Brooks Automation CTI-Cryogenics 8200 Compressor Installation, Operation, and Service Instructions Brooks Automation Revision 108 8040353
8200 Compressor Installation, Operation, and Service Instructions Information provided within this document is subject to change without notice, and although believed to be accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
8200 Compressor Installation, Operation, and Service Instructions Contents Contents Introduction General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2 Installation, Operation and Servicing Instructions . . . . . . . . . . . . . . . . . . . . . . . . . .1-3 Safety Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2 Signal Word Descriptions . . .
Contents 8200 Compressor Installation, Operation, and Service Instructions Unscheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6 Helium Circuit Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9 Appendices Appendix A: Customer Support Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2 Appendix B: Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . .
8200 Compressor Installation, Operation, and Service Instructions Figures Figures 1-1 1-2 Air and Water Cooled 8200 Compressor Dimensions . . . . . . . . . . . . . . . . .1-3 Component Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4 4-1 4-2 4-3 4-4 4-5 Electrical Terminal Enclosure with Cover in Place. . . . . . . . . . . . . . . . . . . .4-4 Assembly of Conductors to Terminal Block . . . . . . . . . . . . . . . . . . . . . . . . .
Figures 8200 Compressor Installation, Operation, and Service Instructions This Page Intentionally Left Blank 8040353 vi Brooks Automation Revision 108
8200 Compressor Installation, Operation, and Service Instructions Tables Tables 1-1 1-2 Power Requirements (Steady-State Conditions) . . . . . . . . . . . . . . . . . . . . . .1-5 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5 2-1 2-2 Safety Signal Words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3 Safety Shapes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Tables 8200 Compressor Installation, Operation, and Service Instructions This Page Intentionally Left Blank 8040353 viii Brooks Automation Revision 108
8200 Compressor Installation, Operation, and Service Instructions 1 Introduction Overview This chapter describes this manual and the compressor, including specifications. Chapter Contents General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2 Installation, Operation and Servicing Instructions . . . . . . . . . . . . . . . . . . . . . . . . . .
Introduction General 8200 Compressor Installation, Operation, and Service Instructions General The manual provides instructions for installing, operating and servicing the 8200 Compressor. This compressor is available in two versions: air-cooled, part number 8032549G001/G002 and water cooled, part number 803255G001/G002. If you are installing or operating a Cryo-Torr or On-Board System you should also have available the appropriate cryopump or refrigerator.
8200 Compressor Introduction Installation, Operation, and Service InstructionsInstallation, Operation and Servicing In- Installation, Operation and Servicing Instructions Installation, Operation and Servicing Instructions for your 8200 Compressor provide easily accessible information. All personnel with installation, operation, and servicing responsibilities should become familiar with the contents of these instructions to ensure high quality, safe, reliable performance.
Introduction 8200 Compressor Installation, Operation and Servicing InstructionsInstallation, Operation, and Service In- 1 2 3 4 5 6 7 8 9 10 11 12 Rear View - Water Cooled Rear View - Air Cooled 13 14 15 16 17 18 Front View - Air and Water Cooled 1. Compressor Input Power Block LEGEND 10. Cooling Water Output 2. Cold Head Power Receptacle 11. Cooling Water Input 3. On-Board Power Receptacle 12. Rear Plate 4. Helium Gas Fitting and Charge Valve 13. 50/60 Hz Frequency Selector Switch 5.
8200 Compressor Introduction Installation, Operation, and Service InstructionsInstallation, Operation and Servicing In- Table 1-1: Power Requirements (Steady-State Conditions) Part Number Cooling Phase Hz Operating Voltage Range Nominal Operating Current Rated Full Load / Locked Current 8032549G001 Air Air 3 3 50 60 180-220 198-250 10A 10A 12/30A 8032549G002 Air Air 1 1 50 60 180-220 198-250 10A 10A 12/30A 8032550G001 Water Water 3 3 50 60 180-220 198-250 8.5A 8.
Introduction 8200 Compressor Installation, Operation and Servicing InstructionsInstallation, Operation, and Service InTable 1-2: General Specifications (Continued) Specification Description Interface Cold head power receptacle: Mates with plug on cold head power cable. On-Board power receptacle: Mates with plug on coldhead power cable. Compressor input-power terminal block enclosure: Mates with input power cable, fabricated by customer or available from CTI-Cryogenics.
