CyberOptics WaferSense® APS3 User’s Guide
Table of Contents General Information ...................................................... ii Laser and Hazard Warning Labels...................................................iii Technical Support............................................................................ iv Chapter 1 Introduction.....................................................................................1.1 Controls and Indicators ..................................................................1.
Table of Contents Selecting the Particle Size to Graph..................................................... 3.17 Displaying Particle Density or Frequency ........................................... 3.17 Changing the Vertical Scale.................................................................... 3.18 Changing the Horizontal Scale ............................................................. 3.19 Changing the Averaging Interval .......................................................... 3.
Table of Contents Chapter 5 Maintaining Your APS3.................................................................. 5.1 Annual Factory Calibration and Battery Replacement .................. 5.3 Battery Use and Disposal ............................................................... 5.4 Chapter 6 Specifications.................................................................................. 6.1 WaferSense APS3 Specifications .................................................... 6.
General Information Note: This manual is for Airborne Particle Sensor technology products including WaferSense APS3 and PanelSense APS-FPD. The devices may also be referred to as WaferSense APS in the software section but is applicable to all form factors using APS3 technology. WaferSense and PanelSense Device and Link Changes or modifications not expressly approved by CyberOptics Corporation, may void your authority to operate the APS device.
Static Sensitive Components: Observe precautions for static sensitive components. The exclamation point within an equilateral triangle is intended to alert the user to the presence of important operating and maintenance instructions in the literature accompanying the device. Disposal: The product must not be disposed of with normal waste. Instead, it is your responsibility to dispose of your waste equipment by arranging to return it to CyberOptics for recycling.
Labels on Devices Laser and hazard labels as they appear on the APS3 devices. WaferSense and ReticleSense Technical Support Technical support is available from CyberOptics Corporation. E-mail: CSsupport@cyberoptics.com Phone: +1 763-542-5000 +1 800-366-9131 (US and Canada only) WaferSense and ReticleSense are registered trademarks, and ParticleSpectrum are trademarks, of CyberOptics Corporation. Third-party brands and names are the property of their respective owners.
Chapter 1 Introduction The CyberOptics WaferSense® Airborne Particle Sensor 3 (APS3) measures airborne particles inside semiconductor process equipment, and PanelSense™ Airborne Particle Sensor - Flat Panel Display (APS-FPD) measures airborne particles for flat panel display manufacturing. Throughout this document, all devices in this family will be referred to as “APS.” The ParticleSpectrum™ software application makes it easy to view particle measurements in realtime.
Chapter 1. Introduction Carrying Case Contents: APS3 Device Wireless Link Charging Case Software Figure 1.3 APS3 Components See Appendix B – APS-FPD for additional information regarding PanelSense APS-FPD and its components. 1.
Chapter 1. Introduction The APS3 Controls and indicators are visible on the outside of the device as shown below. Micro USB power connector LED indicators “On” reset switch “Off ” Reset switch “Connect/Pair” switch Figure 1.2 APS3 and APS-FPD unit. Controls and indicators shown on APS3 300mm and APS-FPD. 1.
Chapter 2 Installing Your APS3 This chapter describes the procedures you need to perform to install your APS system and get it ready for use.
Chapter 2. Installing Your APS3 Installing the ParticleSpectrum APS3 Software To install and run the APS software ParticleSpectrum, your computer must have the following: • Windows 7 (32-bit or 64-bit), Windows 8, Windows 10 operating systems • One free high-power USB 1.1 or USB 2.0 port To install the APS software, do not plug in the link before you start. The software must be installed first using the following steps: 1. Log on using an account with Administrator privileges. 2.
Chapter 2. Installing Your APS3 4. After you complete the instructions for all of the wizard screens, click Close. Figure 2.2: Final Software InstallShield Screen By default, the Setup program installs the ParticleSpectrum applications in a new program group called CyberOptics. Setup also installs an online copy of this user’s guide, which is available from the ParticleSpectrum Info menu and in the CyberOptics program group in the Windows Start menu. Note: The WaferSenseInstaller.
Chapter 2. Installing Your APS3 Link Device Drivers If the Link Device drivers do not install correctly, you can manually install them by navigating to the Drivers folder when the WaferSenseInstaller.exe completes installation. Navigate to your local disk and follow (C:\Program Files (x86)\CyberOptics\WaferSense\Drivers\FTDI) and click DPInst_x64.exe to run the Link Device Installer. Figure 2.3: Link Device Install Wizard 1. Click Next > and the wizard automatically completes the link installation.
