Image Quality There is a multitude of accelerating voltages to choose. Resolution, image quality, charging and other effects are greatly determined by the selected accelerating voltage. Below is a guideline for selecting an accelerating voltage with which to image various specimens. Table 3.10-1 Acc. volt.
3.10 Image Quality 3.10.2 Probe Current Setting and Image Quality On the ELECTORION BEAM block, image quality can be adjusted by specifying an appropriate probe current level. An appropriate setting should be selected in reference to the table below. The default probe current is set to 50. The lower the probe current, the higher the resolution at the expense of decreased probe current.
3.10.2 Table 3.10-3 Stop No. 1 2 3 4 Aperture diameter （µm） 150 80 50 30 Focal depth Shallow Deep Probe current High Low Resolution Low High Application See 3.4.2 3.10.4 Objective Lens Movable Aperture and Image Quality X-ray analysis on Observation and normal X-ray low accelerating analysis voltage Observations requiring a great focal depth Axial Alignment.
3.11 Using SEM Data Manager 3.11 Using SEM Data Manager SEM Data Manager is an image filing program with an easy-to-operate database function. A database table is established for each user, and acquired SEM images are registered in the table automatically when saving. The SEM Data Manager lists image files, finds images following a Select query, displays images, displays and enables image information editing, and allows image processing. 3.11.
3.11.2 (6) Opening of image files, image processing or other operation on the SEM Data Manager need large PC power. If SEM operation, such as image capturing is carried out while above processing is running, it may cause some incorrect results. For example, image capturing while slide show is running sometimes results incorrect captured data. Avoid SEM operation while such an operation on the SEM Data Manager is running.
3.11 Using SEM Data Manager (2) Database fields The following fields are created for each registered image data. • User: Create a user name on the SEM Data Manager. It may also be created when saving images. • Folder and Media • Image format: BMP, JPEG or TIFF • Date: Date of creation or modification • Sample, Keywords: Applied when saving. • Image size • Instrument condition: Magnification, signal source, Vacc, column condition etc. Among the above fields, the following are used for selection items.
3.11.2 3.11.2.2 Menu and Tool Buttons The following picture shows an example where image is open. Menu Toolbar Data tree Image file list Image display Image information Thumbnail display Fig. 3.11-2 SEM Data Manager Window Functions of Menu commands are as follows. parentheses. Corresponding tool buttons are shown in (1) File menu ) • Save as ( Save the image on the display area. • Reload Load and display the original image. Use to recover processing, etc.
3.11 Using SEM Data Manager • Remove List Remove the image from database. • Delete Delete the image. Image file is not erased. Image file is erased. • Rename Rename the image file. • Layout Print ( ) The Report Generation window opens for printing images. • Exit Close SEM Data Manager. (2) Database menu • Add from file ( ) Register image files specifying file name. • Batch Process ( ) Apply file operation (copy, move, delete, etc.) to multiple selected images.
3.11.2 (4) View menu • Image Maximize ( ) Display the image in full desktop. window. • Zoom ( Menu and tool buttons are available on the maximized ) Enable or disable image enlargement by clicking on the image. mark when it is enabled. Mouse pointer is the • Show thumbnail Show or hide thumbnail display. • Viewer Open ( ) Open a viewer window and display the image. Data Manager is closed.
3.11 Using SEM Data Manager • Image Processing－Processing ( ) Open Image Processing dialog window. filtering are available on it. Several image processings including spatial • Image Processing－Noise Reduction to Flip Vertical Execute each of image processing. • Image Processing－Cancel Cancel the results of image processing and load the original image. ) • Data Entry ( Draw shapes and characters on the image. • CD Measurement ( ) Open CD Measurement dialog window (optional function).
3.11.3 3.11.3 3.11.3.1 Operation Registering Images on SEM Data Manager Database (1) Saving images on SEM On the Save Image dialog window, put a check mark in SDM Register box to register images when saving. Fig. 3.11-3 Save As Window Parameters for registering image are in the INFORMATION area. (a) User Name You can select a User name already registered by opening the list with the ↓ button, or input a new user name. (b) Sample Name Input sample name or other text for classification of samples.
3.11 Using SEM Data Manager (2) Registering images stored on disks To register already saved images to the SEM Data Manager database, use Add from File on the tool bar. command in Database menu or the Add from File button The following Add from File dialog window will open. Fig. 3.11-4 Add Image Window Select a folder and image files and then click Open button. Multiple file selection using Shift or Ctrl key is available.
3.11.3 The above example has two User names (P-A01 and P-A02) and data tree is opened in the order of Folder - Image format - stored date. To open the tree to a lower level, click + button and to close the lower tree, click - button. To open image files in the image file list, click a folder mark. The present opening folder is mark. shown with NOTICE: When you have changed one of the selection items, the data tree will be closed. Open the tree again.
3.11 Using SEM Data Manager 3.11.3.4 Image Information Information on the presently selected image is shown on the image information area. Fig. 3.11-7 Image Information Window You can edit Sample, Comment, and Keywords. Click Edit button to edit the above items. Input each item and click OK. 3.11.3.5 Viewer Display To display the presently selected image on a viewer window, use Viewer Open command in button.
3.11.3 3.11.3.6 Data Entry Use Data Entry function for drawing shapes and writing texts on the image. The Data Entry toolbox will open by Data Entry command in Processing menu or Data Entry button. Fig. 3.11-9 Data Entry Window (1) Function of tool buttons Function of tool buttons in the Data Entry toolbox is similar to the function on S-4800. (a) Edit text Edit already written texts . mark. Click the text to be Selecting the Edit button changes mouse pointer to edited.
3.11 Using SEM Data Manager (e) Double head arrow Draw double-head arrow marks on the image. (f) Inner dimension mark Draw inner dimension arrow marks on the image. (g) Outer dimension mark Draw outer dimension marks on the image. (h) Inner dimension mark with measurement Draw inner dimension marks with measurement on the image. (i) Outer dimension mark with measurement Draw outer dimension marks with measurement on the image. (j) Circle Draw circles or oval shapes on the image.
3.11.3 (n) Select buttons or button selects graphics or text on the image in order. A selected graphics is indicated with gray color and a surrounding dotted line box. A selected text is indicated with gray color and black background. They can be moved and re-positioned by mouse dragging. A selected text can be edited by double-clicking on it. The text line is prolonged and editing becomes possible. All button selects all graphics and text. (o) Clear button Clear selected graphics or text.
3.11 Using SEM Data Manager 3.11.3.7 Contrast Conversion Gray scale conversions and pseudo-coloring are available. To apply conversions to the image, open the Contrast Conversion dialog window by clicking the Contrast Conversion button on the tool bar or use Contrast Conversion - Conversion command in Processing menu. Fig. 3.11-10 Contrast Adjustment Window (1) Manual adjustment of contrast and brightness Use Contrast and Brightness scroll bars. The % values show rate of processing.
3.11.3 (4) Contrast inversion The Negative button inverses black and white. (5) Gamma correction A Gamma value of larger than 1 enhances dark area and suppresses highlight area. A value smaller than 1 suppresses dark area and enhances highlight area. Select a gamma value and click the button. (6) Apply or cancel conversion result OK button applies conversion result and rewrites image palette data. Cancel button cancels conversion result and returns to original contrast.
3.11 Using SEM Data Manager (a) Color Mode and Color Order • Off : No coloring • Color1 or Color2 Convert gray scale value to RGB color as in the following figures. The L, M and H represent R, G or B color specified by Color Order setting. Color 1 mode L M M Color 2 mode H H Intensity L L M M H Intensity Fig. 3.
3.11.3 3.11.3.8 Image Processing Digital image processing for noise reduction, increase of sharpness and detail enhancement is available. Open the Image Processing tool window by Image Processing - Processing command in Processing menu or Processing button on the tool bar. The following tool window will open. OK applies processing result to the image data, Cancel recovers the original image and Close terminates the window. Fig. 3.11-14 (1) (2) (3) (4) (5) Noise Red.
3.11 Using SEM Data Manager (6) Edge Enhance Applies Laplacian filter. It is effective for edge enhancement. Edge Detect Applies Laplacian filter. It is effective for edge detection. (7) (8) Line Segment Extracts line segment. (9) Emboss Emboss effect. (10) Highlight FLT (11) Highlight FLT More Highlight filter emphasizes detailed construction and reduces shadowing of the image. (12) Rotate 90 deg Rotates the image by 90° clockwise. (13) Flip Vertical Inverts top and bottom of the image.