8200 Compressor Installation, Operation, and Service Instructions 2 Safety Overview This section describes safety conventions for the Brooks Automation Product. All personnel involved in the operation or maintenance of the product must be familiar with the safety precautions outlined in this section. NOTE: These safety recommendations are basic guidelines.
Safety Introduction 8200 Compressor Installation, Operation, and Service Instructions Introduction Follow all safety precautions during installation, normal operation, and when servicing CTI-Cryogenics products. This chapter explains the safety conventions used throughout this manual. CTI-Cryogenics uses a specific format for cautions and warnings, which includes standard signal words and safety shapes. See also the Customer Support appendix or call your local Customer Support Center for assistance.
8200 Compressor Installation, Operation, and Service Instructions Safety Signal Word Descriptions Signal Word Descriptions All cautions and warnings contain signal words, which call attention to safety messages and designate the degree of hazard seriousness. The following table shows the signal words and their meanings that may be used in this document.
Safety Safety Shape Descriptions 8200 Compressor Installation, Operation, and Service Instructions Safety Shape Descriptions All cautions and warnings contain safety shapes, which have specific safety meanings. The following table shows some of the safety shapes used in this document and their meanings. Table 2-2: Safety Shapes Example Term Shape Definition General Warning Indicates a general hazard. Details about this hazard appear in the safety notice explanation.
8200 Compressor Installation, Operation, and Service Instructions 3 Inspection Overview This chapter details unpacking the compressor. A High-Vacuum Pump or Refrigerator System is packaged in separate cartons for each major component. An Installation, Operation, and Servicing Manual is included in the carton for the component packaged in that carton. Chapter Contents The Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Inspection The Compressor 8200 Compressor Installation, Operation, and Service Instructions The Compressor On receipt, remove the 8200 Compressor from its shipping carton and inspect the compressor for evidence of damage as described in this Section. 1. Unpack and remove the compressor from its shipping carton. 2. Check the carton contents. It should contain: 3. a. 8200 Compressor (air cooled or water cooled). b. Compressor Manual part number 8040353.
8200 Compressor Installation, Operation, and Service Instructions 4 Installation Overview This chapter provides complete installation procedures for the Brooks Automation Product. Chapter Contents Compressor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2 Preparing the Compressor Input-Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2 Cooling Water Requirements (Water-Cooled Compressors Only) . . . . . .
Installation Compressor Installation 8200 Compressor Installation, Operation, and Service Instructions Compressor Installation Installation of your compressor requires no special tools other than those supplied in the Installation and Scheduled Maintenance Tool Kit. Preparing the Compressor Input-Power Cable To supply input power to the 8200 compressor requires the fabrication of a 600-volt power cable that has an SO-4 conductor, 600-volt rating neoprene jacket and 14-gauge or 2.3 mm2 wire.
8200 Compressor Installation Installation, Operation, and Service Instructions Preparing the Compressor Input-Power 4. Thread input power cable end up through the strain relief into the enclosure. 5. Attach the power conductors onto the appropriate terminals of the terminal block. a. For three-phase hookups, attach the three power leads to terminals X, Y and Z. b. For single-phase hookups, attach the two power leads to terminals X and Y. DO NOT USE TERMINAL Z. 6. Tighten all terminals to 18-22 in.
Installation Preparing the Compressor Input-Power Cable 8200 Compressor Installation, Operation, and Service In- Cover Screws Figure 4-1: Electrical Terminal Enclosure with Cover in Place Y Z (not used for single phase) X Ground Screw Power Cable Figure 4-2: Assembly of Conductors to Terminal Block Cooling Water Requirements (Water-Cooled Compressors Only) If flexible water hose connections are used, install the barbed fittings supplied with the compressor on the input and output connections: 1.
8200 Compressor Installation Installation, Operation, and Service Instructions Preparing the Compressor Input-Power 2. Tighten fittings on 1/2-inch FPT input and 1/2-inch FPT output connections. DO NOT OVERTIGHTEN. 3. Connect flexible hoses to the fittings and secure with hose clamps. If hard piping is desired, install the water lines directly onto the compressor 1/ 2-inch FPT input and output connections. DO NOT OVERTIGHTEN.