Chapter 2. Installing Your APS3 Installing the Wireless Link Before starting the wireless link installation, complete “Installing the WaferSense APS Software,” on page 2.2. To install the wireless link: 1. Turn on your computer. 2. Locate an unused, high-power USB port on your computer. The APS3 wireless link module requires a high-power USB port, such as the built-in ports on your computer and ports on USB hubs that have power cords. Unpowered USB hubs won’t work. 3.
Chapter 2. Installing Your APS3 Checking Communications Between the Link and the APS3 Device To complete the installation, verify that the APS device and link can communicate: 1. The APS operates from an internal rechargeable battery. Before using the APS for the first time, charge it for two hours. For information on checking the charge on the battery and the procedure for recharging, see “Using the Rechargeable Battery,” on page 3.24. 2. On the APS, there are reset buttons as described in Chapter 1.
Chapter 2. Installing Your APS3 Registering Your APS for Calibration Service To maintain optimum performance, every twelve months you should have your APS calibrated and the battery replaced. These services can be performed only at the factory. To help you keep track of the next service date so you can schedule this service when it is convenient, register your APS device with the factory. When you start the ParticleSpectrum application (see “Running the ParticleSpectrum Application,” on page 2.
Chapter 2. Installing Your APS3 Running the ParticleSpectrum Application To start the ParticleSpectrum application: 1. From the Windows Start > Programs menu, choose CyberOptics > ParticleSpectrum. The ParticleSpectrum application starts, as shown in Figure 2.5. Initializing communications usually takes less than a second. For information on using ParticleSpectrum, see Chapter 3 “Using Your APS3.” If the APS3 device has not been registered, ParticleSpectrum will display the Calibration Registration dialog.
Chapter 2. Installing Your APS3 2. If ParticleSpectrum displays the APS Calibration Registration dialog, as shown in Figure 2.6, you haven’t registered your APS device. Follow the instructions in the dialog to complete the registration. Figure 2.6: Calibration Registration Dialog 2.
Chapter 2. Installing Your APS3 Technical Support CyberOptics offers free technical support to customers. If the APS hardware or software appear to be malfunctioning, please contact us, and we’ll be happy to assist you. When you contact us, please make sure that you have the following information available: • A detailed description of the problem you are having, including the exact text of any error messages and a list of steps to reproduce the problem.
Chapter 2. Installing Your APS3 Technical support: • Toll free: +1 800-366-9131 (US and Canada only) • E-mail: CSsupport@cyberoptics.com • Internet: www.Cyberoptics.com 2.
Chapter 3 Using Your APS3 This chapter gives you instructions for performing the following tasks with the Airborne Particle Sensor 3 (APS3) device: • Opening and closing the charging case • Using the APS3 device buttons and status lights • Making a simple particle measurement run • Setting the purge and measurement times • Monitoring for excessive particle levels • Recording the particle measurements • Configuring the display • Monitoring the operating temperature • Using the rechargeable battery • Monitor
Chapter 3. Using Your APS3 Opening and Closing the Charging Case The APS3 device comes in a plastic charging case that is used for storing it when not in use and for charging the rechargeable battery in the APS3 device (see “Using the Rechargeable Battery” on page 3.25). The APS3 device should be stored in the sealed charging case when not in use. The charging case is air-tight. After air transport it may be necessary to relieve the pressure differential in order to open the case.
Chapter 3. Using Your APS3 Using the APS3 Controls APS3 devices are designed to operate “hands free” in normal use. • • • • The unit is turned on by inserting the unit in the charging case and applying power to the charging case. The unit is completely turned off by activating the “shutdown” button in the ParticleSpectrum software.. A “shutdown” turns off all internal electronics in the APS3. After a shutdown the unit must be restarted in the charging case.
Chapter 3. Using Your APS3 Making a Simple Particle Measurement Run The APS3 device detects particles by size, sending the data to the ParticleSpectrum application in nearly real time. ParticleSpectrum displays the readings graphically and numerically, showing particle measurements by particle size. You can place the APS3 device in a piece of equipment, run the equipment through its paces, and watch the ParticleSpectrum display for particle measurements that might indicate a problem with the equipment.
Chapter 3. Using Your APS3 Figure 3.3: Reading the ParticleSpectrum Display • Numerical and graphical displays. The top-left quadrant of the ParticleSpectrum display shows the particle measurements in numerical form. As the APS3 device detects particles, it assigns them to “bins” based on particle size. The displayed numbers are particle measurements averaged over a time interval (see “Changing the Averaging Interval,” on page 3.19).
Chapter 3. Using Your APS3 • Particle frequency and particle density. ParticleSpectrum displays particle measurements as either particle frequency (number of particles per unit time) or as particle density (number of particles per volume). For more information, see “Displaying Particle Density or Frequency,” on page 3.17. The other features of the ParticleSpectrum display are described later in this chapter. 3.
