OHB N2 Purge System Operation Manual Ver 1.1 Version OHB N2_STB & OHB N2_AD100 Manufacturer and publisher Brillian Network & Automation Integrated System Co.,Ltd Add: No.41, Keyi St., Zhunan Township, Miaoli County 350, Taiwan, R.O.C. Tel: 886-37-580708 Fax: 886-37-580728 Email:services@brillian.com.tw Website:http://www.brillian.com.
Contents 1 2 3 4 5 6 7 8 9 Introduction............................................................................................................................. - 1 Description of safety rule of OHB N2 Purge System .................................................................. - 2 Description of starting steps ..................................................................................................... - 3 Description of stopping steps .......................................................
1 Introduction Brillian N2 Purge Solution is a series of nitrogen gas products designed specifically to remove moisture and oxygen content and extend Q-Time, including OHB N2, UTS (Under Track Storage) It can be used with semiconductor AMHS automation equipment, and it is small size and does not occupy space. In addition, it can be configured beside the process equipment far away from the storage system to shorten the OHT delivery time.
2 Description of safety rule of OHB N2 Purge System 2.1 Instruction for use。 2.1.1 This manual is only written for Purge System Module。 2.1.2 Non-qualified or non-professional personnel are not allowed to operate or maintain the machine。 2.1.3 “Operator” should read carefully the software operation in advance。 2.1.4 “Maintainer”, in addition to getting familiar with software operation, should read carefully the maintenance manual and circuit diagram。 2.1.
1. 2. May result in Oxygen-Short. Evacuate from inside of stocker when low O2 Concentration 1. When power is supplied, non-professional personnel should not operate it to avoid electric shock hazard. Before checking, maintenance and repair, 2. please turn off the power. 3 Description of starting steps 3.1 Turn on breaker power. 3.2 Facility department is suggested to be AC 110~230V 3.3 Turn on MOXA。 3.4 Turn on IPC power at the rear side of the machine. 3.5 Pressure gauge setting 3.5.
5 Emergency Stop and Recovery EMO Location description 5.1 Once this button is pressed the following operations will be required when restart the Machine 5.1.1 Gas Valve turn off。 5.1.2 Alarm message 5.2 Recovery Steps 5.2.1 The machine ready state and idle 5.2.2 Rotating EMO release state 5.2.3 Rest Alarm,Check the Alarm message -4- Brillian Network & Automation Integrated System Co., Ltd.
6 Facility Requirement 1. Power: AC 110V, (1 Socket, Max. current:3A)(Each port) AC 110V, (2 Socket, Max. current:3A)(IPC、MOXA) Gas: PN2 tube: PFA 1/4“ tube , 5 Kg/cm2 (Max. 50 L/min )(Each port) Gas: CDA tube: PFA 1/4“ tube , 5 Kg/cm2 (Max. 50 L/min )(Each port) Exhaust: GEX, (PE 1/2” tube, Vacuum) (Max Ex. Flow 25LPM) (Each port) Communication: 1 Network Cable ,1 IP address 2. 3. 4. 5. 7 FCC Un-license band: This device complies with Part 15 of the FCC Rules.
OHB N2 AD100 Module Module Illustration Front-1 Front-2 -6- Brillian Network & Automation Integrated System Co., Ltd.
Plate side -1 Facility Connect -7- Brillian Network & Automation Integrated System Co., Ltd.
Side-2 Under -8- Brillian Network & Automation Integrated System Co., Ltd.
9 OHB N2 AD100 Module 9.1 Front Illustration -1 9.2 Front Illustration -2 -9- Brillian Network & Automation Integrated System Co., Ltd.
9.3 Under Illustration 9.4 Plate Illustration - 10 - Brillian Network & Automation Integrated System Co., Ltd.
9.5 Light tower - 11 - Brillian Network & Automation Integrated System Co., Ltd.
10 Signal I/O List 11 Communication Layout - 12 - Brillian Network & Automation Integrated System Co., Ltd.
12 OHB N2 AD100 Hardware 12.1 Piping 12.2 Hardware Method - 13 - Brillian Network & Automation Integrated System Co., Ltd.
12.3 Piping Connect 12.3.1 Facility Connect Machine connect XCDA N2 Exhaust 1/4” OD Swagelok 1/4” OD Swagelok 1/2” OD Swagelok Factory connect XCDA N2 Exhaust 1/4”Stainless Tube 1/4”Stainless Tube 1/2”PFA Tube - 14 - Brillian Network & Automation Integrated System Co., Ltd.
13 OHB N2 AD100 Vacuum generator adjust 13.1 13.2 13.3 13.4 Place the FOUP on the OHB Plate Manual Mode Setting page->Open Inlet& Outlet &Vac Valve Turn needle Valve,Observe the Flow Meter value in the GUI screen and adjust to the required flow rate. 13.5 Setting page Close Valve 13.6 Auto Mode - 15 - Brillian Network & Automation Integrated System Co., Ltd.