3.11.3 3.11.3.9 Color Mixing Creates color composite image using two original images. It is applicable for color composition of two different signal images, or stereo imaging using colored glasses. Positional alignment of two original images is possible. (1) Color mixing operation Select one of two original images to be mixed and open the Color mixing dialog window by Color Mixing command in Processing menu or Color Mixing The selected image is shown in the source image area A. Fig. 3.11-15 button.
3.11 Using SEM Data Manager Select color for source images. Check Color and select R, G or B button. Select a mixing mode in the mixing selection box. • ADD: Add A and B source images. Use this when two images are of different single colors. • AVG: Average of A and B source images is used. Use this when one or both of source images are monochrome. • MAX: Compare intensity of each pixel of source A and B images and use larger data for resulting composite image.
3.11.3 3.11.3.10 Printing Images button on the tool bar. Use Layout Print command in File menu or Layout Print The Report Generation window will open with the presently selected image on the layout sheet. Double-click a thumbnail image to add it to the layout sheet. Refer to <3.9.10 Printing Images Using Report Generation Function>. 3.11.3.
3.11 Using SEM Data Manager 3.11.3.12 Batch Operation of Image Files Two or more image files can be operated at once. Use Batch Process command in Database menu or Batch Process bar. The Batch Process dialog window will open. Fig. 3.11-19 button on the tool Batch Processing Window (1) Action buttons (a) Move Files: Moves image files selected from the Source list to other folders specified in the Destination area. Image files in the source directory are deleted.
3.11.3 (2) Source list Image files included in the present opening folder are listed here. Files can be selected from this list for one of the aforementioned actions. Multiple selection using the Shift or Ctrl key is supported. For multiple file selection, (a) Press the left button of the mouse on the first selected file, and move the mouse while holding down the button to the last selected file, and then release the button. Selected files are shown by reverse color.
3.11 Using SEM Data Manager 3.11.3.13 Slide Show Use the Slide Show controller for viewing images in continuous slide motion. To open the Slide Show controller, use Slide Show command in View menu or Slide Show button on the tool bar. Start slide show Interval: Select interval time Stop slide show Fig. 3.11-20 3.11.3.14 Slide Show Window Optional Setting Tool menu - Options command opens the Options dialog window. Fig. 3.
3.11.3 (2) Thumbnail Directory The default directory of thumbnail images is "C:\Windows\Temp". It can be set here at any directory. If the thumbnail directory is changed, all of existing image thumbnails are recreated in the new directory when the images are opened. It is recommended not to change the thumbnail directory frequently. (3) Data Entry/Measurement Use for selection of font type and size for Data Entry function and CD Measurement function.
3.11 Using SEM Data Manager 3.11.3.15 Optimizing and Repairing Database File Use Database Utility command in Tool menu. Fig. 3.11-23 The following dialog window will open. Database Settings Window (1) Optimizing database file To optimize the database file when the file size becomes unnecessarily large by repeating registration and deletion, select the database file by clicking the name and click Optimize. Usually it is not necessary if no problem has been shown.
4.1.1 4. MAINTENANCE When attempting maintenance of this instrument, observe the following cautionary instructions. (1) Read through the maintenance procedures contained in this manual, and then carry out maintenance as described. (2) Avoid disassembling/reassembling or repairing any part that is not described in the maintenance procedures. The vacuum pump (turbo-molecular pump) recommends the maintenance of the oil cartridge once/year and the bearing once/two years.
4.1 Maintenance of Electron Optical Column Fig. 4.1-2 (3) Accelerating Voltage Setup Dialog Either press the AIR switch on the Evacuation Control Panel or press the AIR evacuation control button located on the right side of the observation screen Control Panel. Wait until the inside of the column reaches a complete AIR state. EVAC panel Control Panel Fig. 4.1-3 (4) Evacuation Control Panel Lift the entire electron gun unit toward left, and tilt it.
4.1.1 CAUTION: The gun housing should be lifted by both hands until it stops. If the gun housing is released halfway, your fingers might be caught in it. NOTICE: Take care not to leave fingerprints on the internal vacuum parts for preventing gas degassing. Be sure to wear clean gloves when performing the following procedure. (5) Turn the holding ring counterclockwise to remove the cartridge filament assembly. Fig. 4.
4.1 (7) Maintenance of Electron Optical Column If the area around the center of the anode hole is dirty, the screwed-in anode should be removed. As described in (6) above, clean the area around the hole on the anode plate, and then install the cleaned anode. Fig. 4.1-7 (8) Cleaning the Anode Attach the Wehnelt to the cartridge filament. Fig. 4.1-8 Wehnelt (left) and Cartridge Filament (right) NOTICE: The Wehnelt is fitted as shown in the figure below with spacers be attached individually.
4.1.1 (9) Check to see that the Wehnelt is securely fitted. After that, use a spray or blower to completely remove any lint and other debris attached to the filament assembly. Fig. 4.1-10 Cartridge Filament Assembly (10) Attach the filament assembly to the electron gun. Fix it by turning the holding ring clockwise. Fig. 4.1-11 Installing the Cartridge Filament Assembly (11) Set the gun onto the column. Fig. 4.
4.1 Maintenance of Electron Optical Column NOTICE: Adequate care should be taken to prevent any dust particles from intruding into the electron gun unit or the inside the column. (12) Either press the EVAC switch on the Evacuation Control Panel or the EVAC control button located on the right side of the Observation Screen Control Panel. Wait until the evacuation process finishes. EVAC Panel Fig. 4.
4.1.2 (1) On the Setup window, set the numerical value in Filament in the electron optical system Setup tab to 0. Fig. 4.1-14 Filament Setup Menu (2) If the accelerating voltage is ON, click OFF to shut it off. (3) Press either the AIR switch on the Evacuation Control Panel or the AIR evacuation control button located on the Observation Screen Control Panel. Wait until the interior of the column completely attains the AIR state. EVAC Panel Fig. 4.
4.1 (5) Maintenance of Electron Optical Column Pull out the entire assembly for the objective lens movable aperture. Fig. 4.1-17 (6) Removing the Objective Lens Movable Aperture Assembly Using a precision screw driver, remove the retaining screw that holds down the objective lens movable aperture plate. B950104 Fig. 4.1-18 (7) Removing the Retaining Screw Using a pair of tweezers, remove the aperture plate and replace it with a new one (or one that has been baked in vacuum deposition equipment).
4.1.2 NOTICE: Objective lens movable aperture plates can be used on either side. (8) Referring to Figure 4.1-20, align the positioning slot for the objective lens movable aperture plate with the positioning slot for the aperture base. Place the aperture holder over them, and lightly fasten the aperture holder retaining screw.
4.1 Maintenance of Electron Optical Column (11) Securely insert the advancing mechanism for the objective lens movable aperture. Fasten the W-point screw with a hexagon wrench to secure the advancing mechanism. Fig. 4.1-22 Installing the Objective Lens Movable Aperture (12) Press either the EVAC switch on the Evacuation Control Panel or the EVAC control button on the Observation Screen Control Panel; wait until the evacuation process finishes. EVAC Panel Fig. 4.1-23 4.1.
4.1.3 (1) If the accelerating voltage is ON, click OFF to shut it off. Fig. 4.1-24 (2) Accelerating Voltage Setup Dialog Press either the AIR switch on the Evacuation Control Panel or the AIR evacuation control button located on the Observation Screen Control Panel. Wait until the interior of the specimen chamber completely attains the AIR state. EVAC Panel Fig. 4.1-25 (3) Control Panel Evacuation Control Panel Pull out the stage. Fig. 4.
4.1 (4) Maintenance of Electron Optical Column Turn the knob for the BSED (backscattered electron detector) mechanical unit to pull out the BSED detector, and insert the aperture replacement tool through the stage opening to remove the orifice unit. Objective lens Turn the knob Tool Orifice unit BSED detector Fig. 4.
4.1.3 Align tool groove with orifice groove Aperture replacement tool P/N 52E-6560 Objective lens ① Before removal ② Aperture replacement tool and the orifice unit Pull out orifice unit and tool Turn grooved tool counterclockwise Orifice unit P/N 52E-6563 ③ Turn the orifice unit and the tool together Fig. 4.
4.1 Maintenance of Electron Optical Column IMPORTANT: Be careful to avoid any damage to the surface of the scintillator in the specimen chamber or to the backscattered electron detector. Orifice holder Orifice: ∅0.35 diameter Screw in style Orifice holder Screw in style prevents orifice unit from falling off Aperture replacement tool M4 male screw Fig. 4.