Chapter 3. Using Your APS3 Setting the Purge and Measurement Times When you click START, the APS device measures particles for the specified measurement time, or until you click STOP. Prior to beginning the measurement, to purge the particle sensor, the APS wafer runs its fan for a period of time without measuring particles. You can specify the times for both purging and measurement. Typically a purge time of 60 seconds clears the APS device of residual particles prior to starting a new measurement.
Chapter 3. Using Your APS3 Monitoring for Excessive Particle Levels You can use the Go/No-Go feature in ParticleSpectrum to monitor particle measurements for sustained excessive levels, to indicate when average measurements exceed your specified thresholds. When a Go/NoGo alarm is active, and a measurement is in progress, the Go/ No-Go Alarm area of the display, located in the upper right corner of the screen, indicates the current Go/No-Go condition as shown in Figure 3.5.
Chapter 3. Using Your APS3 To set the Go/No-Go threshold: 1. Click Configure Go/No-Go (see Figure 3.6). Configure Go/No-Go Figure 3.6: Setting the Go/No-Go Thresholds The Set Go/No-Go Threshold dialog is displayed, as shown in Figure 3.7. Threshold type Threshold Settings Figure 3.7: Set Go/No-Go Threshold Dialog 2. Under Threshold Type, select either a Frequency Threshold alarm or a Density Threshold alarm. To disable the alarm, select None.
Chapter 3. Using Your APS3 displayed in the main ParticleSpectrum window are frequency or density measurements. You need to set that display choice in the main window (see “Displaying Particle Density or Frequency,” on page 3.17). 3. Under Threshold Settings, specify the frequency or density units from the Measurement Units menu, the numerical value of the alarm No-Go Threshold, and the bin to apply the threshold to by selecting an option from the Particle Sizes drop-down menu.
Chapter 3. Using Your APS3 Recording the Particle Measurements You can record the particle measurement data to a log file and view the file in the Review feature. For information on log files, see “Viewing Log Files,” on page 4.1. Log files include the particle measurement data and user-specified data (see “Including User Specified Information in the Log File,” on page 3.13). Particle measurements are recorded at intervals of one second, regardless of the horizontal scale display.
Chapter 3. Using Your APS3 Placing Marks in a Log File At the start of recording and at No-Go and other events, ParticleSpectrum automatically places marks in the log file. In addition to marks created automatically by ParticleSpectrum, you can manually create your own marks in a file while you are recording, and you can add annotations to the marks. Adding Marks Manually To manually add a mark to a log file: 1. Choose the menu Settings > Add Marker Options > Show Annotation Dialog.
Chapter 3. Using Your APS3 3. In the Annotate Mark dialog, type the text you want to record with the mark location in the file and click OK. You can’t add another mark until you click OK. If you don’t want to be prompted with the Annotate Mark dialog when you click Add a Mark, the next time the dialog appears, check Don’t show this dialog and click OK.
Chapter 3. Using Your APS3 Log File Directory Location By default, ParticleSpectrum writes log entries to the directory C:\WaferSense\APS Files\. If you prefer, you can specify a different directory (see “Changing the Log File Directory,” on page 3.16). Log File Names By default, log file names are automatically assigned by ParticleSpectrum and consist of the serial number for the APS device followed by the date and time (see Figure 3.12). HV000000 2007-11-12 15-03-19.
Chapter 3. Using Your APS3 2. In the Output file name prefix box, enter the text you want to replace the APS wafer serial number in log file names. 3. Click anywhere off the screen to close the Settings Menu. Importing Log Files Into Other Applications If you want to be able to import log files into other programs, such as MATLAB or Microsoft Excel, you need to have ParticleSpectrum write log files in comma-delimited format (also called comma-separated-values or CSV files) as well as the .aps file format.
Chapter 3. Using Your APS3 The layout of the data in the comma-delimited file is in columns as displayed in Figure 3.15. Marks are also saved. ParticleSpectrum writes data to the file once per second Figure 3.15: Layout of Comma-Delimited File Changing the Log File Directory By default, ParticleSpectrum writes log entries to the directory C:\WaferSense\APS Files\. If you prefer, you can specify a different directory. To change the log file directory: 1.
Chapter 3. Using Your APS3 Configuring the Display You can change the way particle measurements are displayed by selecting which particle size bin to graph, by choosing to display either particle density or particle frequency, by changing the vertical and horizontal scales, by changing the averaging interval, and other elements in the display. Selecting the Particle Size to Graph You can choose which of the cumulative particle measurement bins to graph.