Installation Preparing the Compressor Input-Power Cable 8200 Compressor Installation, Operation, and Service In- Table 4-1: Cooling Water Specifications Parameter Value Maximum Inlet Temperature 90ºF (32ºC) Minimum Inlet Temperature 50ºF (10ºC) Flow Rate 1.0±0.5 gpm (3.8±1.9 lpm) Pressure Drop (inlet-to-outlet) approximately 3.5 psig differential Min./max. Inlet Presure 5 to 100 psi (6.9 bars) Alkalinity 7.0 - 8.
8200 Compressor Installation Installation, Operation, and Service Instructions Preparing the Compressor Input-Power 60 50 40 30 Allowable Operating Range 20 at min. water flowrate 10 0 0.25 0.50 0.75 1.00 1.50 1.75 2.00 Water Flowrate (GPM) Figure 4-3: 8200 Compressor Cooling Water Flow and Pressure Requirements 90 85 Water Supply Temperature (ºF) 80 Allowable Operating Range 75 70 65 60 55 50 45 40 0.25 0.50 0.75 1.00 1.50 1.75 2.
Installation Final Preparation of Compressor 8200 Compressor Installation, Operation, and Service Instructions Final Preparation of Compressor 1. Using a voltmeter, measure the phase-to-phase voltage from the power source. Compare this voltage to Table 4-1 and position the voltage range selector switch to the “208V” or “220V” position as required. Also, set the frequency selector switch to the 50 Hz or 60 Hz position, as appropriate. See Figure 1-2 on page 1-4 for location of selector switches.
8200 Compressor Installation Installation, Operation, and Service Instructions Connecting the Compressor to the Cold Connecting the Compressor to the Cold Head Make the connections between the cryopump and compressor. See Figure 4-5 on page 4-10. 1. Remove dust plugs and caps from the supply fittings and return lines, compressor, and cold head. Check all fittings. 2.
Installation 8200 Compressor Connecting the Compressor to the Cold HeadInstallation, Operation, and Service Instruc- High Voltage High voltage electric shock could cause severe injury or loss of life. Before you make any electrical connections, turn off the compressor with the ON/OFF power switch on the front of the compressor. 6. Make the following electrical connections. a.
8200 Compressor Installation, Operation, and Service Instructions 5 Maintenance Procedures Overview This chapter provides complete maintenance procedures for the Brooks Automation Product. Chapter Contents Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2 Unscheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6 Helium Circuit Decontamination . . . . . . . . . . . . . . . .
Maintenance Procedures Scheduled Maintenance 8200 Compressor Installation, Operation, and Service Instructions Scheduled Maintenance The only scheduled maintenance required on the 8200 Compressor is replacement of the compressor adsorber (part number 8080255K001) every 12 months. High Voltage High voltage electric shock could cause severe injury or loss of life. Always disconnect the compressor from all sources of electrical power before performing any maintenance procedures.
8200 Compressor Installation, Operation, and Service Instructions Maintenance Procedures Scheduled Maintenance TO TIGHTEN TURN WITH 1 3/16 INCH WRENCH HOLD WITH 1 1/8 INCH WRENCH HOLD WITH 1 1/8 INCH WRENCH TURN WITH 1 3/16 INCH WRENCH TO LOOSEN Figure 5-1: Adjusting the Self-Sealing Connectors Compressor Rear Panel This 1 1/8 in. wrench holds the coupling in a stationary position. This 1 3/16 in. wrench is used to loosen the self sealing coupling connector. Note the direction of the large arrow.
Maintenance Procedures Scheduled Maintenance 8200 Compressor Installation, Operation, and Service Instructions Explosive Pressure High pressure explosions could cause severe injury and equipment damage. Appropriately depressurize the adsorber before disposing of it. To depressurize the adsorber, attach the depressurization fitting (included in the Installation and Scheduled Maintenance Tool Kit) to the coupling half at either end of the adsorber and tighten it slowly.
8200 Compressor Installation, Operation, and Service Instructions a. Maintenance Procedures Scheduled Maintenance Check the self-sealing connector flat rubber gasket to make sure that it is clean and properly positioned. Equipment Damage To avoid damaging equipment, ensure you hold the left coupling nut while tightening the right coupling nut, as shown in Figure 5-2 on page 53 and Figure 5-1 on page 5-3. b.