4.1.4 (7) Replace the aperture with a new one. (8) After the aperture has been replaced, perform Steps (4) - (5) in reverse to re-assemble the unit. When turning the knob clockwise and inserting the BSED detector, turn it until the BSED detector catches the orifice unit and stops. Notice that if the knob is turned too hard, the detector will disengage from the orifice unit and overshoot.
4.1 Maintenance of Electron Optical Column EVAC Panel Control Panel Fig. 4.1-33 (3) Evacuation Control Panel Lift the entire electron gun unit to the left and tilt it. Fig. 4.1-34 Removing the Electron Gun Unit CAUTION: When lifting the entire electron gun unit, be sure to use both hands, and move it until it stops. Releasing it prematurely can cause fingers to be caught, resulting in injury.
4.1.4 (5) Using a special pair of tweezers, pull out the condenser aperture. Fig. 4.1-36 Removing the Condenser Aperture (6) Referring to Fig. 4.1-36, loosen the pipe and the pipe holder, and remove the single-hole mesh aperture. (7) Install a new aperture. When re-using an old aperture, it should be cleaned by baking. The new aperture should be checked under an optical microscope to make sure that it is free of dirt or dust, and that it is clean and its hole is neatly machined.
4.1 Maintenance of Electron Optical Column Holder 50E-1677 Pipe 1 52E-6526 41.5 mm Holder ring 50E-1493 Aperture 535-1289 Pipe holder 52E-6531 38.0 mm Pipe 2 52E-6527 87.0 mm Pipe 3 52E-6528 27.0 mm Pipe 4 52E-6529 Fig. 4.
4.1.5 4.1.5 Cleaning of Aperture Plates (1) Use the vacuum evaporator for heating aperture plates. For handling of the vacuum evaporator, refer to the instruction manual of the evaporator. (2) Mount the molybdenum board in the vacuum evaporator. (3) (See Fig. 4.1-38.) -3 Evacuate the vacuum evaporator to better than 5 × 10 Pa. Heat the molybdenum board. Continue applying heater current until the molybdenum board becomes incandescent.
4.1 Maintenance of Electron Optical Column 4.1.6 Ultrasonic Cleaning with Organic Solvent CAUTION: When handling organic solvent (volatile solvent), take the following points into consideration to avoid the danger of injury or explosion caused by ignition. 1. Volatile solvent should be handled at a place which is well ventilated and is well away from flame. 2. If volatile solvent is excessively inhaled, dyspnea (difficulty in breathing) may be caused.
4.2.1 4.2 Maintenance of Rotary Pump NOTICE: Instruments shipped to European area where CE marking conformity is necessary are not provided with the rotary pump. Also according to the configuration of the apparatus, the rotary pump is not provided even when shipped to outside of the European area. A period of inspection cannot be uniformly determined simply because operating conditions of vacuum pumps differ.
4.3 Maintenance of Air Compressor 4.3 Maintenance of Air Compressor NOTICE: Instruments shipped to European area where CE marking conformity is necessary are not provided with the rotary pump. Also according to the configuration of the apparatus, the rotary pump is not provided even when shipped to outside of the European area. 4.3.1 Checkup and Maintenance Check the following items regularly. Before checkup/maintenance, be sure to turn the main switch off.
4.3.1 NOTICE: 1. The mark "○" indicates the time period after the start of operation or replacement of the part. The mark "●" shows the time point for part replacement. 2. The above table shows the standard inspection cycle. The inspection cycle changes slightly with the operating conditions (temperature, humidity, etc.). If the operating conditions are severe, shorten the inspection cycle. 3. For inspection and maintenance of the asterisked items, ask your dealer or nearby service agent. 4.
4.3 Maintenance of Air Compressor 4.3.2 Troubleshooting of Air Compressor If the air compressor becomes faulty, reference should be made to the following table. Symptom Probable Cause Remedy Air compressor rotates. Pressure does not rise at all or rises very slowly. Maximum pressure limit is exceeded. Abnormal sound has been emitted. Motor overheats. Drain or stop valve leaks. Retighten. If the valve still leaks, replace with a new one. Packing, screw or seal is defective.
4.3.3 4.3.3 Location and Functions of Major Components Pressure switch Starts and stops compressor. Suction filter Removes dust and dirt in suction air. Safety valve Relieves compressed air at abnormal rise in pressure. Push solenoid (single phase type only) Activated at start of compressor. Stop valve (air outlet) Connects hose. Pressure gauge Compressor Indicates the pressure of air tank. Motor Drain cock Air tank Fig. 4.
4.4 Troubleshooting 4.4 Troubleshooting 4.4.1 The Evacuation System does not Run If the evacuation system fails to run or the evacuation system does not proceed, the following items should be checked: (1) Is there an error? If both the EVAC/AIR switches on the EVAC Panel are blinking and the buzzer is sounding, it is an indication that an error has occurred. If this happens, check the error message on the PC operation screen.
4.4.2 4.4.2 The Vacuum Level in the Specimen Chamber does not Rise If the evacuation process does not end in 5 minutes after the evacuation process for the specimen chamber was started by flipping the EVAC button on the EVAC Panel keeps blinking, it is an indication of an error, and an error message appears on the PC operation screen.
4.4 Troubleshooting 4.4.4 When Image is not Shown on Screen If an image does not appear on the screen or if it is difficult to focus the image, check the following. (1) Is a specimen loaded? Is the specimen at the exchange position? Are the accelerating voltage and emission current normal? Is either SE (secondary electron) or BSE (backscattered electron) selected as a detector? Is the probe current set too low? See <3.3.2 Setting the Accelerating Voltage and Filament Current>. See <3.5.
4.4.5 4.4.5 When Image is Very Noisy There may be three types of noise on scanning images. The first is a snow noise that appears uniformly on the image. It is mainly due to statistical fluctuation of number of primary or secondary electrons. It appears when probe current is too small, secondary electron emission efficiency of the specimen is too low, or efficiency of signal detection is too low. If images show such a noise, check the following.
4.4 Troubleshooting The second is random noise caused by unstable probe current or unstable detector. For example, bright spots or bright or dark lines appear when emission current is unstable or the scintillator of the secondary electron detector has been damaged. If images show such a noise, check the following. (1) Is the emission current too low? Reset the accelerating voltage, the filament, and the gun bias. See <3.3.2 Setting the Accelerating Voltage and Filament Current>.
4.4.7 4.4.7 When Auto Focus or Auto Stigma does not Work Satisfactorily When auto focus or auto stigma does not produce sharp images, check the following. (1) Open the Alignment dialog window and start Aperture Alignment mode. wobbling, carry out aperture alignment. (2) Open the Alignment dialog window and start Stigma Alignment mode. wobbling, carry out stigma alignment. (3) Check if the observed specimen has a fine surface structure. manual focus and manual astigmatism correction.
4.4 Troubleshooting 4.4.9 When PC has Hung Up If the PC locks up during system operation, close Windows, shut down the system, and restart it. Although the program can be ended and the system restarted, that approach may result in unstable system behavior. The recommended procedure is to shut down the entire system. Before the system is shut down, if there any programs other than the SEM control program that are running, save the data if it is at all possible, and close the programs.
4.5 4.5 What to Do in the Event of a Power Outage or the System must be Shut Down Completely for a Long Time (1) Perform routine shutdown operations (remove the specimen, shut down Windows, and turn off the power). See <3.8 Shutting Down>. (2) Turn off the MAIN breaker located in the back of the main unit. MAIN breaker（ELB） Fig. 4.5-1 MAIN Breaker (3) Turn off the power breaker on the distribution board at the installation site. 4.
4.7 Caution of Maintenance 4.7 Caution on Maintenance On maintenance of the instrument, the following cautions must be observed. (1) Follow the maintenance procedures described in this manual after a full understanding of it. (In particular, carefully read "PRECAUTIONS ON HANDLING" at the beginning of the manual.) (2) Maintenance work (disassembly-reassembly or repair) of the components other than described in this manual must not be carried out by the customer. 4.
4.8.1 (2) Set the acceleration voltage to 5 kV. With the Filament Image mode on (with an elliptic image displayed), set the Probe Current to 100. Make sure that the objective lens movable aperture is "0". (3) Set the Filament to approximately 90 (saturation condition). Turn off Auto Gun Bias. (4) In Filament Image, select the Beam Align Shift.
5.1 5. 5.1 REPLACEMENT PARTS Consumables The items shown in Table 5.1-1 should always be on hand for normal operation. Table 5.1-1 Part No.
5.2 Replacement Parts 5.2 Replacement Parts The items below should be prepared in the necessary quantities. Table 5.2-1 Replacement Parts Part No.
5.3 5.3 Spare Parts The items shown in Table 5.3-1 must be prepared for long-term operation. Select a proper quantity in consideration of the application of each part. Table 5.3-1 Part No.