Chapter 3. Using Your APS3 Density or Frequency Figure 3.17: Displaying Particle Density or Frequency Changing the Vertical Scale You can set the vertical scale for the particle measurement graph. The scale is in particles per unit time when displaying particle frequency, or in particles per unit volume when displaying particle density. Particle measurement values that are too large to display with the current scale setting may appear to be off screen.
Chapter 3. Using Your APS3 Changing the Horizontal Scale You can set the horizontal scale for the particle measurement graph. The scale will list time in seconds, or can list Absolute Time Labels. The horizontal scale setting affects only the display of the particle measurements. The APS device always sends measurements once per second to ParticleSpectrum, and log files always record measurements at increments of one second.
Chapter 3. Using Your APS3 To change the averaging interval: • In the Display Controls, under Averaging Interval, choose the interval in seconds, minutes, or hours for averaging the particle measurements. The new setting takes effect immediately. Averaging Interval Figure 3.20: Horizontal Scale For example, you know the airflow through the APS device is 0.1 cubic feet per minute but you want to average the particle count over one cubic foot of air.
Chapter 3. Using Your APS3 Device Status Icons ParticleSpectrum ParticleSpectrum lists a Device Status Bar for connected devices in two different locations; the Device List, and the Graph Window for the device. The Device Status Bar has icons showing Battery Level, Operating Temperature, Pressure, Fan, and Laser Figure 3.21: Device Status Bar 3.
Chapter 3. Using Your APS3 Additional Icons in Device List There are additional icons for the connected device in the Device List. • Visibility, hide and unhide the device. When the device is hidden, the graph window for the device is also hidden. • Menu, remove the device from the device list. If the device is removed, you will need to restart the ParticleSpectrum software. • Select Review File, accesses log files to be import into ParticleSpectrum for review.
Chapter 3. Using Your APS3 Monitoring the Operating Temperature The operating range for the APS devices to achieve the specified accuracy for readings is 15°C to 45°C. The APS can withstand exposure to 60 °C for brief periods. The Temperature monitor in the APS device status bar of the ParticleSpectrum window (see Figure 3.23) shows the current operating temperature of the APS device with a numeric readout and a color graphic. Low < 15 °C Optimum 15-45 °C Warning 45-80 °C Figure 3.
Chapter 3. Using Your APS3 Using the Rechargeable Battery The APS device operates from an internal rechargeable battery. From a full charge, the battery provides about four hours of continuous use. Before using your APS device for the first time, charge it for two hours. The battery can be recharged about 400 times before the charge life starts to degrade significantly. The battery is not user replaceable.
Chapter 3. Using Your APS3 Figure 3.25: Contact Case Connection and Pressure Relief Vent 4. Plug the charger line adapter into a 100 VAC to 240 VAC mains and plug the other end into the charging case connection on the right side of the charging case. (See figure 3.25) The charging case is air-tight. After air transport it may be necessary to relieve the pressure differential in order to open the case. To do so, loosen the Pressure Relief Vent screw until air enters the case. Then re-tighten the screw. 5.
Chapter 3. Using Your APS3 Monitoring the Wireless Connection to the APS3 Device The ParticleSpectrum application communicates with the APS device by using a Bluetooth wireless link. The wireless link has a range of up to 30 ft (10 m). The Connection indicator in the APS device status bar area of the ParticleSpectrum window shows the wireless connection between the APS device and the link module. The connection quality is indicated by the color of the bar and the wording below the bar (see Figure 3.
Chapter 3. Using Your APS3 Monitoring the Pressure, Laser, Fan In addition to connection, battery, and temperature, ParticleSpectrum includes indicators for the status of the atmospheric pressure, the laser, and the fan: • Fan. The APS device uses a fan to flow gases in the local atmosphere through the particle detector. When the fan is operating, this indicator is green; otherwise the indicator is grey. If the fan • Pressure. For the fan to work, local atmosphere must be at a minimum pressure of 0.
Chapter 3. Using Your APS3 Reporting APS System Events Specific APS system events are reported to ParticleSpectrum when they are encountered by the APS device. For example, an event can include a low battery or a laser failure and can stop particle measurement.
Chapter 3. Using Your APS3 Low Pressure Environment In low pressure environments below 300 Torr (0.4 atmosphere), the APS device responds in order to prevent damage, resulting in the following event: • Pressure below 300 Torr. The APS device’s fan turns off. The laser remains on and ParticleSpectrum continues to record and display data. ParticleSpectrum inserts a data mark into the log file noting that the fan was turned off due to low pressure. Figure 3.