14 BR PCB description ※:I/O List Please Check Number 7 Signal I/O List - 16 - Brillian Network & Automation Integrated System Co., Ltd.
15 Alarm code & Alarm Analysis Code 100001 100002 Alarm Action FOUP Remove During a. Confirm if the upper layer of SECS end does not make Purge Purging. End command, FOUP Detect Error. a. Confirm Plate is abnormal or not. b. Confirm Block is abnormal or not. a. 100003 Humidity is not low enough Board TimeOut 100006 Count:{0} , Can't Control Flow. 100007 Out Flow Meter Out of Specified. Confirm if SPEC setting is normal. b. Confirm if Intlet end pipeline is abnormal or not. c.
a. Confirm operator touched by mistake 100092 2001 2007 1094 EMO Error. RFID Read Error. a. Check if Antenna & signal wire connectors are dropped or in bad contact. b. Confirm if BR PCB Board is normal PortX Open Valve a. BR PCB board AI board is abnormal. b. Confirm if the supply amount in gas source end is normal. Fail. PortX Flow Low Error. N2 Inlet Pressure 1096 Switch Out of Specified. 1097 1098 MFC Flow Out of Specified limit.(High). 1101 a. b. Confirm if SPEC setting is normal.
CDA Inlet Pressure 1102 Switch Out of Specified. 1103 1104 3003 a. b. Confirm if the supply amount in gas source end is normal. Check if AI wire connectors are dropped or in bad contact EXH. Pressure Swtitch a. Confirm if Vacuum generator is normal Out of Specified. Temperature Out of Specified. FOUP [MID]is Idle for 600 seconds. b. Check if DO wire connectors are dropped or in bad contact a. Confirm if SPEC setting is normal. b. Confirm if RH Sensor is normal. c.
16 Periodical Maintenance 16.
16.2 Periodical maintenance Attention Perform the following periodical maintenance of this load port annually: A. Handle the equipment carefully so as not to damage the product by tools. B. Shut off the power supply so as not to damage the control board and Lock Breaker - 21 - Brillian Network & Automation Integrated System Co., Ltd.
16.3 Cleaning method 16.3.1 Purpose:Cleaning Plate Particle Material:NA Manual tool:Cleanroom wiper、DI Water Notice:Before action, please confirm whether the machine is down PM Step:Cleanroom wiper cloth into the DI Water from inside to outside and from top to clean the Plate surface. The cleanroom wiper that has been wiped cannot be reused to avoid accumulation of particles - 22 - Brillian Network & Automation Integrated System Co., Ltd.
16.3.2 Purpose:Check Nozzle Whether there is damage, scratches, accumulation of particles, etc. Material:Nozzle Manual tool:Cleanroom wiper、AIR GUN Notice:Do not use DI Water to wipe Nozzle PM Step:Use a Cleanroom wiper to the Nozzle or use CDA (Air Gun) to clean the Nozzle, and install it after cleaning.
PM Step:Visually confirm whether the Nozzle is damaged and after cleaning, put the Nozzle back into the Holder,And after reinstalling, rotate to test whether it is installed。 Insert HOLD on one side and complete the After the installation is completed, the test needs to be continuously rotated for 5 installation on the other side cycles to confirm that the Nozzle function is normal Clean both A300 and SEP Nozzle Check whether the A300 4PCS and SEP 2PCS are on the Plate - 24 - Brillian Network & Auto
16.3.3 Purpose:Maintain gas cleanliness Material:Filter Manual tool:Wrench Notice:The direction is marked on the appearance, please install according to the flow direction PM Step:Turn off power,assemble components and snug fingertight, Then use a movable wrench to loosen the SWG connectors on the left and right sides of the Filter and replace it with a new Filter.。 Under Plate Filter description,Two groups SEP&A300 N2 Filter description - 25 - Brillian Network & Automation Integrated System Co., Ltd.
16.3.4 Purpose:Check Pressure Material:NA Manual tool:Wrench Notice:NA PM Step:Zero value confirmation, Remove the XCDA, N2, and Exhaust pipes, and observe whether the meter head value is zero,If the value is not zero, please reset to zero。 XCDA, N2, Exhaust pipeline position, please use a wrench to remove At the same time the pressure will be reset to zero by pressing the left and right buttons for 3 seconds - 26 - Brillian Network & Automation Integrated System Co., Ltd.
16.3.5 Purpose:Confirm the MFC、Valve、Flow Meter、Vacuum generator Material:無 Manual tool:NA Notice:software Test PM 步驟:Software Step - 27 - Brillian Network & Automation Integrated System Co., Ltd.
17 Revision History # Date 1 May 28, 2021 2 July 06, 2021 Rev. 1.0 1.1 Description Standard Version Page1 1 Introduction Page 21 Periodical maintenance Attention Name Roxas Li Roxas Li - 28 - Brillian Network & Automation Integrated System Co., Ltd.