6.1.1 6. 6.1 ACCESSORY OPERATION Model S-5080 Auto-Camera (Option) This camera is used for taking photographs of images displayed on the screen of CRT dedicated for photographing. You can use the following kinds of film by attaching various units consisting of lenses and adapters (see Fig. 6.1-2): 6 × 7 roll film, 8 × 10 instant film, and type 4 × 5 instant film. 6.1.1 Configuration Figure 6.1-1 shows the camera body and one kind of adapter.
6.1 Model S-5080 Auto-Camera (Option) C910804 C910905 Type 4 × 5 single-exposure unit Type 4 × 5 Polaroid unit (P/N 589-9871) (P/N 589-9872) Image ratio = 1 : 1 Image ratio = 1 : 1 C921211 Type 4 × 5 Fuji instant unit (P/N 589-9875) Image ratio = 1 : 1 C970192 6 × 7 roll film unit (P/N 589-9873) Image ratio = 1 : 0.6 C923691 107 Polaroid unit (8 exposures) (P/N 589-9874) Image ratio = 1 : 0.8 NOTICE: 1. The 107 unit integrates the 0.8-fold adapter dedicated for the model S-5080 camera. 2.
6.1.2 6.1.2 Specifications (1) Magnification : ×1.0, ×0.8, and ×0.6 (2) Lens : F = 75 mm (3) Aperture : f = 4.5 to 22, manual (4) Focusing : Manual (preset when shipped at the same time with the SEM) (5) Film type : Roll film 120, Polaroid TYPE52 (P/N 55), Polaroid 107 and 105 (the user is to buy the film.) REMARKS: Refer to Table 6.1-1, which illustrates image sizes on the film for each combination of adapter and kind of film.
120 6-4 ×1.0 ×0.8 54 90 120 96 72 Exposure Area on Film NO NO 118 NO NO 95 Roll Film 120 and 220 6 × 7 cm NO NO 68 56 ×0.6 Camera Magnification Polaroid 107 Table 6.1-1 Field of View on Photographing CRT Area of Film Type 4 × 5 Polaroid Type 52, etc. Fufi Film FP500B 6.
6.1.3 6.1.3 Assembling the Camera (1) Illustrated below are films for the standard PHOTO CRT. (a) Type 4 × 5 film (magnification of ×1.0) Fig. 6.1-3 4″ × 5″ Film (Magnification of ×1.0) (b) Polaroid 107 film (magnification of ×0.8) Fig. 6.1-4 Polaroid 107 Film (Magnification of ×0.8) (c) Roll film 120 (magnification of ×0.6) Fig. 6.1-5 Roll Film 120 (Magnification of ×0.
6.1 Model S-5080 Auto-Camera (Option) 6.1.4 Operation (1) Installing the Camera You should ask a service engineer for the installation. Take out the PHOTO CRT unit by referring to Fig. 6.1-6. Tighten four 5-mm screws to fix the camera on the PHOTO CRT panel. (2) Adjustment The adjustment for the roll film 120 is described below. for other kinds of film. Similar procedures are applicable (a) Focusing 1) Remove the film holder, and attach the focusing hood instead.
6.1.4 PHOTO CRT unit Camera Aperture Fig. 6.
6.2 Faraday Cup Device (Option) 6.2 Faraday Cup Device (Option) This device is used for measuring the probe current. 6.2.1 Range of Type II Stage Drive When the Faraday cup device is used, the range of the drive of Z axis and T axis of the sample stage (Type II) is limited as follows. • Z axis: 10 mm-65 mm • T axis: 0° fixation 6.2.2 Usage Method (1) Connect an ammeter (µµA meter) to the connector (the ammeter is to be prepared by the customer).
6.2.2 NOTICE: If faraday cup insert when the stage is moving to safety position, the following alert message is displayed on screen with the warning buzzer. Draw out the Faraday cup immediately and wait to stop the warning buzzer and stage movement. After that, insert the faraday cup. If the Faraday cup insert to the chamber when the stage is moving to safety position (warning buzzer is ringing) or Z position (WD) is higher than 9.9 mm or stage is tilted, the sample and stage might be damaged.
6.3 Specification of S-3400N External Communication (Option) 6.3 Specification of S-3400N External Communication (Option) 6.3.1 About the External Communication of S-3400N The external communication of S-3400N is the software that controls S-3400N from the external controller with the Ethernet. SEM PC EDX PC Column control SEM application EDX application Stage control SemCommunication DCOM SEM Ethernet (TCP/IP) Fig. 6.3-1 6.3.1.
6.3.2 6.3.2 Each Command Table 6.3-1 Property Command Command Return Contents IsActive 0 : SEM not execute 1 : Ready 0 : HV-OFF 1 : HV-ON 0 : HV OFF 300-30000 : 0.3-30 kV 5-300000：x5-x300k 400-7000：4.00-70.00 mm ０-16383 SEM status reading HVOn Vacc Mag WD ObjLensCoarse ObjLensFine ProbeCurrent ChamberType StageType VacuumMode Vacuum InstructName Version Revision 0-4095 0-1000 : 0.0-100.
6.3 Specification of S-3400N External Communication (Option) Table 6.3-2 Method Command Command Set value SemCommInitialize SetHVOn 0 : HV-OFF 1 : HV-ON SetVacc 300-30000：0.330.0 kV SetMag 5-300000：x5-x300k SetWD 400-7000：4.0070.00 mm Coarse：０-16383 Fine：0-4095 0-1000：0.0-100.
6.3.2 Command Set value Return Contents SetStagePosition X：0100000000(nm) 100 nm Step Y：0-50000000(nm) 100 nm Step Z：500000070000000 (nm) 100000 nm Step T：-20000-90000 x1000(deg) 0.1deg Step R：0-359900 x1000(deg) 0.
6.
6.3.2 Table 6.3-3 Event Command Command Return Contents HVOnChange 0 : HV-OFF 1 : HV-ON 300-30000：0.3-30ｋ V HV changing VaccChange HVOnFinished VaccFinished MagChange WDChange ObjLensChange ProbeCurrentChange ABCFiniished AFCFinished StagePositionChange StagePositionFinished VacuumModeChange VacuumChange SemCommandFinished 5-300000：x5-x300k 400-7000：4.0070.00mm Coarse：０-16383 Fine：0-4095 0-1000：0.0-100.
6.3 Specification of S-3400N External Communication (Option) 6.3.2.1 Initialize the Communication (1) Check SEM status Property SEM status reading IsActive As Long Read Only 0: Did not execute at SEM side 1: Ready (2) SEM connection Method Initialize the communication SemCommInitialize() as Long Return Comment: 6 - 16 0: Normal end 1: Abnormal end After initialization, the Event that is corresponding to each Property of SEM condition is released.
6.3.2 6.3.2.2 Acceleration Voltage (1) Monitoring/Setting of Acceleration voltage Property HV ON/OFF monitoring HVOn as Long Read Only 0: HV–OFF 1: HV-ON Acceleration voltage monitoring Vacc as Long Read Only 0: HV–OFF 300 to 30000 : 0.3 – 30.0 (kV) Method HV ON/OFF setting SetHVOn (HVON as Long) as Long HVON 0: HV-OFF 1: HV-ON Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: The method is finished at completion of command analysis.
6.3 Specification of S-3400N External Communication (Option) Acceleration voltage setting SetVacc ( Vacc as Long) as Long Vacc Return Comment: 300 to 30000 : 0.3 – 30.0 (kV) 0.1kV unit at 10 to 30kV 0.01kV unit at 0.3 to 9.99kV 0: Normal receiving Excluding 0: Abnormal receiving The method is finished at completion of command analysis. The completion of acceleration voltage setting is notified by the VaccFinished event. If the return value is not 0, the VaccFinished event is not issued.
6.3.2 Completion of HV setting HVOnFinished (ErrorCode as Long) ErrorCode 0: Normal end 1: Impracticable 2: Abnormal end Comment: The completion message of SetHvOn Method. Completion of acceleration voltage setting VaccFinished (ErrorCode as Long) ErrorCode 0: Normal end 1: Impracticable 2: Abnormal end Comment: The completion message of SetVacc Method.
6.3 Specification of S-3400N External Communication (Option) 6.3.2.3 Magnification (1) Monitoring /Setting of Magnification Property Magnification monitoring Mag As Long Read Only 5 to 300000 : x5 – x300k Method Magnification setting SetMag (Mag as Long) as Long Mag 5 to 300000 :x5 – x300k Effective digit: 3 figures Return 0: Normal end 2: Abnormal end Comment: This method is finished after completion of magnification setting.