Chapter 3. Using Your APS3 Changing the Pairing Between the APS3 Device and Link The APS device and link module in your kit were paired at the factory and will operate with only that particular link module. You can change this pairing, so that you can use your APS device with a different APS link module, or vice versa. Link modules for different CyberOptics WaferSense or ReticleSense products, such as Auto Gapping Sensors (AGS), are not interchangeable. To pair an APS device and link module: 1.
Chapter 3. Using Your APS3 Saving Your Settings Each time you exit the ParticleSpectrum application, it saves your current settings for Go/NoGo threshold, horizontal scale, vertical scale, and other display settings, and log file directory. The next time you start ParticleSpectrum, it restores those saved settings. Additional Display Features ParticleSpectrum has additional display features for APS devices that can be found in the graph window for the device.
Chapter 3. Using Your APS3 To add a device name: 1. A grey box with a pencil icon is assigned to the device, which is located in the upper right corner of the device information. 2. Select the grey pencil icon to enter a name for the device. You can also edit or delete an existing name. The name will be saved to the device, and will also be outputted to the .aps log file, and comma delimited (.csv) file. Figure 3.32: Add device name 3.
Chapter 4 Viewing Log Files The ParticleSpectrum contains Review functionality, letting you replay log files that you previously recorded. This chapter provides instructions for performing the following tasks using Review Features: • Review Log Files • Working with marks • Changing log files • Configuring the display • Displaying user-specified information from the log file This chapter assumes that you are familiar with the information in Chapter 3, “Using Your APS3.
Chapter 4. Viewing Log Files Review Log Files To review a log file: 1. Locate Device List or Device Graph Window, select the Select Review File folder icon. 2. Navigate to the log file you want selected and select ‘OK’ as shown in Figure 4.1 to load the log file into ParticleSpectrum. Figure 4.1: Running the Review Feature 4.
Chapter 4. Viewing Log Files 3. The Review window will appear below the active device as shown in Figure 4.2, displaying the controls and the graphical window used to review log files. The log file will also appear in the Device List. The log file does not contain a status bar, and does not playback functionality. Figure 4.2: Opening a Log File You are able to reorder the Log File and Device using the Device List Menu Settings, by selecting Move Up or Move Down.
Chapter 4. Viewing Log Files Expanding Review Space This Review Graph Window can be expanded to the primary work space. These same steps can also be used to expand the Device Graph Window. To expand the Review Graph Window: 1. Locate and select the Maximize icon in the upper right of the graph window. Figure 4.4: Expanding Review Space 4.
Chapter 4. Viewing Log Files 2. You can also select the Visibility icon in the Device List to hide any item, and the Graph Window will adjust to the maximum size. When you select the Visibility icon to Show Device, the graph window will appear for that device, and adjust to show the Graph Windows of both visible items. To minimize the Review Graph Window and revert to the previous view of showing both Graph windows: 1. Locate and select the Minimize icon in the upper right of the graph window. Figure 4.
Chapter 4. Viewing Log Files Working with Marks You can add a marker annotation, and edit an existing marker annotation in the log file. To add/edit a marker: 1. Select the Marker Icon in the Review Graph Window. 2. The Marker Icon will turn orange, indicating you are in the add/edit mode. 3. A pencil cursor will appear when hovering over the graph. Select where you want to place the marker on the graph. To edit an existing marker, select the vertical dotted line. 4. The annotation dialog will pop up.
Chapter 4. Viewing Log Files 5. To exit the add/edit marker mode, select the Marker Icon. The icon will return to a grey color. Changing Log Files You can open a log file using the Select Review File folder icon, as described in “Running Review,” on page 4.2. (see Figure 4.1). If you don’t see the file you want in the list, navigate to the location you’ve chosen for log files to be saved to. See ““Changing the Log File Directory,” on page 3.16.
Chapter 4. Viewing Log Files Configuring the Display You can change the way particle measurements are displayed in the graph display by selecting which particle size bin to graph, by choosing to display either particle density or particle frequency, by changing the vertical and horizontal scales, and by changing the averaging interval. Reviewing Measurements The left side of the Review Window for the log file display allows you to review log files in numeric form for either Density or Frequency mode.
Chapter 4. Viewing Log Files To choose which information to display: 1. In the Settings icon, Display Options, select Density or Frequency from the Measurement Type drop down menu. Review displays particle measurements as either particle frequency (number of particles per unit time) or as particle density (number of particles per volume). 2. To change the averaging interval, under Averaging Interval select seconds or minutes for averaging the particle measurements. The new setting takes effect immediately.
