vacuum technologies Capacitance Diaphragm Gauge CDG-500 Instruction Manual Incl.
Product Identification In all communications with VARIAN, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
Validity This document applies to products with the following part numbers: Gauges without switching functions Measurement range, Full Scale (F.S.) Part number Flange CDG500T1000KF16 DN 16 ISO-KF CDG500T1000VCR8 8 VCR CDG500T0100KF16 DN 16 ISO-KF CDG500T0100VCR8 8 VCR CDG500T0010KF16 DN 16 ISO-KF CDG500T0010VCR8 8 VCR CDG500T0001KF16 DN 16 ISO-KF CDG500T0001VCR8 8 VCR tqna49e1 (2010-05) ® ® ® ® Torr -1 Pascal 1 mbar 10 … 1000 (F.S.) 1.33×10 … 133'322 (F.S.) 1.33×10-1 … 1333 (F.
Gauges with two switching functions Measurement range, Full Scale (F.S.) Part number Flange CDG500T1000KF16S DN 16 ISO-KF CDG500T1000VCR8S 8 VCR CDG500T0100KF16S DN 16 ISO-KF CDG500T0100VCR8S 8 VCR CDG500T0010KF16S DN 16 ISO-KF CDG500T0010VCR8S ® 8 VCR CDG500T0001KF16S DN 16 ISO-KF CDG500T0001VCR8S ® ® ® 8 VCR Torr Pascal mbar 10-1 … 1000 (F.S.) 1.33×101 … 133'322 (F.S.) 1.33×10-1 … 1333 (F.S.) 10-2 … 100 (F.S.) 1.33×100 … 13'332.2 (F.S.) 1.33×10-2 … 133 (F.S.) 10-3 … 10 (F.S.
Intended Use The Capacitance Diaphragm Gauge CDG-500 is intended for absolute pressure measurement of gases in its respective pressure range (→ 3). The gauge can be operated in connection with a VARIAN AGC-100 Vacuum Gauge Controller, a Varian Turbo AG Rack Controller, or with another appropriate measuring unit. Function The Capacitance Diaphragm Gauge consists of a capacitive sensor element made of aluminum oxide ceramics and electronics which convert the capacitance into a DC voltage output signal.
Contents Product Identification Validity Intended Use, Function Trademark, Patents Scope of Delivery 2 3 5 5 5 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 7 7 7 8 8 2 Technical Data 9 3 Installation 3.1 Vacuum Connection 3.2 Power Connection 14 14 17 4 Operation 4.1 Displays 4.2 Zeroing the Gauge 4.3 Switching Functions 4.
1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice 1.
1.3 General Safety Instructions • Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. • Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document. • Before beginning to work, find out whether any vacuum components are contaminated.
2 Technical Data Measurement range Accuracy 1) Temperature effect on zero ≥10 Torr/mbar (F.S.) 1 Torr/mbar (F.S.) Temperature effect on span Resolution Gas type dependence Output signal analog (measuring signal) Voltage range Measuring range Relationship voltage-pressure Output impedance Loaded impedance Response time Gauge identification 1) tqna49e1 → "Validity" 0.20% of reading 0.0050% F.S./ °C 0.015% F.S./ °C 0.01% of reading / °C 0.003% F.S. none –5 … +10.
Switching functions Setting range SP1, SP2 0 … +10 V 1% F.S. Hysteresis Relay contact 30 VDC / ≤0.5 ADC floating (n.o.) at low pressure (LED is lit) at high pressure (LED is dark) closed open Switching time ≤50 ms RS232C interface Transmission rate Data format 9600 baud binary 8 data bits one stop bit no parity bit no handshake → "Electrical Connection" Connection Further information about the RS232C interface → [2].
Current consumption <500 mA (max. starting current) Power consumption (depending on supply voltage) Fuse required 2) ≤1 W 1 AT (slow), automatic reset (Polyfuse) The gauge is protected against reverse polarity of the supply voltage. Electrical connection Sensor cable without switching functions with switching functions Cable length 15-pin D-Sub, male 5-pin plus shielding 9-pin plus shielding ≤100 m (0.14 mm² conductor) For longer cables, larger conductor cross-sections are required (Rcable ≤1.0 Ω).
Admissible temperatures Storage Operation Bakeout (not in operation) Relative humidity Use Degree of protection –40 °C … +65 °C +5 °C … +50 °C ≤110 °C at the flange ≤80% at temperatures ≤+31 °C decreasing to 50% at +40°C indoors only, altitude up to 2000 m NN IP 30 Dimensions [mm] 44 44 69 3.
Analog Measuring Signal vs. Pressure Pressure p 1.1×F.S. 1.0×F.S. 0.9×F.S. 0.8×F.S. 0.7×F.S. 0.6×F.S. 0.5×F.S. 0.4×F.S. 0.3×F.S. 0.2×F.S. 0.1×F.S. 0.0×F.S. 0 1 2 3 4 5 6 7 8 9 10 Measuring signal Uout [V] p = (Uout / 10 V) × p (F.S.) Conversion Torr ↔ Pascal c Torr mbar 3) Pa 3) 1.00 1013.25 / 760 = 1.3332… 101325 / 760 = 133.3224… Example: Gauge with 10 Torr F.S. Measuring signal Uout = 6 V p = (6 V / 10 V) × 10 Torr = 0.
3 Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. Use the type clamps which are suited to overpressure.
DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010: • VCR flanges fulfill this requirement. • For gauges with a KF flange, use a conductive metallic clamping ring. Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component.
Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter. If adjustment should be possible after the gauge has been installed, be sure to install it so that the buttons can be accessed with a pin (→ 20). Remove the protective lid and connect the product to the vacuum system.
3.2 Power Connection Make sure the vacuum connection is properly made (→ 14). DANGER The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extralow voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused 4). Ground loops, differences of potential, or EMC problems may affect the measurement signal.
n If no sensor cable is available, make one according to the following diagram.
4 Operation Put the gauge into operation. If you are using an VARIAN con[1]). troller, define the measurement range (→ A warm-up time of at least ¼ hour should be allowed; for exact pressure measurements a warm-up time of at least 2 hours is required. 4.
4.2 Zeroing the Gauge The gauge is factory calibrated while "standing upright" (→ "Calibration Test Report"). We recommend performing a zero adjustment, when the gauge is operated for the first time. Due to long time operation or contamination, a zero drift could occur and zero adjustment may become necessary. For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation as normally.
4.2.1 Adjustment n Evacuate the gauge to a pressure according to the table below: F.S. 1000 100 10 1 Torr/mbar Torr/mbar Torr/mbar Torr/mbar Recommended final pressure for zero adjustment <5×10-2 Torr <5×10-3 Torr <5×10-4 Torr <5×10-5 Torr <6.65×100 Pa <6.65×10-1 Pa <6.65×10-2 Pa <6.65×10-3 Pa <5×10-2 mbar <5×10-3 mbar <5×10-4 mbar <5×10-5 mbar If the final pressure in the gauge is too high for zero adjustment (>25% of the F.S.), the zero cannot be reached and the LED flashes.
After zero adjustment the gauge automatically returns to measurement mode. The LED lits. The zero can also be adjusted via the RS232C interface (→ [2]). The LED flashes if • the signal output is negative (< -20 mV) when the final pressure has been attained • the zero adjustment has failed. 4.2.2 Adjustment with Ramp Function The ramp function allows to adjust the zero at a known reference pressure within the measurement range of the gauge.
Keep the button depressed max. ø1.1 mm p Push the button again: Fine adjustment within 0...3 s: Change of direction within 3...5 s: the zero adjustment value changes by one unit (push button in intervals of 1 s) the zero adjustment changes its direction (the flashing frequency of the LED changes briefly) If the button is released for more than 5 s, the gauge returns to the measurement mode.
4.3 Switching Functions The two switching functions can be adjusted to any pressure within the whole measurement range (→ 13). The current setpoint setting • is output at the D-Sub connector instead of the measurement signal (→ 18) and can be measured with a voltmeter after the button is pressed, or • can be read/written via the RS232C interface. If the pressure is lower than the setpoint, the corresponding LED is lit (<1> or <2>) and the corresponding relay (→ 18) is energized.
4.3.1 Adjusting the Setpoints The setpoints can be adjusted via • the buttons on the gauge, • the RS232C interface (→ [2]). DANGER DANGER: malfunction If processes are controlled via the signal output, keep in mind that by pushing the button the measurement signal is suppressed and the corresponding threshold value is output instead. This can cause malfunctions. Push the button only if you are sure that no damages can arise from a malfunction.
Adjusting Setpoint <1> n Push the button with a pin (max. ø1.1 mm). The gauge changes to the switching function mode and outputs the current lower threshold value at the measurement value output for about 10 s (LED <1> flashes). Press the button max. ø1.1 mm o For changing the threshold value, push the button and keep it depressed. The threshold keeps changing from the current value (ramp) until the button is released or until the limit of the setting range is reached.
p Push the button again: Fine adjustment within 0...3 s: Change of direction within 3...5 s: the zero adjustment value changes by one unit the zero adjustment changes its direction (the flashing frequency of the LED changes briefly) If the button is released for more than 5 s, the gauge returns the measurement mode. The upper threshold is automatically set 1% F.S. above the lower one (hysteresis). Adjusting Setpoint <2> Push the button twice (LED <2> flashes).
5 Deinstallation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. n o p q tqna49e1 Vent the vacuum system. Put the gauge out off operation. Unfasten the lock screws and disconnect the sensor cable. Remove the gauge from the vacuum system and install the protective lid.
6 Maintenance, Repair Under clean operating conditions, the product requires no maintenance. Gauge failures due to contamination are not covered by the warranty. We recommend checking the zero at regular intervals (→ 21). VARIAN assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. 7 Returning the Product WARNING WARNING: forwarding contaminated products Contaminated products (e.g.
8 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING N WARNING: substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Further Information 32 [1] www.varianinc.com INSTRUCTION MANUAL AGC-100 Vacuum Gauge Controller tqnb01e1 Varian Vacuum Technologies, Lexington, MA, 02421 USA [2] www.varianinc.
ETL Certification 3103457 tqna49e1 (2010-05) ETL LISTED The product CDG-500 complies with the requirements of the following Standards: UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2005/07/22 CAN/CSA C22.
EC Declaration of Conformity We, VARIAN, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2004/108/EC.
Notes tqna49e1 (2010-05) 35
vacuum technologies 121 Hartwell Avenue Lexington, MA, 02421 USA Tel: (781) 861 7200 Fax: (781) 861 5437 custserv@varianinc.com t qna49e1 www.varianinc.