6.3.2 6.3.2.4 Working Distance (WD) (1) Monitoring/Setting of WD Property W.D. monitoring WD as Long Read Only 400 to 7000 : 4.00 – 70.00 (mm) Method W.D. setting SetWD (WD as Long) as Long WD 400 to 7000 : 4.00 – 70.00 (mm) 0.1mm unit 0: Normal end 2: Abnormal end Currently setting by 0.01mm unit is not possible. The method is finished after completion of W.D. setting. Return Comment: Event W.D. changing WDChange (WD as Long) WD 400 to 7000 6 - 21 : 4.00 – 70.
6.3 Specification of S-3400N External Communication (Option) 6.3.2.
6.3.2 6.3.2.6 Probe Current (1) Monitoring /Setting of probe current Property Probe current monitoring ProbeCurrent as Long Read Only 0 to 1000 : 0.0 – 100.0 Method Probe current setting SetProbeCurrent (ProbeCurrent as Long) as Long ProbeCurrent 0 to 1000 : 0.0 – 100.0 Return 0: Normal end 2: Abnormal end Comment: This method is finished after completion of probe current setting. Event Probe current changing ProbeCurrentChange (ProbeCurrent as Long) ProbeCurrent 0 to 1000 6 - 23 : 0.0 – 100.
6.3 Specification of S-3400N External Communication (Option) 6.3.2.7 Auto Functions (1) ABCC Method ABCC execute SetABC ( ) as Long Return Comment: 0: Normal receiving Excluding 0: Abnormal receiving This method is not completed until ABCC finished. The method is finished at completion of command analysis. The completion of ABCC is notified by the ABCFinished event. If the return value is not 0, the ABCFinished event is not issued. Please do not use other method until receiving the ABCFinished event.
6.3.2 (2) AFC Method AFC execute SetAFC ( ) as Long Return Excluding Comment: 0: Normal receiving 0: Abnormal receiving This method is not completed until AFC finished. The method is finished at completion of command analysis. The completion of AFC is notified by the AFCFinished event. If the return value is not 0, the AFCFinished event is not issued. Please do not use other method until receiving the AFCFinished event.
6.3 Specification of S-3400N External Communication (Option) 6.3.2.8 Stage (1) Stage information Property Chamber type reading ChamberType as Long Comment: Stage type reading StageType as Long Read Only 0: Standard specimen chamber Currently there is only standard specimen chamber, but maybe other type chamber will add in future.
6.3.2 5 axis moving SetStagePosition (X as Long, Y as Long, Z as Long, T as Long, R as Long) as Long X 0 to 100000000 : (nm) 100 nm Step Y 0 to 50000000 : (nm) 100 nm Step Z 5000000 to 70000000 : (nm) 100000 nm Step T -20000 to 90000 : x1000 (deg) 0.1 deg Step R 0 to 359900 : x1000 (deg) 0.1 deg Step Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: The stage is moved by 5 axis (X, Y, Z, T, R) Setting. The method is finished at completion of command analysis.
6.3 Specification of S-3400N External Communication (Option) 3 axis (XYR) moving SetStagePositionXYR(X as Long, Y as Long, R as Long) as Long X 0 to 100000000 : (nm) 100 nm Step Y 0 to 50000000 : (nm) 100 nm Step R 0 to 359900 : x1000 (deg) 0.1 deg Step Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: The stage is moved by 3 axis (X, Y, R) setting. The method is finished at completion of command analysis.
6.3.2 Home position moving SetStageHomePosition () as Long Return Excluding Comment: 6 - 29 0: Normal receiving 0: Abnormal receiving Move to Z=10mm The method is finished at completion of command analysis. The completion of SetStageHomePosition is notified by the StagePositionFinished event. If the return value is not 0, the StagePositionFinished event is not issued. The StagePositionChange event is periodically generated while the stage is moving.
6.3 Specification of S-3400N External Communication (Option) Home position moving 2 SetStageHomePosition2 () as Long Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: Move to Z=65mm The method is finished at completion of command analysis. The completion of etStageHomePosition2 is notified by the StagePositionFinished event. If the return value is not 0, the StagePositionFinished event is not issued. The StagePositionChange event is periodically generated while the stage is moving.
6.3.2 Event Stage position changing StagePositionChange (X as Long, Y as Long, Z as Long, T as Long, R as Long) X, Y, Z, T, R same as each items of GetStagePosition Comment: This event is generated when the stage position changed by SEM-GUI control, trackball control and external control. Completion of stage move StagePositionFinished (ErrorCode as Long) ErrorCode 0: Normal end 1: Impracticable 2: Abnormal end Comment: The completion message of each stage move method.
6.3 Specification of S-3400N External Communication (Option) 6.3.2.9 Vacuum Setting (1) Vacuum mode Property Vacuum mode reading VacuumMode as Long Read Only 0: High vacuum 1: Low vacuum Method Vacuum mode setting SetVacuumMode (VacuumMode as Long) as Long VacuumMode 0: High vacuum 1: Low vacuum Return 0: Normal end 2: Abnormal end Comment: This method is finished after completion of vacuum mode setting.
6.3.2 (2) Vacuum value Property Vacuum value monitoring Vacuum as Long Read Only 6 to 270 : 6 – 270 (Pa) Method Vacuum value setting SetVacuum (Vacuum as Long) as Long Vacuum 6 to 270 : 6 – 270 (Pa) Settable vacuum value 6, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 170, 200, 240, 270 Return 0: Normal end 2: Abnormal end Comment: This method is finished after completion of vacuum value setting.
6.3 Specification of S-3400N External Communication (Option) 6.3.2.10 Multi-purpose Command Extension command setting SetSemCommand (Command as String) as Long Command command string Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: For extension command in future. This method is finished after completion of extension command setting. The reply of this command is informed by SemCommandFinished Event. If the return value is not 0, the SemCommandFinished event is not issued.
6.3.3 6.3.3 6.3.3.1 Programming Example of Program Private cSCOConnector Private cSCO as SemCommunicationC. SemCommunicationConnector as SemCommunicationC. SemCommunication Set cSCOConnector = New SemCommunicationC . SemCommunicationConnector Set cSCO = cSCOConnector. SemCommunication Call cSCO. SemCommInitialize ‘Initialize cSCO.Mag = 1000 cSCO.WD = 1500 ‘Set Mag x1.0k ‘Set WD 15.
6.3 Specification of S-3400N External Communication (Option) 6.3.4 6.3.4.1 1. 2. Preparation Log-In as Administrator. Close all programs including S3400N. 6.3.4.2 1. 2. External Communication Setting Procedure (Setting of PC for S-3400N) Component Registration Insert the S-3400N installation CD-ROM in the CD-ROM drive. Open My Computer (Fig. 6.3-2). Fig. 6.3-2 3. Double click on the CD-ROM Drive (Fig. 6.3-3) in the My Computer. Fig. 6.3-3 4. Browse to Reg.bat file and Double click the file.
6.3.4 6. Click on Yes when a window as shown below appears (Fig. 6.3-6). Fig. 6.3-6 7. Click on OK when a window as shown below appears (Fig. 6.3-7). Fig. 6.3-7 8. Registry Editor Window Click on Yes when a window as shown below appears (Fig. 6.3-8). Fig. 6.3-8 9. Registry Editor Window Registry Editor Window Click on OK when a window as shown below appears (Fig. 6.3-9). Fig. 6.3-9 Registry Editor Window 10. Remove the S-3400N installation CD from CD-ROM Drive.
6.3 Specification of S-3400N External Communication (Option) 6.3.4.3 1. Security and DCOM Settings Open Control Panel. Fig. 6.3-10 2. Control Panel Window Click on Performance and Maintenance. Fig. 6.
6.3.4 3. Click on Administrative Tools. Fig. 6.3-12 4. 5. Administrative Tools Window Double click on Local Security Policy. (Shown in Fig. 6.3-13.) Double click on Local Policies, and then Security Options. (Shown in Fig. 6.3-14.) Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 6. Double click on Network access:Let Everyone permissions apply to anonymous users. (Shown in Fig. 6.3-14.) Fig. 6.3-14 7. Local Security Settings Window Check Enabled, and then click on Apply. (Shown in Fig. 6.3-15.) Fig. 6.
6.3.4 8. Confirm that Security Setting is Enabled for Network access:Let Everyone Permissions Apply to anonymous users as shown in Fig. 6.3-16, and then close the Local Security Settings window. Fig. 6.3-16 9. Local Security Settings Window Double click on Component Services in Administrative Tools window. (Shown in Fig. 6.3-17.) Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 10. Double click on Component Services, then Computers. (Shown in Fig. 6.3-18.) Fig. 6.3-18 Component Services Window 11. Right Mouse Click on My Computer and Select Properties from Action menu. Fig. 6.