Chapter 4. Viewing Log Files Reviewing Graphs and Resetting Parameters The graph shows one line for the particle measurement data. The running average trace is blank until the first averaging interval, selected by the Averaging Interval controls, then displaying a second line on the graph. To choose which particle bin to graph: 1. In the Display Options, choose the particle size from the Graph Particle Sizes (see Figure 4.9).
Chapter 4. Viewing Log Files Displaying User-Specified Information from the Log File Operator, Tool, Station, and Comment are user-specified text in ParticleSpectrum from a ‘Record Data’ session that can be recorded in a log file along with the particle data. To display the user-specified information for a log file in Review: 1. Choose the Settings > Show Station Information menu item. The Station Information dialog is displayed and is read-only, as shown in Figure 4.10. Figure 4.
Chapter 4. Viewing Log Files Saving a modified Review file Upon opening a log file for review, the Save Modified Review File icon will be inactive. When any markers are added or edited in a review file, the Save Modified Review File icon will become active. Inactive icon Active icon To save a modified log file in Review: 1. Choose the Save Modified Review File icon. 2. The ‘Save data as’ window dialog will appear. Browse for Folder Default File Name Custom File Name Data Name Use Edited tag 3.
Chapter 5 Maintaining Your APS3 This chapter discusses the following: • Annual factory calibration and battery replacement • Battery use and disposal Warning The edges of the APS3 devices are thin. It may be possible to sustain injury from these edges if the APS3 device is not handled with proper care. Protection afforded by compliance EN61010-1 (2010) may be impaired if the equipment is not used as specified.
Chapter 5. Maintaining Your APS3 Device Warning Do not immerse the APS3 device of the link module in liquid. Do not spill liquid on the APS3 device or on the link module. Warning The use of controls, adjustments, or procedures other than those specified in this manual may result in exposure to hazardous optical radiation. 5.
Chapter 5. Maintaining Your APS3 Device Annual Factory Recalibration and Battery Replacement Every 12 months, you should return your APS3 device to the CyberOptics factory, where we will calibrate the APS3 wafer and replace the internal rechargeable battery. You can find the date when the APS3 device was last calibrated at the factory by choosing the Info Icon in the ParticleSpectrum application. Figure 5.
Chapter 5. Maintaining Your APS3 Device If you drop the APS3 device or suspect that it is no longer in calibration, contact CyberOptics technical support. (see “Technical Support,” on page 2.11.) Battery Use and Disposal Your APS3 device contains lithium-polymer battery. To avoid damage to the APS3 device, use the supplied charger only. Do not charge the APS3 device at temperatures outside the specified range (0 C to 45 C). Do not incinerate or dispose of the APS3 device into fire.
Chapter 6 Specifications APS3 WaferSense APS3 Features Wireless, wafer-shaped and battery-powered Available in 300mm. Model #8025754. Easy-to-use software: ParticleSpectrum ParticleSpectrum: Displays real-time numeric and visual feedback, cumulative or differential counting modes and density or frequency modes. Replays log file data for review and analysis. Highly accurate: Measures particles greater than 0.14μm Size channels: Reports particles in 0.1μm and 0.
Chapter 6. Specifications Systems requirements: Operating Systems - Windows 7, 8 or 10. One free high-powered USB 1.1 or USB 2.0 port. Product components: Particle measurement device, charging clean case, carrying suitcase, USB communications link module, USB cable, application software CD, calibration certificate and start guide. Calibration Factory: recalibration recommended annually. Consult factory for large particle calibration.
Chapter 6. Specifications 6.
Specifications APS-FPD PanelSense APS-FPD Features Wireless and battery-powered Available in 135mm x 137mm x 4.7mm (L x W x H). Model #8025826. Easy-to-use software: ParticleSpectrum ParticleSpectrum: Displays real-time numeric and visual feedback, cumulative or differential counting modes and density or frequency modes. Replays log file data for review and analysis. Highly accurate: Measures particles greater than 0.14μm Size channels: Reports particles in 0.1μm and 0.
CyberOptics is in compliance testing for listed markings. Compliant to the Following Directives and Standards: Directive Low Voltage Directive 2014/35/EU EMC Directive 2014/30/EU Radio Equipment Directive 2014/53/EU Standards EN 61010-1:2010 3rd Edition, EN 60825:2007 EN 61326-1:2013, Class B, Industrial EN 30.1:2012 Class B1 489-17 V2.2 FCC 15.109:2014, Class B FCC 15.109(g):2014, Class B Table 6.2: Compliance with Directives and Standards 6.
