JEOL JSM-6060LV SCANNING ELECTRON MICROSCOPE Insert Nickname Here Operating Instructions
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N M I C R O S C O P E Table of Contents 1 Safety 2 5 INTRODUCTION 3 BACKG ROUND Background Information 4 References 4 3 SAMPL ES Sample Holders 7 Sample Preparation 7 4 OPERA TION Instrument Startup 8 Sample Loading 8 Getting an Image 9 Moving Around 9 Image Scanning 10 Zooming In (or Out) 10 Other Toolbar Buttons 10 System Shutdown 10 1 PHOTO GRAPHY Image Options 11 Lower Resolution (but quick) Photos 11
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N Introduction M I C R O S C O P E 1 T he JEOL JSM-6060LV is a state-of-the-art scanning electron microscope that features a low vacuum for observation of non-conductive specimens, a fully automated electron gun, a backscattered electron detector for atomic number contrast imaging, fully integrated digital control, motorized x-y stage, and a NORAN System 6 elemental analysis system (see separate operating instructions for the NORAN system).
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N Background M I C R O S C O P E 2 The scanning electron microscope (SEM) is one of the most versatile instruments for the examination and analysis of the microstructural characteristics of solids. Although the SEM and optical microscope share the same primary function – making microstructural features and objects visible to the human eye – the scanning electron microscope offers some distinct advantages over the optical microscope.
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N M I C R O S C O P E The basic components of a SEM are the vacuum system, electron gun, lens system, electron detector, imaging system, and the electronics associated with these components. The vacuum system is necessary to minimize the interference of air particles with the electron beam and to prevent rapid oxidation of the tungsten filament.
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N M I C R O S C O P E Samples T 3 he JEOL JSM-6060LV in standard high vacuum operating mode can handle a variety of sample types. The low vacuum mode enables the instrument to handle nonconductive samples, including organic materials (polymers, etc.), ceramics and glasses, and biological samples. Sample Holders Please use clean, powder-free gloves when handling the sample holders and loading your samples into the instrument.
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N M I C R O S C O P E 2. Remove excess lint, dust, moisture, and other debris from your specimen, unless you want to examine those things. 3. Use the sputter coater to create a conductive gold coating on the surface of your sample. See separate operating instructions for the sputter coater. 4.
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N Instrument Operation T M I C R O S C O P E 4 his section will walk you through the basic operation of the scanning electron microscope. You will follow a series of tasks that includes • Powering up the instrument, • Loading your sample, • Evacuating the chamber, • Turning on the electron gun, and • Gazing at some wonderful high magnification images. Instrument Startup 1.
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N M I C R O S C O P E 6. Close the chamber door by gently pushing it forward until it stops. 7. Press and hold the EVAC button (on the front of the instrument) until it lights up green. 8. WAIT for evacuation of the chamber (about 1 minute). While you’re waiting, go to the next section – Software. Getting an Image 1. Double click on the SEM Main Menu icon to open the SEM software.
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N M I C R O S C O P E 3. Tilt. Turn the knob at the lower right side of the chamber door assembly to tilt your specimen. BE CAREFUL when adjusting the sample tilt – you don’t want to run your sample into anything inside the column. 4. Height. Sample height may be changed by manually adjusting the y-axis position knob at the top of the door assembly.
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N M I C R O S C O P E Photography A 5 cquiring an image from the SEM is relatively easy, but there are quite a few options for live image scanning and corresponding image resolution. This section outlines several options for acquiring digital images of different resolutions, and it provides a few general tips for good SEM photos. Image Options The most commonly used options for digital images are outlined in the following table.
J E O L J S M - 6 0 6 0 L V S C A N N I N G E L E C T R O N M I C R O S C O P E 4. Once the image is frozen, click the Save button above the image, select a save directory, type a filename, select a file format, and click Save. Higher Resolution (slower) Photos 1. Press the green Scan2 button on the toolbar. 2. Carefully adjust the focus and stigmation settings at a higher magnification.