6.3.4 12. Click on Default Properties. 13. Set Default Authentication level to None. click on Apply. Confirm the setting as in Fig. 6.3-20, and then For Service Pack 1 Fig. 6.3-20 For Service Pack 2 Default Properties Tab Window 14. Click on Default COM Security tab or COM Security tab. 15. Click on Edit Default under Access Permissions section. For Service Pack 1 Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 16. Click on Add button. (Shown in Fig. 6.3-22.) Fig. 6.3-22 Access Permission Window 17. Click on Advanced button as shown below. Fig. 6.
6.3.4 18. Click on Find Now button as shown below. Fig. 6.3-24 Select Users or Groups Window 19. Select Everyone, and then click on OK. Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 20. Click on OK button as shown below. Fig. 6.3-26 Select Users or Groups Window 21. Click on Edit Limits under Launch and Activation Permissions at Service Pack2. For Service Pack 1 Fig. 6.
6.3.4 22. Select Everyone at Group of user names (at Service Pack 2). Fig. 6.3-28 Launch Permission Window 23. Add check mark on Allow of Remote Launch and Remote Activation, and then click on OK (at Service Pack 2). Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 24. Click on Apply, and then OK to quit. For Service Pack 1 Fig. 6.3-30 For Service Pack 2 My Computer Properties Window 25. Double click on My Computer. Fig. 6.
6.3.4 26. Right Mouse Click on SemCommuniC.SemCommunication under DCOM Config items and select Property from Action menu. Fig. 6.3-32 is shown in Detail View. (Can be selected via View Menu and then Details.) Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 27. Under General Tab, Set Authentication Level to None. Fig. 6.3-33 Properties Window 28. Under Location Tab, confirm the setting as shown below (Fig. 6.3-34). Fig. 6.
6.3.4 29. Under Security Tab, Select Customize as shown in Fig. 6.3-35. 30. Click on Edit for Launch Permissions. Fig. 6.3-35 Properties Window 31. Click Add button, if Everyone is not shown as below under Group or user names (follow steps 15-19 to add Everyone). Click on OK to apply. Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 32. Click on Apply button. Fig. 6.3-37 Properties Window 33. Choose Identity Tab and confirm the setting as shown in Fig. 6.3-38. 34. Click on OK to quit. Fig. 6.
6.3.4 35. Select SemControlC.SemControl and do procedure from 22 to 31. Fig. 6.3-39 Component Services Window 36. Close window. 37. Turn off the Window Firewall at Service Pack 2. 38. Open the Control Panel from Start button. Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 39. Click on Network and Internet Connections. Fig. 6.3-41 Network and Internet Connection Window 40. Click on Windows Firewall. 41. Select Off (not recommended), and then click on OK. Fig. 6.3-42 Windows Firewall Window 42. Close window and restart the S3400N PC.
6.3.4 6.3.4.4 Setup of the External Communication Option External Communication I/F set up disk for the added option is inserted in the drive, and Setup.exe in FD is double-clicked. Select EDX Type, and click OK button. Fig. 6.3-43 Option Install Window Please the option must be added above, and logout from Administrator, log on again in the user who usually uses (“S-3400N" is registered in default.), and use SEM.
6.4 CD Measurement Function (Option) 6.4 CD Measurement Function (Option) 6.4.1 Outline 6.4.1.1 CD Measurement Function The CD Measurement function is designed for carrying out measurement of a critical-dimension or angle at a specified position on a SEM image, and then displaying and recording the result. The Measurement function comes in various modes - manual, automatic, successive measurement, simultaneous width and pitch measurement, and so on.
6.4.2 6.4.2 Specifications 6.4.2.1 Modes of CD Measurement (1) Manual Measurement Distance (X, Y, D, width and pitch) between cursors placed by manual operation is measured. An angle (T) between two cursor lines placed by manual operation is also measured. (2) Automatic Measurement The edges of specimens within a specified range are automatically detected and the distance (X, Y, width and pitch) is measured.
6.4 CD Measurement Function (Option) 6.4.3 Principle of CD Measurement 6.4.3.1 Edge Detection Algorithm in Auto Measurement Figure 6.4-2 shows the cross section and secondary electron signal of the typical specimen. As demonstrated in the figure, the intensity of secondary electron signal is higher at the edges of the pattern. In auto CD measurement, edge positions are detected using this characteristic of secondary electron signal. Measured pattern Secondary electron signal line profile Fig. 6.
6.4.3 (2) Threshold Level Method In this method the variation of image signal at the edges is detected upon cutting off at a desired threshold, and it is suitable when the sides of pattern edges are relatively linear. L Fig. 6.
6.4 CD Measurement Function (Option) 6.4.3.2 Linear Approximation Method Explained below is the linear approximation algorithm. Linear approximation method Image acquisition p(n) Preparation of profile [Refer to 6.4.3.2 (2).] s(n) Edge search direction Max. value dmax d peek Threshold level Th Slope line detection [Refer to 6.4.3.2 (3).] d(n) 0 Slope line s (n) Baseline start point Baseline area Baseline detection [Refer to 6.4.3.2 (4).] Baseline Length detection [Refer to 6.4.3.2 (5).
6.4.3 (1) Area Used for CD Measurement The area in each on-screen box cursor is used for CD measurement. Figure 6.4-6 shows the relationship between box cursor and measurement parameters. For "Design Value", specify a distance (µm) between box cursors. The "entire measurement area" is determined by a combination of parameters. For "Search Area", specify a number of pixels. When the distance between box cursors is changed using the mouse, it is automatically reflected at "Design Value".
6.4 CD Measurement Function (Option) “N” lines (b) Overlay area (a) Measured pattern (c) Fig. 6.4-7 (3) Waveform after overlay Poor S/N ratio of image Measured Pattern and Secondary Electron Signals Slope Line Detection To detect a slope line using a profile, the following differentiation is performed on profile "s (n)" as expressed below. d(n) = s(n + M) - s(n - M)................................................. (6.4.
6.4.3 (4) Baseline Detection The baseline is a straight line having no slope, which is determined by the peak position attained before, the "baseline start point" and "baseline area". The start point of the baseline is located outside or inside the peak position, and it corresponds to a position of data having differential coefficient "dbase" in the following expression of profile differentiation. dbase = dpeak |B| dpeak : B : .............................................................. (6.4.
6.4 CD Measurement Function (Option) 6.4.3.4 Measurement Accuracy and Error Factors Following is a description on measurement accuracy and error factors. (1) Measurement Reproducibility and Absolute Dimensional Accuracy In CD (critical dimension) measurement, the reliability of measured results can be evaluated in terms of variation of measured values and accuracy of mean value obtained by measuring the same dimension repeatedly.
6.4.3 (b) Methods for Improving Measurement Reproducibility It is recommended to use the SEM under fixed operating conditions (magnification, accelerating voltage, probe current, raster rotation angle, working distance, etc.) in CD measurement. If measurement under varied conditions is unavoidable, then calibration should be made under each of the conditions.
6.4 (3) CD Measurement Function (Option) Measurement Error Caused by Pixel Size or Image Resolution Described in this section are the measurement errors caused by pixel size or SEM image resolution. These errors are more conspicuous as the measured dimension becomes smaller. (a) Measurement Error Caused by Pixel Size In the CD measurement function, dimensions are measured by counting a number of pixels included within measurement cursors in the acquired SEM image of 640 × 480 pixels.
6.4.3 (b) Measurement error Caused by SEM Image Resolution Image resolution can be regarded as the minimum dimension where sample information can be reproduced in a form of brightness (contrast) change. Thus there is no meaningful contrast when a dimension is smaller than the image resolution. Such an area of no contrast is equivalent to a pixel because there is also no contrast in a pixel area.
CD Measurement Function (Option) 20 Magnification: 150 k× Magnification: 50 k× 15 Measurement error (%) 6.4 Magnification: 20 k× 10 5 0 0.01 1 0.1 Measured dimension [µm] Fig. 6.
6.4.4 6.4.4 Description of Windows Used in Measuring Operation Following is a description of the windows used in CD measurement. 6.4.4.1 Starting CD Measurement Function on the tool For starting CD measurement on S-3400N GUI, click CD measurement icon button area of the Operation panel or select CD Measurement command in Analysis menu. To start on SEM Data Manager, click Measure icon or select CD Measurement command in Processing menu. 6.4.4.