Appendix A Large Particle Detection The WaferSense APS3 and APS-FPD sensor are capable of large particle measurements. General information about large particle detection: In some circumstances it is desirable to sense only large particles and not detect small particles. This may be the case in certain photolithography tools. The APS3, with the large particle, has two detector channels. Each has separate optics and amplifiers. One channel is for small particles and another for large particles.
Appendix A. Large Particle Detection Device Large Particle Mode Selection Large Particle Mode is selected on the Settings menu using the Large Particle Mode menu button. When the menu button is selected “on” you are in Large Particle Mode and the ParticleSpectrum display will show four bins as shown in Figure A.2. Large Particle Mode selection is in ParticleSpectrum and is used to select the mode for particle measurement. Review conforms to the mode the log file was recorded in.
Appendix A. Large Particle Detection Device Reading the ParticleSpectrum Display In Large Particle mode, you will have the same Settings Menu but the Graph Particle Sizes will change to 4 bin sizes. You will also no longer have selection control between Density and Frequency, because all large particle charts display using frequency mode (the number of particles per unit time). All other display controls operate the same in large particle mode.
Appendix A. Large Particle Detection Device Go/No-Go Threshold dialog The large particle Go/No-Go threshold dialog (see Figure A.3) functions are almost identical to the small particle dialog. The difference is the Threshold Type selection. For large particle Threshold Type selection the choice is only Frequency. Figure A.3: Go/No-Go Threshold dialog A.
Appendix A. Large Particle Detection Device Viewing the log file In Review, the display will switch to the particle mode in which the log file was generated. When a log file is recorded in ParticleSpectrum in large particle mode and opened in Review, the display will configure to large particle mode (see Figure A.4). Also, the Go/No-Go Threshold dialog will open to the appropriate particle mode format. Figure A.4: Review Large Particle Display A.
Appendix B PanelSense™ APS-FPD The PanelSense APS-FPD sensor is primarily used for particle detection in Flat Panel Display manufacturing processes. General information about PanelSense APS-FPD: The APS-FPD operates the same as an APS3, but is in a different form factor and comes with additional components that enable simultaneous measurement using multiple APS-FPD devices. General operation of the APS-FPD device and reviewing log files are the same as APS3. See chapters 3, 4, and 5.
Appendix B. PanelSense APS-FPD APS-FPD Components The APS-FPD and its components are as follows: - Two APS-FPD units - Two Charging Cases with charging cables - One SENA link with Extended Range Antenna - One 3 meter USB cable for PC to SENA Link - ParticleSpectrum Software installation CD - Two USB link cables for APS-FPD to External Battery pack Note: The link cable is designed specifically for connection between the APS-FPD device and the External Battery Pack.
Appendix B. PanelSense APS-FPD Charging the Battery and External Battery Packs The Li-Ion battery in the APS-FPD devices must be fully charged before first use. A discharged battery can take several hours to charge. Connect the battery charger to the charging case. Plug the charger into a 100-240VAC outlet. The “Charger On” and “Charging” status lights will remain on while the unit is charging. When the “Charging” light goes off, the battery is cully charged.
Appendix B. PanelSense APS-FPD Installing the SENA Link Hardware Before starting the wireless link installation, complete the Installing the WaferSense APS Software,” on page 2.2. The ParticleSpectrum Software must be installed prior to connecting and installing the SENA Link. Locate the SENA Link USB module. Extended Range Antenna 3 Meter USB Cable SENA Link Figure B.2: SENA Link Components Note: If remote positioning of the SENA Link is desired, use the included 3 meter USB cable.
Appendix B. PanelSense APS-FPD 2. Locate the Bluetooth drop down menu and select the Bluetooth Radio for your computer. Note: You can ignore Microsoft Enumerator and Microsoft Support Drivers, if listed. 3. Right click on the Bluetooth Radio, and select “Disable Device” Figure B.4: Device Manager Dialog B.
Appendix B. PanelSense APS-FPD To install the SENA link: 1. Connect the SENA Link module to a high power USB port directly to your PC 2. Windows will recognize the SENA Link module and the “Found New Hardware” wizard will appear. Select “Install the software automatically (Recommended)”, if prompted. Note: Use Windows generic Bluetooth Radio Driver only. Other Drives (BlueSoleil, etc.) may not be compatible with ParticleSpectrum.
Appendix B. PanelSense APS-FPD 3. Select the “Pair New WaferSense” button in ParticleSpectrum 4. Select the “Yes” in the following menu to continue pairing. Figure B.6: APS-FPD Pairing in ParticleSpectrum B.