Maintenance Procedures Unscheduled Maintenance 8200 Compressor Installation, Operation, and Service Instructions Unscheduled Maintenance Suggested Unscheduled Maintenance Equipment It is advisable to keep on hand the unscheduled maintenance equipment and disposable supplies listed below. 1. Helium, 99.999% pure. 2. Pressure regulator (0-3000/0-400 psig). 3. Maintenance manifold, part number 8080250K003*. 4.
8200 Compressor Installation, Operation, and Service Instructions Maintenance Procedures Unscheduled Maintenance There are two conditions that require the addition of helium gas: 1. Compressor not operating; helium pressure gauge reads 245 psig or below. 2. Compressor operating; helium pressure reads 270 psig, or below. To add helium gas: 1. Attach a pressure regulator (0-3000/0-400 psig) and charging line to a helium gas (99.999% pure) bottle. DO NOT OPEN THE BOTTLE AT THIS TIME.
Maintenance Procedures Unscheduled Maintenance b. 8200 Compressor Installation, Operation, and Service Instructions If the compressor is not running, slowly open the helium charge valve. When the helium pressure gauge rises to 245 - 255 psig (1688 - 1757 kPa), tightly close the charge valve. Equipment Damage To avoid discharging the relief valve, add helium gas slowly, less than 50 psi per second. 3. 8040353 5-8 Ensure that the helium charge valve on the compressor is tightly closed.
8200 Compressor Installation, Operation, and Service Instructions Maintenance Procedures Helium Circuit Decontamination Helium Circuit Decontamination Refer to Section 4 - Maintenance of the appropriate On-Board Cryopump Installation Operation, and Maintenance manual for information on helium circuit decontamination.
Maintenance Procedures Helium Circuit Decontamination 8200 Compressor Installation, Operation, and Service Instructions This Page Intentionally Left Blank 8040353 5-10 Brooks Automation Revision 108
8200 Compressor Installation, Operation, and Service Instructions 6 Appendices Overview The following appendices are included to provide the user with a single location for specific information related to the Brooks Automation Product. Contents Appendix A: Customer Support Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2 Appendix B: Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Appendices 8200 Compressor Appendix A: Customer Support Information Installation, Operation, and Service Instruc- Appendix A: Customer Support Information Customer Support Center Locations To locate a Customer Support Center near you, please visit our website www.brooks.com on the world wide web and select CONTACT on the home page.
8200 Compressor Installation, Operation, and Service Instructions Appendices Appendix B: Troubleshooting Proce- Appendix B: Troubleshooting Procedures Read these safety notices before you perform any troubleshooting procedures: High Voltage High voltage electric shock could cause severe injury or loss of life. Always disconnect the compressor from all sources of electrical power before performing any maintenance or troubleshooting procedures.
Appendices Appendix B: Troubleshooting Procedures 8200 Compressor Installation, Operation, and Service Instruc- Table 6-1: Compressor Troubleshooting Procedures Problem 2) System power ON/ OFF switch (CB1) remains in the ON position, but the compressor will not run. 8040353 6-4 Possible Cause Corrective Action 2a) No power coming from the power source. 2a) Check service fuses, circuit breakers, and wiring associated with power source, and repair as needed.
8200 Compressor Installation, Operation, and Service Instructions Appendices Appendix B: Troubleshooting Proce- Table 6-1: Compressor Troubleshooting Procedures Problem 3) Compressor stops after several minutes of operation and remains off. Brooks Automation Revision 108 Possible Cause Corrective Action 3a) High temperature of the compressor is caused by insufficient cooling water, resulting in the opening of thermal protective switch (water-cooled compressor only).
Appendices Appendix B: Troubleshooting Procedures 8200 Compressor Installation, Operation, and Service Instruc- Table 6-1: Compressor Troubleshooting Procedures Problem Possible Cause 4) Compressor pump stops after several minutes of operating and then switches ON and OFF at short intervals. 4a) Intermittent power source voltage. 4a) Confirm power source voltage between 198-250V, 60 Hz or 180-220V, 50 Hz and restore if necessary. 5) Compressor operates but cold head motor does not run.