6.4 CD Measurement Function (Option) 6.4.4.3 CD Measurement Window Use this window to set measurement and calibration conditions and to execute measurement. (1) (2) (3) (4) (5) (6) (7) (9) (19) (8) (10) (11) (12) (13) (15) (14) (16) (17) (18) Fig. 6.4-10 (1) CD Measurement Window Condition Combo Box Select one of the registered measurement conditions. registered measurement condition No. and a caption.
6.4.4 (4) Type of Measurement Specify a type of measurement. (a) Standard button Select Standard for a single dimension measurement in X or Y direction or angle. (b) W&P button Select this button for simultaneous width and pitch measurement. (c) Multiple check box Click this for setting successive measurements. been selected. (d) Profile check box Click this for displaying a line profile. Auto.
6.4 CD Measurement Function (Option) (8) Set Button Displays the measurement cursor. The shape of measurement cursor varies with the type of measurement and measurement mode. (9) Measure Button Executes the CD measurement. (10) Cursor Color Indication Specify a color for the measurement cursor. Color changes in the order of white, red, green, yellow, blue, violet and light blue at each click of the button.
6.4.4 6.4.4.4 Measurement Condition Window This is used to edit the measurement conditions. (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (13) (11) Fig. 6.
6.4 CD Measurement Function (Option) (1) Entry No. combo Box Select a registration No. for measurement conditions. A maximum of 16 measurement conditions can be registered. An asterisk (*) appears at the right of an already registered No. (2) Lock Check Box Put a check here to inhibit change of the conditions. (3) Caption Box Enter a caption for the registered No. characters. (4) Entry can be made in a maximum of 16 half-size Type Select a measurement type.
6.4.4 (c) Angle button Selects an angle measurement. Manual. This is selectable when measurement mode is (7) Edge Detect Direction Select an edge detect direction of the cursor box that specifies the position including edge to be detected, when X or Y has been selected as the measuring direction. This is selectable when measurement mode is Auto. The icon changes with the type of measurement and measurement mode.
6.4 CD Measurement Function (Option) (f) Design Value combo box Specify an interval between cursors (two boxes) for CD measurement. This parameter is specifiable in a range of 0.1 to 200 µm. (g) Design Pitch combo box Specify a pitch in the case of simultaneous width and pitch measurement. This parameter is specifiable in a range of 0.1 to 200 µm. (h) Search Area combo box Specify a width of cursor box (edge detection area).
6.4.4 NOTICE: Relation between the size of image and the size of cursor box In case using the CD measurement function on live or frozen SEM images, the size of image is 1280 x 960 pixels in Full Screen mode and 640 x 480 pixels in Small Screen mode. The size of pixel itself is the same for both screen modes. The same parameter set results the same cursor box size for both screen modes.
6.4 (9) CD Measurement Function (Option) Edge Detection Area Set parameters specific for each edge detection method. (a) Linear Approximation button Specifies the Linear Approximation method for auto edge detection. four parameters are effective for this method. The following (b) Threshold Level combo box Specify a threshold value to be used for linear approximation. This parameter is selectable in a range of 5 to 95.
6.4.4 (g) Threshold Level combo box Specifies a threshold value to be taken in the threshold level method. A numeric value may be input with respect to a difference of "100" between minimum and maximum in signal variation on the edge part. If "50" is specified, for instance, the intermediate threshold level is used. This parameter is selectable in a range of 5 to 95. (10) Apply Button Applies the form of cursor under display according to the set value. registration No. of the measurement conditions.
6.4 CD Measurement Function (Option) 6.4.4.5 Calibration Window This is used to carry out calibration. (1) (2) (3) (5) (4) (6) (13) (7) (8) (9) (12) (10) (11) Fig. 6.4-13 (1) Calibration Window Entry No. Combo Box Specify a No. for registering the calibration. already registered No. An asterisk (*) appears at the right of an (2) Caption box Enter a caption for identifying the calibration with up to 16 characters. (3) Calibration Condition Box Indicates the SEM conditions at calibration.
6.4.4 (4) Set Button Displays a measurement cursor for calibration in accordance with the measurement parameters. For calibration using manual mode, align the measurement cursor in both X, Y directions with a position of known dimensions on the screen. For calibration in auto mode, adjust so that the cursor box encloses the edges of the pattern under measurement. (5) Measure button Measures the distance specified by the measurement cursors.
6.4 CD Measurement Function (Option) (12) Close Button Closes the Calibration window. (13) Measured Value indication Displays the measured result. When the Multi checkbox is not checked, the latest measurement result is indicated in the Average box. When the Multi checkbox is checked, Average, 3 Sigma, Max and Min value is calculated and indicated by each measurement operation. 6.4.5 Operation 6.4.5.1 Flow of Measuring Operation Following is the general flow of measuring operation.
6.4.5 6.4.5.3 (1) Start of CD Measurement Function In the case of the SEM main unit, click the CD Measurement button on the tool button area of the Operation panel or select Measurement in the Analysis menu. To start on the SEM Data Manager, use Measure button CD Measurement menu command. The CD Measurement window will open. Fig. 6.
6.4 CD Measurement Function (Option) 6.4.5.4 (1) Setting Measurement Parameters Selecting Registered Measurement Parameters (a) Measurement parameters can be saved and then called out later to allow efficient measurement of a number of samples under predetermined parameters. (b) To call out registered parameters, select the desired parameters from those displayed in the Entry No. box.
6.4.5 (a) Specify a registration No. according to the setting of the Entry No. combo box. (b) Enter a caption in the Caption box that will facilitate calling out measurement parameters. (c) Set the type of measurement and measurement mode corresponding to the measurement to be executed. (d) For auto measurement, set the measurement parameters or edge detection parameters. (e) Click the Apply button to apply the set measurement parameters to the process.
6.4 CD Measurement Function (Option) 6.4.5.5 Calibration The accuracy of measured values depends on the accuracy of image magnification unless calibration has been made. Factors that affect the accuracy include accelerating voltage, scan speed, magnification setting, working distance, raster rotation angle and others. By fixing these parameters and conducting calibration with a sample of known dimensions, measurement can be made with an even higher accuracy.
6.4.5 (3) Carrying out Calibration (a) With the CD measurement function of the SEM main unit, set a sample for calibration into the SEM and set the instrument conditions to those actually used for measurement. Since the value of working distance is calculated from the focused objective lens current, adjusting the focus causes a variation in the working distance value.
6.4 CD Measurement Function (Option) (c) In measurement with the SEM data manager, use an image under the same SEM parameters as the image to be measured. (d) Set measurement parameters such as measurement mode and type of measurement on the CD Measurement or Measurement Condition window. When Manual measurement mode is selected, calibration can be performed in both X and Y-axis directions.
6.4.5 (h) Click the Set button to display the measurement cursor for calibration according to the measurement parameters. For calibration in Manual mode, align the measurement cursors (both X and Y directions) with a position of known dimensions on the screen. For calibration in Auto mode, make sure the cursor box encloses the edges of the measurement pattern. (i) Click the Measure button. Measured Value box.
6.4 CD Measurement Function (Option) In case of measurement on the SEM Data Manager, a new image can be displayed by clicking a thumbnail. When new image file is opened during multi point calibration, recording condition will be compared with that of previous measured image. If recording condition of old and new images do not match, a warning message will be shown. You can continue measurement including data of old image, or start measurement newly clearing old data.
6.4.5 6.4.5.6 Measurement Operation The following six kinds of measurement are mainly available. • • • • • • (1) Manual measurement Successive manual measurement Auto measurement Successive auto measurement Width & pitch manual measurement Width & pitch auto measurement Manual Measurement (a) With the measurement type at Standard, measurement mode at Manual and measuring direction at X or Y, click the Set button on CD Measurement window, and measurement cursors as shown in Fig. 6.4-19 will appear. Fig.
6.4 CD Measurement Function (Option) Fig. 6.4-20 Manual Measurement Result (d) In the CD measurement function of the SEM main unit, click the Run button again and the system will return to image observation. (e) By setting the measuring direction to Angle and clicking the Set button of CD Measurement window, a measurement cursor that permits specifying the angle will appear as in Fig. 6.4-21. Fig. 6.
6.4.5 (f) Drag the cursor with the mouse and align it with the part to be measured, then click Enter button. Angle measurement can thus be done as in Fig. 6.4-22. Calibration is not performed in the case of angle measurement. Fig. 6.4-22 (2) Angle Measurement Result Successive Manual Measurement (a) By selecting Multiple under manual measurement mode and under the same measurement parameters, successive manual measurement can be carried out.