Appendix B. PanelSense APS-FPD 5. ParticleSpectrum will recognize the APS-FPD unit and will confirm that the sensor is paired successfully. Note: Ignore any Windows Bluetooth pop up messages about pairing Bluetooth devices or “Configuring Bluetooth Services” 6. If you are unable to pair the device, repeat the Connect/Pair process (steps 1-4) 7. If the Device List does not refresh after pairing the APS-FPD unit, select the “Search for Devices” button from the main window.
Appendix B. PanelSense APS-FPD Multiple Device Windows and Linking Devices ParticleSpectrum enables APS-FPD devices to have the ability to run simultaneously. The APS-FPD devices can be shown as individual device windows, or linked together where they can be recorded on the same graph. To run devices as multiple device windows: 1. Normal operation as listed in Chapter 3 on page 3.4 should be followed if you would like units to be run individually.
Appendix B. PanelSense APS-FPD You are able to link sensors by type in ParticleSpecturm. By linking devices, you are able to chart multiple devices on the same graph. Settings and other functions affect both devices. To link devices: 1. From the Device List window, select Manage Device List. 2. The Select Sensors menu will pop up. You can Refresh List, and Link Sensor Types by Type. The active and connected devices will be listed below.
Appendix B. PanelSense APS-FPD 3. The Graph Window and the Device List Window will update to show the devices are now linked. The user interface changes when devices are linked together. In the Graph Window for the linked devices, each device is automatically assigned a line color that will be charted on the graph. There is also a small menu bar at the top of the devices that provides visibility functions for descriptions and charting.
Appendix B. PanelSense APS-FPD Using ParticleSpectrum with Linked Devices Normal operation as listed in Chapter 3 on page 3.4 should be followed for starting and recording a measurement run. All settings options (Measurement Options, Device Options, Display Options, Graph Options, and Output Folder) affect all devices that are linked together. To run linked devices: • • Begin a measurement run by selecting the Start icon.
Appendix B. PanelSense APS-FPD Log Files of Linked Devices Linked devices follow the same processes and procedures as listed in Chapter 4 on page 4.1. When selecting a log file for review, you have the option to load the linked log file or the individual log files of each device. When you record the data to a CSV, each column is designated by Name (if added), Device Type, and Device Serial Number.
Appendix B. PanelSense APS-FPD To view Linked CSV file: • • Navigate to the folder directory the recorded files were saved to The top row of the CSV file will list the Device Name with Device Serial Number. Example of data from first device Example of data from second device Figure B.13: Linked CSV files B.
Index A About ParticleSpectrum dialog 2.10 About your APS3 device dialog 2.10 annotations 3.12 APS3 installing 2.1 specifications 6.1 system components 1.1 APS3 device automatic shutoff 2.6, 3.3 battery replacement 5.1 buttons 3.3 calibration 5.1 changing pairing with link module 3.30 cleaning 5.2 maintenance 5.1 monitoring the battery 3.24 monitoring the connection 3.26 monitoring the fan, pressure, laser 3.27 pair button 3.30 recharging the battery 3.24 registering 2.9 serial number 2.10 status lights 2.
Index F fan status 3.27 FCC standards i file names, log files 3.14 files, see log files frequency particle measurements 3.6 Go/No-Go 3.8 indicators 3.8 setting 3.9 graphical display 3.5 G Pair button 3.30 status lights 2.5, 2.6, 3.30 USB port 2.2, 3.25 log files .csv format 3.15 aps files 3.14 changing directory 3.16 comma-delimited files 3.15 file name prefix 3.14 file names 3.14 recording 3.11 viewing in Review 4.2 M H hardware specifications 6.1 horizontal scale changing in ParticleSpectrum 3.
Index pairing of APS device and link module, changing 3.31 particle density 3.6, 3.17 particle frequency 3.6, 3.17 particle measurement bins 3.5 particle measurements 3.5 averaged 3.5 cumulative 3.6 differential 3.6 log files 3.11 real-time 3.5 recording 3.11 undercounting 3.28 Review 4.1–4.11 starting Review4.2 ParticleSpectrum 3.1–3.31 software installation 2.2 starting the application 2.8 version 2.10 preferences, see settings prefix, log file names 3.14 pressure status 3.27 purge time 3.
Index changing the vertical scale in ParticleSpectrum 3.18 configuring the display in Review 4.8 configuring the display in ParticleSpectrum 3.17 displaying particle density or frequency in ParticleSpectrum 3.17 selecting the particle size in Review 4.10 selecting the particle size in ParticleSpcetrum 3.17 trace display 3.4 U undercounting particles 3.28 USB port 2.2, 2.5 V version of software 2.10 vertical scale 3.18 W wafer status 3.24, 3.26, 3.27 Windows operating system 2.