8200 Compressor Installation, Operation, and Service Instructions Appendices Appendix C: Electrical Schematics for Appendix C: Electrical Schematics for 8200 Compressor The following electrical schematics for the 8200 Compressor are in this appendix: • 8200 Compressor Electrical Schematic part number 8032563P001 • 8200 Compressor Electrical Schematic part number 8032564P001 Brooks Automation Revision 108 8040353 6-7
8040353 6-8 MAIN CIRCUIT BREAKER CIRCUIT BREAKER, 3A CIRCUIT BREAKER, 3A MOTOR START RELAY METER ELAPSED TIME COLDHEAD CONNECTOR PUMP CONNECTOR THERMOSTAT CONNECTOR SOLENOID CONNECTOR FAN CONNECTOR TRANSFORMER CONNECTOR TRANSFORMER CONNECTOR TRANSFORMER CONNECTOR TRANSFORMER CONNECTOR OVERTEMPERATURE TRIP RELAY VOLTAGE SELECTOR RELAY PUMP MOTOR FAN MOTOR, AIR COOLED ONLY PHASE MONITOR ON-BOARD CONNECTOR CRYO-TORR CONNECTOR OVERTEMPERATURE RESISTOR BLEED RESISTOR CURRENT LIMITER VOL
Appendices Appendix C: Electrical Schematics for Figure 6-2: 8200 Compressor Electrical Schematic part number 8032564P001 8200 Compressor Installation, Operation, and Service Instructions Brooks Automation Revision 108 8040353 6-9
Appendices 8200 Compressor Appendix D: Components in the Electrical Control Module of the 8200 Compressor Appendix D: Components in the Electrical Control Module of the 8200 Compressor The following illustrations are shown in this chapter: • Components in the Electrical Control Chassis of the 8200 Compressor Three-Phase Scott-T Configuration (this page) • Components in the Electrical Control Chassis of the 8200 Compressor Single-Phase RC Configuration 1. Overtemperature ResistorR1 9.
8200 Compressor Appendices Installation, Operation, and Service Instructions Appendix D: Components in the Electri- 1. Coldhead Phase-Shifting ResistorR3 9. Circuit Breaker, 3ACB2 2. Overtemperature Resistor 10. Circuit Breaker, 3ACB3 R1 3. Run Capacitor, 35 µf C1 11. Voltage Selector SwitchS1 4. Start Capacitor, 119 µf C2 12. Frequency Selector SwitchS2 5. Transformer T2 13. Relay, Trip RelayK1 6. Run Capacitor, 2 µf C4 14. TransformerT1 7. Run Capacitor, 6 µf C3 15.
Appendices 8200 Compressor Appendix E: Flow Diagrams for 8200 Air-Cooled and Water-Cooled CompressorsInstalla- Appendix E: Flow Diagrams for 8200 Air-Cooled and Water-Cooled Compressors Refer to Figure 6-5 on page 6-13 or Figure 6-6 on page 6-14 while reviewing this subsection. Helium returning from the cold head enters the compressor, and a small quantity of oil is injected into the gas stream, thereby overcoming helium low specific head and inability to carry heat produced during compression.
8200 Compressor Installation, Operation, and Service Instructions Appendices Appendix E: Flow Diagrams for 8200 Figure 6-5: Flow Diagram of the 8200 (Air-Cooled) Compressor Brooks Automation Revision 108 8040353 6-13
Appendices 8200 Compressor Appendix E: Flow Diagrams for 8200 Air-Cooled and Water-Cooled CompressorsInstalla- Figure 6-6: Flow Diagram of the 8200 (Water-Cooled) Compressor 8040353 6-14 Brooks Automation Revision 108
8200 Compressor Appendices Installation, Operation, and Service Instructions Appendix F: Additional Cooling Water Appendix F: Additional Cooling Water Quality Parameters Table 6-2: Additional Cooling Water Quality Parameters Water Constituent Unit Saturation-Index SI (delta pH-value) Acceptable Limits -0.2 < 0 < +0.2 Total hardness °dH 6 - 15 Conductivity mg/l 10...500 Filtered substances mg/l <30 Chlorides mg/l <500 Free chlorine mg/l <0.5 Hydrogen sulphide mg/l <0.
Appendices Appendix F: Additional Cooling Water Quality Parameters 8200 Compressor Installation, Operation, and This Page Intentionally Left Blank 8040353 6-16 Brooks Automation Revision 108