6.4 CD Measurement Function (Option) Fig. 6.4-23 (3) Successive Manual Measurement Results Auto Measurement (a) With the measurement type at Standard, measurement mode at Auto and measuring direction at X or Y, click the Set button on CD Measurement window, and the auto measurement cursors will appear as shown in the figure. The measurement cursor box will be of the size set previously in the measurement parameters.
6.4.5 (c) Set the cursors and click the Measure button to start measurement. When there are two or more measurement points, a "+" sign appears at the location where an edge was detected for each measurement point, and when the measurement of all the points is finished, the cursor moves to the part representing the average value of the points. (d) When Line Profile has been set, a signal waveform (line profile) will appear. Fig. 6.
6.4 (4) CD Measurement Function (Option) Successive Auto Measurement (a) Set Multiple in the measurement parameters the same as for auto measurement, then successive auto measurement can be achieved. Click Set button on the CD Measurement window and measurement cursors as for auto measurement will appear. (b) Drag the measurement cursor box with the mouse as in auto measurement, align the cursors with the part to be measured, then click Measure button and the measured result will appear.
6.4.5 Fig. 6.4-27 Width & Pitch Manual Measurement Cursors (c) Drag the cursor via the mouse to the edge to be measured, and set the position. The side where the "+" sign is located represents the width. (d) Align the cursor with the part to be measured as in manual measurement, click the Enter button and then the measured results will appear as in Fig. 6.4-28. Fig. 6.
6.4 CD Measurement Function (Option) (6) Width & Pitch Auto Measurement (a) Set the measurement type to W&P, measurement mode to Auto and measuring direction to X or Y, then width and pitch can be simultaneously measured automatically. (b) Click Set button on CD Measurement window. The auto measurement cursors will appear. The measurement cursor box will be of a size set before in the measurement parameters. Fig. 6.
6.4.5 Fig. 6.
6.4 (7) CD Measurement Function (Option) Zoom function A partial image besides the cursor is magnified and shown on the Zoom window. Check the Zoom box to use the zoom function. The crosshair cursor corresponds to the cursor position. It will be useful for accurate fitting of cursor to the point to be measured in manual measurement mode. Fig. 6.4.31 Image Exchange during CD Measurement (SEM Data Manager) The target image can be changed without closing CD Measurement dialog window.
6.4.5 6.4.5.7 Recording Measured Data The image can be photographed or saved with measured data as is shown on the screen. Also the measurement data is saved in text format or in Microsoft Excel format. (1) Photographing an image with measured data When operating on S-3400N, click Memory Photo button, or select Memory Photo command in the File menu. (2) Saving an image with measured data When operating on S-3400N, click Save button on the Control panel, or select Direct Save command in the File menu.
6.4 CD Measurement Function (Option) The following table is an example of measured data saved in csv format and opened with Microsoft Excel. (Measurement on SEM Data Manager) Where 3 times of width-pitch (left side width), width-pitch (right side width), 5 times of horizontal and vertical width and 5 times of angle are measured and then, saved. Table 6.4-1 The Example of Measured Data File Comment Mode 測長hhh.jpg 2 W&P 測長hhh.jpg 2 W&P 測長hhh.
APPENDIX Message List The table below lists messages that can appear when the S-3400N is being used. Messages without a message code are for instructions, simple notifications, or confirmation messages; they are not included in the table below. Message codes listed below that are marked with an * appear as error codes. Code Message Text *1301 Repair unsuccessful. *1302 Optimize unsuccessful.
Code Message Text *2032 Timeout error. 2034 Rotate R-axis with 90 degree pitches. *2035 Failed in the capture. Explanation and Countermeasure This message will be shown when operations such as auto focusing did not end within specified period. If it happens frequently, contact a service engineer. The rotation angle is limited to only 90 deg steps. Image capturing failed. If the error is repeated, contact a service engineer.
Code Message Text Explanation and Countermeasure 2070 For correct operation of the PCSEM, set the Display properties at 1280x1024 pixels for the desktop area. And confirm setting of the color palette and the refresh rate are optimal value to PC and the monitor. (Recommended setting: Full color (about16illion), 60Hz or 75Hz) During program startup, the system checks the Desktop settings, and if the settings indicated on the left are not in effect, it generates this message.
Code Message Text Explanation and Countermeasure 2143 User name is too long. Up to 64 characters are acceptable. Use User name shorter than 64 characters. 2144 Invalid Sample name. The Sample name possibly includes characters not allowed (/ : ; , * ? “ < > |). 2145 Sample name is too long. Up to 40 characters are acceptable. Use Sample name shorter than 40 characters. 2146 Invalid Keyword. The Keyword name possibly includes characters not allowed (/ : ; , * ? “ < > |). 2147 Keyword is too long.
Code Message Text Explanation and Countermeasure 4503 Please input caption. Input Caption before applying calibration or measurement parameters. 4504 Invalid caption. The caption possibly includes characters not allowed (/ : ; , * ? “ < > |). 4505 Caption is too long. Use Caption shorter than 16 characters. 4510 Over maximum number of measurement. Number of measurements on an image is limited. Save results, erase measured data and then repeat measurement.
Code Message Text 5040 Cannot execute while not initialize X axis Explanation and Countermeasure Initialization of each axis in progress. initialization ends. Wait until 5041 Cannot execute while not initialize Y axis 5042 Cannot execute while not initialize Z axis 5043 Cannot execute while not initialize T axis 5044 Cannot execute while not initialize R axis *5075 Stage over run error (X-CCW) *5080 Stage over run error (X-CW) This message will be shown when each axis is driven over its limit.
Code Message Text Explanation and Countermeasure Due to a conflict between specimen size, specimen height, the type of detector/unit used, this operation cannot be performed. The current settings should be checked and 6005 The selected detector/unit cannot modified as appropriate. be set by present sample height. 6004 The selected sample height cannot be set by present detector/unit. 6006 The selected sample size cannot be set by present sample height.
Code Message Text 7069 Auto alignment process has not completed due to un-suitable SEM conditions. Set SEM conditions according to the following procedure. Explanation and Countermeasure This message appears if an error occurs in the midst of aperture alignment or automatic stigma axial alignment. The corrective action indicated in the message should be taken. (1) In the case where focus is improper: The sample must suit focus to the scope of control or suit the stage position.
Code Message Text *7304 Evacuation system is not working. Check power switch. Explanation and Countermeasure The system fails to start due to an evacuation system error. Shut down the PC, turn off the Main switch, wait 30 minutes, and then restart the system. If turning off the Main switch does not shut off the power, turn off the Main breaker in the back of the system, and restart the system after the power is completely shut off. If the problem persists, call a service engineer.
Code Message Text Explanation and Countermeasure This is a TMP vacuum pump error. Shut down the PC, turn 7315 The error of the TMP vacuum off the Main switch, wait 30 minutes, and then restart the pump was detected. system. If the problem persists, call a service engineer. Shut down the PC and turn the [MAIN] switch off. Restart the microscope after about half an hour. When this message is shown again, contact a service engineer. 7316 The vacuum exhaust with the TMP vacuum pump was not normally done.
Code Message Text Explanation and Countermeasure 7320 An abnormal power supply (Vacc) in the electron gun control power supply was detected. Shut down the PC and turn the [MAIN] switch off. Restart the microscope after about half an hour. When this message is shown again, contact a service engineer. This message appears if the electron gun-controlling power supply unit detects an error during a self test.
INDEX A AAA(Auto Axial Alignment) .................................................................................................. 3-27 ABA(Auto Beam Alignment) .................................................................................................. 3-20 ABCC(Auto Braightness and Contrast Control) ................................................... 2-28, 3-20, 3-44 ABS(Auto Beam Setting) .......................................................................................................
C Condition Condition Memory ...................................................................................................... 3-128 Operating Condition.................................................................................................... 3-128 Photo Condition.......................................................................................................... 3-106 Electron Optical Column..........................................................................................
I Image Brightness ....................................................................................................................3-44 Image Navigation.....................................................................................................................3-79 Image Observation ....................................................................................................... 2-42, 3-31 Image Processing.....................................................................................
R Raster Rotation .......................................................................................................... 2-45, 3-134 Recording ........................................................................... 2-33, 3-95, 3-96, 3-108, 3-109, 3-110 RISM ..................................................................................................................................... 3-68 Rotary Pump ...............................................................................................
W WD (Working Distance)............................................................................ 2-40, 3-20, 3-55, 3-159 Window .............................................. 2-14, 2-26, 2-27, 3-96, 3-101, 3-102, 3-116, 3-161, 3-163 X X-ray Analysis Mode............................................................................................................
